METHOD AND APPARATUS FOR MONITORING PORT BLOCKAGE FOR TDLAS MEASUREMENTS IN HARSH ENVIRONMENTS

    公开(公告)号:CA2934271A1

    公开(公告)日:2015-06-25

    申请号:CA2934271

    申请日:2014-12-22

    Applicant: ZOLO TECH INC

    Abstract: A method of monitoring blockage of a sight tube attached to a wall of a process chamber, the sight tube being operatively associated with a TDLAS optical head with a window between the sight tube and the TDLAS optical head. The method includes the steps of providing a photo sensor in the TDLAS optical head, the photo sensor being positioned to receive light emitted by a light emitting process within the process chamber. An emission signal produced by light emitted by the light emitting process within the process chamber being received by the photo sensor is monitored. A determination is made if the emission signal is degrading.

    METHOD AND APPARATUS FOR MONITORING PORT BLOCKAGE FOR TDLAS MEASUREMENTS IN HARSH ENVIRONMENTS

    公开(公告)号:CA2934271C

    公开(公告)日:2022-05-31

    申请号:CA2934271

    申请日:2014-12-22

    Applicant: ZOLO TECH INC

    Abstract: A method of monitoring blockage of a sight tube attached to a wall of a process chamber, the sight tube being operatively associated with a TDLAS optical head with a window between the sight tube and the TDLAS optical head. The method includes the steps of providing a photo sensor in the TDLAS optical head, the photo sensor being positioned to receive light emitted by a light emitting process within the process chamber. An emission signal produced by light emitted by the light emitting process within the process chamber being received by the photo sensor is monitored. A determination is made if the emission signal is degrading.

    TDLAS ARCHITECTURE FOR WIDELY SPACED WAVELENGTHS

    公开(公告)号:CA2972253A1

    公开(公告)日:2016-06-30

    申请号:CA2972253

    申请日:2015-11-18

    Applicant: ZOLO TECH INC

    Abstract: A system for widely spaced wavelength tunable diode laser absorption spectroscopy includes at least a first and second tunable diode laser generating laser light at a first and second wavelength, wherein laser light of the first and second wavelengths cannot co-propagate efficiently on the same single-mode fiber. A first fiber may be configured to carry light in the first wavelength, and a second fiber configured to carry light in the second wavelength. A fiber bundle may be formed from the distal ends of the first and second fibers stripped of their respective coatings, and arranged with their claddings adjacent to each other. One or more pitch heads are configured to project respective beams of laser light from the fiber bundle through a measurement zone. One or more catch heads located across the measurement zone receive the respective beams and direct the respective beams onto at least one sensor.

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