MICROFABRICATED MAGNETIC FIELD TRANSDUCER WITH FLUX GUIDE
    7.
    发明公开
    MICROFABRICATED MAGNETIC FIELD TRANSDUCER WITH FLUX GUIDE 审中-公开
    MIKROHERGESTELLTER MAGNETFELDWANDLER MIT FLUSSLEITER

    公开(公告)号:EP3027781A1

    公开(公告)日:2016-06-08

    申请号:EP14832320.7

    申请日:2014-06-30

    Inventor: ZEYEN, Benedikt

    CPC classification number: G01R33/0052 G01R33/0011 Y10T29/4902

    Abstract: A microfabricated magnetic field transducer uses a magnetically sensitive structure in combination with one or more permeable magnetic flux guides. The flux guides may route off-axis components of an externally applied magnetic field across the sensitive axis of the magnetically sensitive structure, or may shield the magnetically sensitive structure from off-axis, stray fields or noise sources. A combination of flux guides and magnetically sensitive structures arranged on a single substrate may enable an integrated, 3-axis magnetometer in a single package, greatly improving cost and performance.

    Abstract translation: 微制造的磁场传感器使用与一个或多个可渗透的磁通导向器组合的磁敏结构。 磁通引导件可以将外部施加的磁场的偏轴分量穿过磁敏结构的敏感轴线,或者可以将磁敏结构屏蔽到离轴,杂散场或噪声源。 布置在单个基板上的磁通引导件和磁敏结构的组合可以使单个封装中的集成的3轴磁力计可以大大提高成本和性能。

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