公开(公告)号：US07106457B1

公开(公告)日：2006-09-12

申请号：US10857372

申请日：2004-05-21

Applicant: H. Philip Stahl ,  Chanda Bartlett Walker

Inventor： H. Philip Stahl ,  Chanda Bartlett Walker

IPC: G01B9/02

CPC classification number: G01J9/0215 ,  G01B11/272 ,  G01J2009/0296 ,  G02B27/62

Abstract: An achromatic shearing phase sensor generates an image indicative of at least one measure of alignment between two segments of a segmented telescope's mirrors. An optical grating receives at least a portion of irradiance originating at the segmented telescope in the form of a collimated beam and the collimated beam into a plurality of diffraction orders. Focusing optics separate and focus the diffraction orders. Filtering optics then filter the diffraction orders to generate a resultant set of diffraction orders that are modified. Imaging optics combine portions of the resultant set of diffraction orders to generate an interference pattern that is ultimately imaged by an imager.

Abstract translation: 消色差剪切相位传感器产生指示分段望远镜的两个部分之间的对准的至少一个测量的图像。 光栅将准直光束的形式的分段望远镜的至少一部分辐照度和准直光束接收成多个衍射级。 聚焦光学分离和聚焦衍射级。 过滤光学器件然后过滤衍射级，以产生经修改的合成的衍射级组。 成像光学组合了所得到的衍射级的一部分以产生最终由成像器成像的干涉图案。

公开(公告)号：US4991963A

公开(公告)日：1991-02-12

申请号：US424094

申请日：1989-09-21

Applicant: Philip Sutton

Inventor： Philip Sutton

IPC: G01J3/18 ,  G01J9/02

CPC classification number: G01J9/0215 ,  G01J2009/0288 ,  G01J2009/0296 ,  G01J3/18

Abstract: A wavelength-independent-interferometer comprises means to receive light (10) from a field of view, means (BS1) to separate the light into two beams (11, 12), means (BS2) to combine the two beams, and dispersive means (30) interposed in the path (12) of one of the two beams to produce a wavelength-dependent shear. The dispersive means may be a transmission diffraction grating or a reflection grating. In the arrangement shown the optical elements are combined in a modified Mach-Zehnder interferometer. When the conventional Mach-Zehnder interferometer is illuminated with coherent light the separation of interference fringes produced in the interference plane is inversely proportional to the wavelength. By introducing a dispersive element in the invention the detector is sensitized to a pre-determined fringe separation. A moveable reticle is placed in front of a detector to sensitize the detector to the fringe pattern.

Abstract translation: 波长无关干涉仪包括从视野接收光（10）的装置，用于将光分离成两个光束（11,12）的装置（BS1），组合两个光束的装置（BS2）和分散装置 （30）插入在两个光束中的一个光束的路径（12）中以产生依赖于波长的剪切。 分散装置可以是透射衍射光栅或反射光栅。 在所示的布置中，光学元件组合在改进的马赫 - 曾德尔干涉仪中。 当传统的马赫 - 曾德干涉仪用相干光照射时，在干涉平面中产生的干涉条纹的分离与波长成反比。 通过在本发明中引入分散元件，检测器对预定的边缘分离敏化。 将可移动的掩模版放置在检测器的前面，以使检测器对条纹图案敏感。

公开(公告)号：EP0356443B1

公开(公告)日：1992-12-02

申请号：EP88902896.5

申请日：1988-03-31

Applicant: Secretary of State for Defence in Her Britannic Majesty's Gov. of the United Kingdom of Great Britain and Northern Ireland

Inventor： SUTTON, Philip

IPC: G01J9/02

CPC classification number: G01J9/0215 ,  G01J3/18 ,  G01J2009/0288 ,  G01J2009/0296

Abstract: A wavelength-independent-interferometer comprises means to receive light (10) from a field of view, means (BS1) to separate the light into two beams (11, 12), means (BS2) to combine the two beams, and dispersive means (30) interposed in the path (12) of one of the two beams to produce a wavelength-dependent shear. The dispersive means may be a transmission diffraction grating or a reflection grating. In the arrangement shown the optical elements are combined in a modified Mach-Zehnder interferometer. When the conventional Mach-Zehnder interferometer is illuminated with coherent light the separation of interference fringes produced in the interference plane is inversely proportional to the wavelength. By introducing a dispersive element in the invention the detector is sensitised to a pre-determined fringe separation. A moveable reticle is placed in front of a detector to sensitise the detector to the fringe pattern.

