公开(公告)号：DE102005053415A1

公开(公告)日：2007-05-10

申请号：DE102005053415

申请日：2005-11-04

Applicant: ZEISS CARL LASER OPTICS GMBH

Inventor： ANDERL WILLI ,  BINGEL ULRICH ,  WEIGL BERNHARD ,  DINGER UDO ,  KUHN JOCHEN ,  MARCZUK PIOTR ,  HAFNER WOLFGANG ,  MATTHES AXEL

IPC: G02B5/08 ,  G02B7/195 ,  G03F7/20

Abstract: The present invention relates to an optical collector for use in EUV lithography, comprising at least one optically effective element in form of a mirror shell having a substantially cup-shaped structure which heats up when irradiated with light, further comprising at least one mounting element for fastening the at least one optically effective element on a holding structure, the at least one optically effective element having a body, and further comprising an active cooling system, which has at least one cooling conduit to which a cooling medium can be admitted, wherein the at least one cooling conduit is provided on a cooling body which is directly connected with the body of the optically effective element or is integrated in same.