公开(公告)号：US09896604B2

公开(公告)日：2018-02-20

申请号：US14206947

申请日：2014-03-12

Applicant: Ecolab USA Inc.

Inventor： Kim Marie Long ,  Michael A. Kamrath ,  Sean McCue

IPC: H01L21/302 ,  H01L21/461 ,  H01L21/311 ,  B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C09G1/02 ,  H01L21/3105 ,  H01L21/02 ,  H01L21/768 ,  C09G1/04 ,  B24B37/04 ,  B24B7/22 ,  B81C1/00

CPC classification number: C09G1/02 ,  B24B7/228 ,  B24B37/044 ,  B81C1/00611 ,  B81C2201/0118 ,  C09G1/04 ,  H01L21/02065 ,  H01L21/31051 ,  H01L21/31055 ,  H01L21/7684

Abstract: Described herein are compositions, kits and methods for polishing sapphire surfaces using compositions having colloidal aluminosilicate particles in an aqueous acidic solution. In some aspects, the methods for polishing a sapphire surface may include abrading a sapphire surface with a rotating polishing pad and a polishing composition. The polishing composition may include an amount of a colloidal aluminosilicate and may have a pH of about 2.0 to about 7.0.

公开(公告)号：US20170140921A1

公开(公告)日：2017-05-18

申请号：US15336909

申请日：2016-10-28

Applicant: CANON KABUSHIKI KAISHA

Inventor： Niyaz Khusnatdinov ,  Dwayne L. LaBrake

IPC: H01L21/027 ,  H01L21/306 ,  H01L21/308

CPC classification number: H01L21/0273 ,  B81C1/00611 ,  B81C2201/0118 ,  B81C2201/0121 ,  B81C2201/0126 ,  H01L21/28194 ,  H01L21/30604 ,  H01L21/30655 ,  H01L21/3081 ,  H01L21/3085 ,  H01L21/3086 ,  H01L21/31116 ,  H01L21/31138 ,  H01L21/7684

Abstract: Methods of reversing the tone of a pattern having non-uniformly sized features. The methods include depositing a highly conformal hard mask layer over the patterned layer with a non-planar protective coating and etch schemes for minimizing critical dimension variations.

公开(公告)号：US20230331546A1

公开(公告)日：2023-10-19

申请号：US17724157

申请日：2022-04-19

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

Inventor： FAN HU ,  WEN-CHUAN TAI ,  LI-CHUN PENG ,  HSIANG-FU CHEN

IPC: B81C3/00

CPC classification number: B81C3/001 ,  B81C2201/0118 ,  B81C2203/0109 ,  B81C2203/0172

Abstract: A MEMS package is provided. The MEMS package includes a metallization layer, a planarization structure, a MEMS device structure, a cap structure and a pressure adjustment element. The planarization structure has an inner sidewall defining a first cavity exposing the metallization layer. The MEMS device structure is bonded to the planarization structure. The MEMS device structure includes a movable element over the first cavity. The cap structure is bonded to the MEMS device structure and has an inner sidewall defining a second cavity facing the movable element. The pressure adjustment element is disposed in the second cavity.

公开(公告)号：US20140263170A1

公开(公告)日：2014-09-18

申请号：US14206947

申请日：2014-03-12

Applicant: Ecolab USA Inc.

Inventor： Kim Marie Long ,  Michael A. Kamrath ,  Sean McCue

IPC: C09G1/02

CPC classification number: C09G1/02 ,  B24B7/228 ,  B24B37/044 ,  B81C1/00611 ,  B81C2201/0118 ,  C09G1/04 ,  H01L21/02065 ,  H01L21/31051 ,  H01L21/31055 ,  H01L21/7684

Abstract: Described herein are compositions, kits and methods for polishing sapphire surfaces using compositions having colloidal aluminosilicate particles in an aqueous acidic solution. In some aspects, the methods for polishing a sapphire surface may include abrading a sapphire surface with a rotating polishing pad and a polishing composition. The polishing composition may include an amount of a colloidal aluminosilicate and may have a pH of about 2.0 to about 7.0.

