公开(公告)号：US6108397A

公开(公告)日：2000-08-22

申请号：US196472

申请日：1998-11-19

Applicant: Webster C. Cash, Jr.

Inventor： Webster C. Cash, Jr.

IPC: G03F7/20 ,  G21K1/06 ,  G21K5/00

CPC classification number: B82Y10/00 ,  G03F7/70166 ,  G03F7/7035 ,  G21K1/06

Abstract: A new class of x-ray optic suitable for use in x-ray proximity lithography employs many mirror facets arranged in a grazing incidence geometry at a relatively large distance from the mask. Each mirror facet is substantially flat in that its radius of curvature is substantially larger than the target. Each facet creates an optically independent channel that covers the entire target. The facets are arranged so that many channels can simultaneously illuminate the target, thereby achieving high flux at the target with high uniformity. Constraints on local and global divergence at the mask are met by making the optic sufficiently small and placing it sufficiently distant from the target.

Abstract translation: 适合用于x射线邻近光刻的新类型的X射线光学器件采用许多镜面，其布置成与掩模相距较大距离的掠入射几何形状。 每个镜面都是基本上平坦的，因为它的曲率半径显着大于目标。 每个刻面创建一个光学独立的通道，覆盖整个目标。 这些面被布置成使得许多通道可以同时照射目标，从而在高均匀性的情况下实现目标的高通量。 通过使光学元件足够小并将其放置得远离目标来满足掩模上局部和全局发散的约束。

公开(公告)号：US06366801B1

公开(公告)日：2002-04-02

申请号：US09550498

申请日：2000-04-14

Applicant: Webster C. Cash, Jr. ,  Michael D. Weil

Inventor： Webster C. Cash, Jr. ,  Michael D. Weil

IPC: A61B600

CPC classification number: A61N5/10 ,  A61K41/0085 ,  A61K49/006 ,  A61K49/0461 ,  A61N2005/1091 ,  A61N2005/1098

Abstract: Contrast agents developed specifically for x-ray diagnostics provide dose-enhanced radiotherapy and radiosurgery. The presence of heavy elements from these contrast agents, even small quantities, leads to a major dose increase in target tissue. When combined with in vivo calibration of the amount of contrast agent, the procedure is quick, accurate, and safe. The technique can also be used in combination with other techniques, such as focused x-rays, to achieve further enhancement of therapeutic ratio. Through optimization of the equipment it is possible to achieve very large ratios of dose in target to dose in healthy tissue, up to 10:1.

Abstract translation: 专为x射线诊断开发的造影剂可提供剂量增强的放射治疗和放射外科手术。 来自这些造影剂的重元素甚至少量的存在导致靶组织中主要的剂量增加。 结合造影剂量的体内校准时，手术快速，准确，安全。 该技术还可以与诸如聚焦X射线的其它技术结合使用，以进一步提高治疗比。 通过优化设备，可以在健康组织中达到非常大的剂量比例，达到10：1。

公开(公告)号：US5604782A

公开(公告)日：1997-02-18

申请号：US514134

申请日：1995-08-11

Applicant: Webster C. Cash, Jr.

Inventor： Webster C. Cash, Jr.

IPC: G02B5/08 ,  G21K1/06

CPC classification number: G21K1/06 ,  G21K2201/06

Abstract: An optical system for x-rays combines at least two spherical or near spherical mirrors for each dimension in grazing incidence orientation to provide the functions of a lens in the x-ray region. To focus x-ray radiation in both the X and the Y dimensions, one of the mirrors focusses the X dimension, a second mirror focusses the Y direction, a third mirror corrects the X dimension by removing comatic aberration and a fourth mirror corrects the Y dimension. Spherical aberration may also be removed for an even better focus. The order of the mirrors is unimportant.

Abstract translation: 用于x射线的光学系统在掠射入射取向中针对每个尺寸组合至少两个球形或近球形镜，以提供X射线区域中的透镜的功能。 为了将X射线辐射聚焦在X和Y维度中，其中一个镜子聚焦于X尺寸，第二个镜子聚焦于Y方向，第三个镜子通过去除彗形像差来校正X尺寸，第四个镜子校正Y 尺寸。 也可以去除球面像差以获得更好的聚焦。 镜子的顺序是不重要的。

公开(公告)号：US06195410B1

公开(公告)日：2001-02-27

申请号：US09491956

申请日：2000-01-26

Applicant: Webster C. Cash, Jr.

