公开(公告)号：BR0306028A

公开(公告)日：2004-08-31

申请号：BR0306028

申请日：2003-12-15

Applicant: XEROX CORP

Inventor： WONG WILLIAM S ,  CHABINYC MICHAEL L ,  READY STEVEN E ,  KNEISSL MICHAEL A ,  TEEPE MARK R

IPC: G01N35/08 ,  B01L3/00 ,  B29C39/10 ,  B29L31/34 ,  B81C1/00 ,  G01N21/01 ,  G01N37/00 ,  H01L31/0352 ,  G01N21/64

Abstract: A method of forming an integrated microelectronic device and a micro channel is provided. The method offers an inexpensive way of integrating devices that are usually incompatible during fabrication, a microchannel and a microelectronic structure such as an electro-optic light source, a detector or a MEMs device into a single integrated structure.

公开(公告)号：JP2004198420A

公开(公告)日：2004-07-15

申请号：JP2003415635

申请日：2003-12-12

Applicant: Xerox Corp ,  ゼロックス コーポレイションXerox Corporation

Inventor： WONG WILLIAM S ,  CHABINYC MICHAEL L ,  SUTEIIBUN II REDEI ,  KNEISSL MICHAEL A ,  TEEPE MARK R

IPC: G01N35/08 ,  B01L3/00 ,  B29C39/10 ,  B29L31/34 ,  B81C1/00 ,  G01N21/01 ,  G01N37/00

CPC classification number: B81C1/00492 ,  B01L3/502707 ,  B01L2200/12 ,  B01L2300/0654 ,  B01L2300/0663 ,  B81B2201/058 ,  G01N21/01 ,  H01L2221/68363

Abstract: PROBLEM TO BE SOLVED: To provide an inexpensive and easy microsystem manufacturing method wherein a micro fluidic channel aligned with another electronic or photoelectronic elements is integrated on one platform.
SOLUTION: The present invention provides an integration method for microelectronic devices and the micro channel. The method is an inexpensive method for integrating a device group not adaptable each other in usual manufacture, the microchannel, microelectronic structure, for example, an electro-optic light source, and a detector or an MEMS device into one integrated structure.
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