公开(公告)号：EP0356443A1

公开(公告)日：1990-03-07

申请号：EP88902896.0

申请日：1988-03-31

Applicant: THE SECRETARY OF STATE FOR DEFENCE

Inventor： SUTTON, Philip

IPC: G01J9 ,  G01J3

CPC classification number: G01J9/0215 ,  G01J3/18 ,  G01J2009/0288 ,  G01J2009/0296

Abstract: Un interféromètre indépendant de la longueur d'onde comprend des moyens pour recevoir de la lumière (10) en provenance d'un champ optique, des moyens (BS1) pour séparer la lumière en deux faisceaux (11, 12), des moyens (BS2) pour combiner les deux faisceaux, et des moyens de dispersion (30) interposés dans la trajectoire (12) de l'un des deux faisceaux pour produire une déviation fonction de la longueur d'onde. Ces moyens de dispersion peuvent être un réseau de diffraction de transmission ou un réseau à réflection. Dans l'agencement représenté, les éléments optiques sont combinés dans un interféromètre Mach-Zehnder modifié. Lorsque l'interféromètre Mac-Zehnder classique est éclairé avec de la lumière cohérente, la séparation des franges d'interférence produites dans le plan d'interférence est inversement proportionnelle à la longueur d'onde. Grâce à l'introduction d'un élément de dispersion dans l'interféromètre décrit, le détecteur est sensibilisé à une séparation de franges prédéterminée. Un réticule mobile est placé devant un détecteur pour sensibiliser ce dernier à la configuration des franges.

公开(公告)号：WO1988008121A1

公开(公告)日：1988-10-20

申请号：PCT/GB1988000250

申请日：1988-03-31

Applicant: THE SECRETARY OF STATE FOR DEFENCE IN HER ... ,  SUTTON, Philip

Inventor： THE SECRETARY OF STATE FOR DEFENCE IN HER ...

IPC: G01J09/02

CPC classification number: G01J9/0215 ,  G01J3/18 ,  G01J2009/0288 ,  G01J2009/0296

Abstract: A wavelength-independent-interferometer comprises means to receive light (10) from a field of view, means (BS1) to separate the light into two beams (11, 12), means (BS2) to combine the two beams, and dispersive means (30) interposed in the path (12) of one of the two beams to produce a wavelength-dependent shear. The dispersive means may be a transmission diffraction grating or a reflection grating. In the arrangement shown the optical elements are combined in a modified Mach-Zehnder interferometer. When the conventional Mach-Zehnder interferometer is illuminated with coherent light the separation of interference fringes produced in the interference plane is inversely proportional to the wavelength. By introducing a dispersive element in the invention the detector is sensitised to a pre-determined fringe separation. A moveable reticle is placed in front of a detector to sensitise the detector to the fringe pattern.

公开(公告)号：KR1020050024343A

公开(公告)日：2005-03-10

申请号：KR1020047020548

申请日：2003-06-16

Applicant: 호리바 조뱅 이본 에스.아.에스.

Inventor： 아마리,파스칼 ,  벤퍼햇,람다네 ,  보스,프란시스 ,  카테란,데니스

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01B11/303 ,  G01J2009/0296 ,  G01N21/33 ,  G01N23/2251 ,  G02B27/26

Abstract: 본 발명은 자외선(UV)에서 적외선(IR)까지의 광범위한 파장에 걸쳐 시료(1)의 작은 영역을 분석하는 아크로메틱 분광 타원분석기에 관한 것이다. 분광 타원분석기는 광빔(3)을 방출하는 광원(2)을 포함한다. 광빔(3)은 제 1 포물면 거울(5)에 의해 입사각 q로 초점이 맞추어지기 이전에 편광 상태 발생부(4)를 통해 시료(1)의 작은 점으로 진행한다. 제 2 포물면 거울(6)은 반사된 빔(16)을 모아서 상기 빔을 분석부(7)로 이어준다. 반사빔(16)은 분석부(7)에서 나와 상기 빔을 검출하여 분광학적으로 분석하는 수단(8)으로 진행한다. 본 발명에 따르면, 편광 상태 발생부(4)를 통해 제 1 포물면 거울(5)에 이르는 광빔(3)과 제 2 거울(6)에서 분석부(7)를 통한 광빔은 평행 가능 소색성 광빔이다. 입사각 q은 시료 표면에서 작은 점의 위치를 변경시키지 않고 크게 변화된다.