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公开(公告)号:EP3650908B1
公开(公告)日:2025-04-02
申请号:EP18827624.0
申请日:2018-07-06
Inventor: SUZUKI Tomofumi , KOTANI Kyosuke , SUGIMOTO Tatsuya , KURAMOTO Yutaka , SHIBAYAMA Katsumi , HOSOKAWA Noburo
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公开(公告)号:EP4399498A1
公开(公告)日:2024-07-17
申请号:EP22778160.6
申请日:2022-09-07
Applicant: SI-Ware Systems
Inventor: SHENOUDA, Botros George Iskander , ZEINAH, Tarek Mohamed , MORTADA, Bassem , SABRY, Yasser M. , SAADANY, Bassam , ABUELNAGA, Hussien , GAD SEIF, Mina , SADEK RADWAN, Mohamed , AL-HARON, Mohamed H. , MEDHAT, Mostafa , EL-ARABAWY, Mohamed
CPC classification number: G01J3/0202 , G01J3/0272 , G01J3/0286 , G01J3/0291 , G01J3/0297 , G01J3/45 , G01N2021/359520130101 , G01N21/4738 , G01N2201/022120130101 , G01N21/274 , G01N21/276 , G01N21/278 , G01N21/3563
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公开(公告)号:EP4392749A1
公开(公告)日:2024-07-03
申请号:EP22862081.1
申请日:2022-08-25
Applicant: Layer Metrics Inc.
Inventor: MURPHY, Dominic
CPC classification number: G01J3/4531 , G01J3/0218 , G01J3/18
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公开(公告)号:EP3637069B1
公开(公告)日:2024-07-03
申请号:EP18813792.1
申请日:2018-06-06
CPC classification number: G01J3/433 , G01J3/45 , G01N21/31 , G02F1/365 , G01J3/4531 , G01J2003/287920130101 , G01J3/443 , G01J2003/453420130101
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公开(公告)号:EP4363813A2
公开(公告)日:2024-05-08
申请号:EP22737488.1
申请日:2022-06-30
Applicant: Bruker Optics GmbH & Co. KG
Inventor: HARIG, Roland , SIMON, Arno
CPC classification number: G01J3/4535 , G01J3/021 , G01J3/28 , G01J2003/453820130101
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公开(公告)号:EP3650915B1
公开(公告)日:2023-11-08
申请号:EP18828669.4
申请日:2018-07-06
Inventor: SUZUKI Tomofumi , KOTANI Kyosuke , SUGIMOTO Tatsuya , KURAMOTO Yutaka , SHIBAYAMA Katsumi , HOSOKAWA Noburo , YAMAMOTO Hirokazu , KOYAMA Takuo
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公开(公告)号:EP3686568B1
公开(公告)日:2023-11-01
申请号:EP18858106.0
申请日:2018-09-10
Inventor: SUZUKI, Yasuyuki , NAKAMURA, Yukihiro , NISHI, Masashi , NAMATAME, Tetsushi
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公开(公告)号:EP4230978A1
公开(公告)日:2023-08-23
申请号:EP23157628.1
申请日:2023-02-20
Applicant: JASCO Corporation
Inventor: KATSUMATA, Tomohiro , SUGIYAMA, Hiroshi
Abstract: To execute wavenumber correction of a measurement spectrum smoothly and precisely, a Fourier transform infrared spectrometer (FTIR) 100 includes: an infrared light source 10; an interferometer 12; a semiconductor laser 30 for position reference of a movable mirror 24 thereof; and a computer 16 that performs Fourier transformation to a detected signal of an infrared interference wave from a sample to calculate a spectrum based on a memorized wavelength of the semiconductor laser 30 and a detected value of a laser interference wave by a laser detector 32. The computer 16 executes a program for calculating a spectrum of a solid reference sample, interpolating the spectrum of the reference sample in a wavenumber region of a unique peak, reading out a wavenumber of the unique peak based on a data after interpolation, and updating the wavelength of the semiconductor laser 30 used in Fourier transformation such that the read-out value of the wavenumber falls within a specific range having an original wavenumber of the unique peak as a reference.
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公开(公告)号:EP4124840A1
公开(公告)日:2023-02-01
申请号:EP20928933.9
申请日:2020-12-16
Inventor: LIU, Guangyi , JIANG, Rui , HAN, Xiaoquan , ZHAO, Jiangshan , SHA, Pengfei , YIN, Qingqing , ZHANG, Hua , HU, Xinyue
IPC: G01J3/45
Abstract: Provided are a device (4) and a method for online measuring a spectrum for a laser device. The device (4) for online measuring a spectrum for a laser device includes: a first optical path assembly (G1) and a second optical path assembly (G2), and the second optical path assembly (G2) and the first optical path assembly (G1) constitute a measurement optical path. The second optical path assembly (G2) includes: an FP etalon (15) and a grating (18). The homogenized laser beam passes through the FP etalon (15) to generate an interference fringe. The grating (18) is arranged after the FP etalon (15), or is arranged before the FP etalon (15) in the measurement optical path, and is configured to disperse the laser beam passing through the FP etalon (15). A high precision measurement in a wide range for a central wavelength of a laser beam and an accurate measurement for spectral parameters of a corresponding FWHM and E95 are achieved through an arrangement of the FP etalon and the grating "in series" in the measurement optical path. There is no moving element in the measurement optical path, the structure is simple and compact, the measurement precision is high, and the stability is high. The corresponding measurement algorithm is simple and efficient, and has an extremely high scientific research or commercial application value.
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公开(公告)号:EP3495766B1
公开(公告)日:2023-01-04
申请号:EP17205704.4
申请日:2017-12-06
Inventor: AUBÖCK, Gerald , KENDA, Andreas , GISLER, Thomas
IPC: G01B9/02055 , G01B9/02015 , G01J3/45 , G01J3/02 , G02B27/10
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