-
公开(公告)号:US20040150872A1
公开(公告)日:2004-08-05
申请号:US10695109
申请日:2003-10-28
Applicant: Xros, Inc., a California corporation
Inventor: Armand P. Neukermans , Timothy G. Slater , Marc R. Schuman , Jack D. Foster , Sam Calmes , Sateesh S. Bajikar , Arun Malhotra , Jane Ang , Jerry Hurst , John Green
IPC: G02B026/00
CPC classification number: G02B6/3584 , G02B6/262 , G02B6/32 , G02B6/3512 , G02B6/356 , G02B6/357 , G02B6/359 , G02B6/4249 , G02B26/0833 , G02B26/0841 , G02B26/085
Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.
-
公开(公告)号:US20030076576A1
公开(公告)日:2003-04-24
申请号:US10157354
申请日:2002-05-28
Applicant: Xros, Inc.
Inventor: Armand P. Neukermans , Timothy G. Slater , Marc R. Schuman , Jack D. Foster , Sam Calmes , Sateesh S. Bajikar , Arun Malhotra , Jane Ang , Jerry Hurst , John Green
IPC: G02B026/00
CPC classification number: G02B6/3584 , G02B6/262 , G02B6/32 , G02B6/3512 , G02B6/356 , G02B6/357 , G02B6/359 , G02B6/4249 , G02B26/0833 , G02B26/0841 , G02B26/085
Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.
Abstract translation: 提出了具有多个具有改进的偏转和其它特性的二维微镜结构的微镜条组件。 在微镜结构中,用于静电偏转的电极设置在被加工,附接或模制成基底的锥形或准圆锥形实体上。 这些电极与旋转轴大致平行或偏移45度,形成象限。 扭转传感器沿旋转轴提供,以控制象限偏转电极的偏转。
-