公开(公告)号：DE69103738T2

公开(公告)日：1994-12-22

申请号：DE69103738

申请日：1991-12-06

Applicant: XEROX CORP

Inventor： MELNYK ANDREW R ,  SWALES MICHAEL G ,  TENEY DONALD

IPC: C23C14/24 ,  C23C14/26 ,  G03G5/08 ,  G03G5/082

Abstract: A vacuum evaporation container includinging a resistively heatable cylindrical crucible having at least one open end and having an axially aligned slot and a hollow cylindrical insert concentrically located within the cylindrical crucible, the insert having a slot aligned with the slot of the crucible, closed ends and an electrical conductivity less than the electrical conductivity of the electrically conductive cylindrical crucible. This vacuum evaporation container is employed in a vacuum deposition process.

公开(公告)号：DE69103738D1

公开(公告)日：1994-10-06

申请号：DE69103738

申请日：1991-12-06

Applicant: XEROX CORP

Inventor： MELNYK ANDREW R ,  SWALES MICHAEL G ,  TENEY DONALD

IPC: C23C14/24 ,  C23C14/26 ,  G03G5/08 ,  G03G5/082

Abstract: A vacuum evaporation container includinging a resistively heatable cylindrical crucible having at least one open end and having an axially aligned slot and a hollow cylindrical insert concentrically located within the cylindrical crucible, the insert having a slot aligned with the slot of the crucible, closed ends and an electrical conductivity less than the electrical conductivity of the electrically conductive cylindrical crucible. This vacuum evaporation container is employed in a vacuum deposition process.