Abstract translation: 本文描述了使用在酸性水溶液中具有胶体硅铝酸盐颗粒的组合物来抛光蓝宝石表面的组合物，试剂盒和方法。 在一些方面，抛光蓝宝石表面的方法可包括用旋转抛光垫和抛光组合物研磨蓝宝石表面。 抛光组合物可以包括一定量的胶体硅铝酸盐，并且可以具有约2.0至约7.0的pH。

公开(公告)号：EP2969391A1

公开(公告)日：2016-01-20

申请号：EP14770101.5

申请日：2014-03-12

Applicant: Ecolab USA Inc.

Inventor： LONG, Kim Marie ,  KAMRATH, Michael A. ,  MCCUE, Sean

IPC: B24B37/00 ,  C09K3/14

CPC classification number: C09G1/02 ,  B24B7/228 ,  B24B37/044 ,  B81C1/00611 ,  B81C2201/0118 ,  C09G1/04 ,  H01L21/02065 ,  H01L21/31051 ,  H01L21/31055 ,  H01L21/7684

Abstract: Described herein are compositions, kits and methods for polishing sapphire surfaces using compositions having colloidal aluminosilicate particles in an aqueous acidic solution. In some aspects, the methods for polishing a sapphire surface may include abrading a sapphire surface with a rotating polishing pad and a polishing composition. The polishing composition may include an amount of a colloidal aluminosilicate and may have a pH of about 2.0 to about 7.0.

公开(公告)号：WO2014150884A1

公开(公告)日：2014-09-25

申请号：PCT/US2014/024455

申请日：2014-03-12

Applicant: ECOLAB USA INC.

Inventor： LONG, Kim Marie ,  KAMRATH, Michael A. ,  MCCUE, Sean

IPC: B24B37/00 ,  C09K3/14

CPC classification number: C09G1/02 ,  B24B7/228 ,  B24B37/044 ,  B81C1/00611 ,  B81C2201/0118 ,  C09G1/04 ,  H01L21/02065 ,  H01L21/31051 ,  H01L21/31055 ,  H01L21/7684

Abstract: Described herein are compositions, kits and methods for polishing sapphire surfaces using compositions having colloidal aluminosilicate particles in an aqueous acidic solution. In some aspects, the methods for polishing a sapphire surface may include abrading a sapphire surface with a rotating polishing pad and a polishing composition. The polishing composition may include an amount of a colloidal aluminosilicate and may have a pH of about 2.0 to about 7.0.

Abstract translation: 本文描述了使用在酸性水溶液中具有胶体硅铝酸盐颗粒的组合物来抛光蓝宝石表面的组合物，试剂盒和方法。 在一些方面，抛光蓝宝石表面的方法可包括用旋转抛光垫和抛光组合物研磨蓝宝石表面。 抛光组合物可以包括胶体硅铝酸盐的量，并且可以具有约2.0至约7.0的pH。

公开(公告)号：EP2969391B1

公开(公告)日：2018-04-25

申请号：EP14770101.5

申请日：2014-03-12

Applicant: Ecolab USA Inc.

Inventor： LONG, Kim Marie ,  KAMRATH, Michael A. ,  MCCUE, Sean

IPC: B24B37/00 ,  C09K3/14

CPC classification number: C09G1/02 ,  B24B7/228 ,  B24B37/044 ,  B81C1/00611 ,  B81C2201/0118 ,  C09G1/04 ,  H01L21/02065 ,  H01L21/31051 ,  H01L21/31055 ,  H01L21/7684

Abstract: Described herein are compositions, kits and methods for polishing sapphire surfaces using compositions having colloidal aluminosilicate particles in an aqueous acidic solution. In some aspects, the methods for polishing a sapphire surface may include abrading a sapphire surface with a rotating polishing pad and a polishing composition. The polishing composition may include an amount of a colloidal aluminosilicate and may have a pH of about 2.0 to about 7.0.

