MICROELECTROMECHANICAL SYSTEMS (MEMS) RECTIFIER AND STORAGE ELEMENT FOR ENERGY HARVESTING

    公开(公告)号:WO2023075938A1

    公开(公告)日:2023-05-04

    申请号:PCT/US2022/043012

    申请日:2022-09-09

    Inventor: LAL, Amit

    Abstract: An electronic device includes a microelectromechanical system (MEMS) rectifier. The MEMS rectifier (100) includes a mainboard (102) and a sub-board (112). The mainboard has one or more radiofrequency (RF) inputs (104) configured to receive an RF signal, and a first electrical contact (106). The sub-board (112) is positioned parallel to the mainboard (102) with a gap in-between, and has a thin film piezoelectric, layer (114), a second electrical (116) contact positioned opposite the first electrical contact (106), and a ground plane (118). The sub-board (112) is configured to vibrate as the RF signal is received at the one or more RF inputs (104), and the thin film piezoelectric layer (114) is configured to generate energy due to the vibration and piezoelectric properties of the thin film piezoelectric layer (114).

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