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    OPTICAL DEVICE
    77.
    发明公开
    OPTICAL DEVICE 审中-公开

    公开(公告)号：EP3650911A1

    公开(公告)日：2020-05-13

    申请号：EP18827806.3

    申请日：2018-07-06

    Applicant: Hamamatsu Photonics K.K.

    Inventor： SUGIMOTO Tatsuya ,  SUZUKI Tomofumi ,  KOTANI Kyosuke

    IPC: G02B26/00 ,  B81B3/00 ,  G01J3/45

    Abstract: An optical device includes an elastic support portion which supports a movable portion so that the movable portion is movable along a first direction, a first comb electrode which includes a plurality of first comb fingers, and a second comb electrode which includes a plurality of second comb fingers. The elastic support portion includes a torsion bar which extends along a second direction perpendicular to the first direction and a nonlinearity relaxation spring which is connected between the torsion bar and the movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. The second comb electrode is disposed along an outer edge of the movable portion.

    OPTICAL MODULE
    78.
    发明公开
    OPTICAL MODULE 审中-公开

    公开(公告)号：EP3650909A1

    公开(公告)日：2020-05-13

    申请号：EP18827625.7

    申请日：2018-07-06

    Applicant: Hamamatsu Photonics K.K.

    Inventor： SUZUKI, Tomofumi ,  KOTANI, Kyosuke ,  SUGIMOTO, Tatsuya ,  KURAMOTO, Yutaka ,  SHIBAYAMA, Katsumi ,  HOSOKAWA, Noburo

    IPC: G02B26/00 ,  G01B9/02 ,  G02B7/198 ,  G01J3/45

    Abstract: An optical module 1A includes a mirror unit 2 including a movable mirror 22 and a fixed mirror 16, a beam splitter unit 3, a light incident unit 4, a first light detector 6, a second light source 7, a second light detector 8, a holding unit 130, a first mirror 51, a second mirror 52, and a third mirror 53. The holding unit 130 holds the first light detector 6, the second light detector 8, and the second light source 7 so that the first light detector 6, the second light detector 8, and the second light source 7 face that same side, and the first light detector 6, the second light detector 8, and the second light source 7 are aligned in this order. A length of an optical path between the beam splitter unit 3 and the first light detector 6 is shorter than a length of an optical path between the beam splitter unit 3 and the second light detector 8, and is shorter than a length of an optical path between the beam splitter unit 3 and the second light source 7.

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