公开(公告)号：EP2969391A4

公开(公告)日：2017-02-01

申请号：EP14770101

申请日：2014-03-12

Applicant: ECOLAB USA INC

Inventor： LONG KIM MARIE ,  KAMRATH MICHAEL A ,  MCCUE SEAN

IPC: B24B37/00 ,  C09K3/14

CPC classification number: C09G1/02 ,  B24B7/228 ,  B24B37/044 ,  B81C1/00611 ,  B81C2201/0118 ,  C09G1/04 ,  H01L21/02065 ,  H01L21/31051 ,  H01L21/31055 ,  H01L21/7684

Abstract: Described herein are compositions, kits and methods for polishing sapphire surfaces using compositions having colloidal aluminosilicate particles in an aqueous acidic solution. In some aspects, the methods for polishing a sapphire surface may include abrading a sapphire surface with a rotating polishing pad and a polishing composition. The polishing composition may include an amount of a colloidal aluminosilicate and may have a pH of about 2.0 to about 7.0.

Abstract translation: 本文描述了使用在酸性水溶液中具有胶体硅铝酸盐颗粒的组合物来抛光蓝宝石表面的组合物，试剂盒和方法。 在一些方面，抛光蓝宝石表面的方法可包括用旋转抛光垫和抛光组合物研磨蓝宝石表面。 抛光组合物可以包括一定量的胶体硅铝酸盐，并且可以具有约2.0至约7.0的pH。

公开(公告)号：JP6336009B2

公开(公告)日：2018-06-06

申请号：JP2016220903

申请日：2016-11-11

Applicant: キヤノン株式会社

Inventor： クスナトディノフ ニャーズ ,  ラブレイク エル ドウェイン

IPC: B29C59/02 ,  H01L21/027 ,  H01L21/3065

CPC classification number: H01L21/0273 ,  B81C1/00611 ,  B81C2201/0118 ,  B81C2201/0121 ,  B81C2201/0126 ,  H01L21/28194 ,  H01L21/30604 ,  H01L21/30655 ,  H01L21/3081 ,  H01L21/3085 ,  H01L21/3086 ,  H01L21/31116 ,  H01L21/31138 ,  H01L21/7684

公开(公告)号：JP2016520436A

公开(公告)日：2016-07-14

申请号：JP2016501542

申请日：2014-03-12

Applicant: エコラボ ユーエスエー インコーポレイティド ,  エコラボ ユーエスエー インコーポレイティド

Inventor： マリー ロング キム ,  マリー ロング キム ,  エー．カムラス マイケル ,  エー．カムラス マイケル ,  マッキュー ショーン ,  マッキュー ショーン

IPC: B24B37/00 ,  B24B1/00 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304

CPC classification number: C09G1/02 ,  B24B7/228 ,  B24B37/044 ,  B81C1/00611 ,  B81C2201/0118 ,  C09G1/04 ,  H01L21/02065 ,  H01L21/31051 ,  H01L21/31055 ,  H01L21/7684

Abstract: 酸性水溶液中のコロイド状アルミノケイ酸塩粒子を有する組成物を用いてサファイア表面を研磨するための組成物、キット及び方法が、本明細書に記載されている。いくつかの態様では、サファイアの表面を研磨するための方法は、回転研磨パッド及び研磨組成物でサファイア表面を摩耗させる工程を含み得る。研磨組成物は、有効量のコロイド状アルミノケイ酸塩を含むことができ、約2.0〜約7.0のpHを有し得る。

Abstract translation: 用于与具有在酸性水溶液中的胶体硅铝酸盐颗粒的组合物进行抛光的蓝宝石表面的组合物，在本文中描述的试剂盒和方法。 在一些实施方案中，用于抛光的蓝宝石表面上的方法可包括戴在蓝宝石表面与旋转的抛光垫及抛光组合物的步骤。 抛光组合物可包括胶态硅铝酸盐有效量，可以具有的pH为约2.0至约7.0。