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    MASK TRAY FOR AND METHOD OF LOADING MASK IN LITHOGRAPHY SYSTEM
    3.
    发明申请
    MASK TRAY FOR AND METHOD OF LOADING MASK IN LITHOGRAPHY SYSTEM 审中-公开
    屏蔽系统中的掩模盘和加载掩模的方法

    公开(公告)号：WO1991018401A1

    公开(公告)日：1991-11-28

    申请号：PCT/US1991003564

    申请日：1991-05-20

    Applicant: HAMPSHIRE INSTRUMENTS, INC.

    Inventor： HAMPSHIRE INSTRUMENTS, INC. ,  WHITCOMB, Preston, X.

    IPC: G21K05/08

    CPC classification number: B82Y10/00 ,  G03F7/70033 ,  G03F7/707 ,  G03F7/70741 ,  H01L21/682

    Abstract: A mask tray (132), used to hold and guide an X-ray mask (38) to the exposure column (36) of an X-ray lithography system (10), includes first and second holding means (148, 150) which engage vertical mask channels (140, 142) in the mask support (136) to hold the mask (38) on the tray (132). The tray (132) is shaped as a wafer and is moved and loaded on the exposure column (36) using the same translation mechanism (16) used to transport wafers being processed. After the mask (38) is aligned with the exposure column (36), the translation mechanism (16) is moved in the Z direction. At the same time vacuum means (39) are engaged to hold the mask (38) on the column (36) and the holding means (148, 150) are released slightly, thereby permitting the mask (38) to jump the last few microns to the column (36). During the jump, the mask (38) is guided by the holding means (148, 150) remaining near the channels (140, 142). Special translation mechanism (16) movements are needed to remove the tray (132).

    Abstract translation: 用于将X射线掩模（38）保持并引导到X射线光刻系统（10）的曝光柱（36）的掩模托盘（132）包括第一和第二保持装置（148,150） 接合在掩模支撑件（136）中的垂直掩模通道（140,142）以将掩模（38）保持在托盘（132）上。 托盘（132）成形为晶片，并使用用于输送正在处理的晶片的相同的平移机构（16）移动并装载在曝光柱（36）上。 在掩模（38）与曝光柱（36）对准之后，平移机构（16）沿Z方向移动。 同时，真空装置（39）接合以将掩模（38）保持在柱（36）上，并且保持装置（148,150）被稍微释放，从而允许掩模（38）跳过最后几微米 到列（36）。 在跳跃期间，掩模（38）由保持在通道（140,142）附近的保持装置（148,150）引导。 需要特殊的平移机构（16）移动托盘（132）。

    Apparatus for guiding cable through a radiation chamber with reduced leakage therefrom
    5.
    发明公开
    Apparatus for guiding cable through a radiation chamber with reduced leakage therefrom 失效
    用于通过辐射室引导电缆的装置，其具有降低的漏电

    公开(公告)号：EP0107280A3

    公开(公告)日：1985-08-21

    申请号：EP83304580

    申请日：1983-08-08

    Applicant: RADIATION DYNAMICS INC.

    Inventor： Burgess, Robert G.

    IPC: G21K05/08

    CPC classification number: G21K5/08 ,  B29C71/04 ,  B29C2035/0877 ,  B29L2031/3462 ,  G21K5/10

    Abstract: Apparatus for guiding a cable travelling along a longitudinal path through a beam of radiation in a shielded chamber, the apparatus including rollers disposed about the cable in a manner which prevents the leakage of radiation via apertures in the chamber through which the cable enters end exits. Specifically, the apparatus includes sets of rollers spaced at longitudinal intervals along the cable, the rollers in each set being positioned at angular intervals about the longitudinal axis of the cable. An angular offsetting of rollers in different sets, so that a roller in one set is longitudinally aligned with the spacing between rollers in other sets, is provided. By selecting rollers of prescribed dimensions, by placing the rollers at prescribed angular intervals in each set, and by angularly offsetting a plurality of sets by prescribed angles, a plurality of sets of rollers - when placed proximate to the entrance or exit to an aperture - can preclude radiation leakage through the aperture. The cable and the sets of rollers are, preferably, rotatable about the longitudinal axis of the cable. The rollers are adjustable to abut against cables of varying diameters, the axes of the rollers being substantially perpendicular to the cable axis, thereby allowing roller rotation during cable travel.

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