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公开(公告)号：EP3978904B1
公开(公告)日：2024-09-11
申请号：EP20815038.3
申请日：2020-01-31
IPC: G01N21/25 , H01L25/075 , H01L33/60 , H01L33/48
CPC classification number: G01N2201/062720130101 , G01N2201/06420130101 , G01N21/255 , G01N2201/080620130101 , H01L25/0753 , H01L33/60 , H01L33/486
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