Inventor： Webster C. Cash, Jr.

IPC: G01N2306

CPC classification number: G01N23/04 ,  G21K2201/06

Abstract: An interferometer that uses plane mirrors at grazing incidence to create interference fringes in the extreme ultraviolet and x-ray portions of the spectrum. X-ray interferometry has historically been implemented through narrow band, diffractive systems that split the wavefront. By using two separate optical channels at grazing incidence to create interference from two areas of the wavefront, this system has broad band response and much higher efficiency. The interferometer has applications to telescopes, microscopes and spectrometers in the extreme ultraviolet and x-ray, and high contrast imaging in the visible.

Abstract translation: 使用平面镜在掠射入射处的干涉仪在光谱的极紫外和X射线部分产生干涉条纹。 历史上，X射线干涉测量是通过分裂波前的窄带衍射系统实现的。 通过在掠射入射处使用两个独立的光学通道来产生来自波前两个区域的干扰，该系统具有宽带响应和更高的效率。 该干涉仪可用于望远镜，显微镜和光谱仪中的极紫外和X射线以及可见光的高对比度成像。

公开(公告)号：US6125295A

公开(公告)日：2000-09-26

申请号：US140981

申请日：1998-08-27

Applicant: Webster C. Cash, Jr. ,  Michael D. Weil

Inventor： Webster C. Cash, Jr. ,  Michael D. Weil

IPC: A61K41/00 ,  A61N5/10 ,  A61B6/00

CPC classification number: A61N5/10 ,  A61K41/0085 ,  A61N2005/1091 ,  A61N2005/1098

Abstract: Contrast agents developed specifically for x-ray diagnostics provide dose-enhanced radiotherapy and radiosurgery. The presence of heavy elements from these contrast agents, even small quantities, leads to a major dose increase in target tissue. When combined with in vivo calibration of the amount of contrast agent, the procedure is quick, accurate, and safe. The technique can also be used in combination with other techniques, such as focused x-rays, to achieve further enhancement of therapeutic ratio. Through optimization of the equipment it is possible to achieve very large ratios of dose in target to dose in healthy tissue up to 10:1.

Abstract translation: 专为x射线诊断开发的造影剂可提供剂量增强的放射治疗和放射外科手术。 来自这些造影剂的重元素甚至少量的存在导致靶组织中主要的剂量增加。 结合造影剂量的体内校准时，手术快速，准确，安全。 该技术还可以与诸如聚焦X射线的其它技术结合使用，以进一步提高治疗比。 通过设备的优化，可以在健康组织中达到非常大的剂量比例，达到10：1。

公开(公告)号：US06049588A

公开(公告)日：2000-04-11

申请号：US113487

申请日：1998-07-10

Applicant: Webster C. Cash, Jr.

Inventor： Webster C. Cash, Jr.

IPC: G03F7/20 ,  G21K1/06

CPC classification number: B82Y10/00 ,  G03F7/70166 ,  G03F7/70958 ,  G21K1/06

Abstract: An x-ray collimator for use primarily in x-ray lithography for semiconductor fabrication provides a multi-channel collimator to produce a series of collimated beams from an x-ray source. Each channel in the array gathers photons from a small solid angle of the x-ray source and employs at least two pairs of orthogonal spherical mirrors in grazing incidence to produce a collimated beam. An array of flat mirrors steer the collimated beams into a slightly converging geometry. A beam assembler then combines the beams to create a single, large collimated beam that can be used to expose the die.

Abstract translation: 主要用于半导体制造的x射线光刻的X射线准直器提供多通道准直器，以从X射线源产生一系列准直光束。 阵列中的每个通道从X射线源的小立体角收集光子，并且在掠入射中使用至少两对正交球面镜来产生准直光束。 平面镜阵列将准直光束引导成稍微收敛的几何形状。 光束组合器然后组合光束以产生可用于暴露裸片的单个大的准直光束。