公开(公告)号：EP1036210A1

公开(公告)日：2000-09-20

申请号：EP98959256.3

申请日：1998-12-04

Applicant: Korea Institut of Science and Technology

Inventor： JUNG, Hyung, Jin ,  CHOI, Won, Kook ,  CHO, Jung ,  KOH, Seok, Keun

IPC: C23C14/24

CPC classification number: H01J37/3277 ,  C23C16/4417 ,  C23C16/486 ,  D06B19/00 ,  H01J37/317 ,  H01J2237/338

Abstract: An apparatus for surface modification of a polymer, metal and ceramic material using an ion beam (IB) is disclosed, which is capable of supplying and controlling a voltage (220) applied to a material to be surface-modified so that an ion beam (IB) energy irradiated to the material is controlled, differentiating the degree of the vacuum of a reaction gas in a portion of a vacuum chamber in which the ion beam is irradiated from that in a portion in which the ion beam is generated, and also being applicable for both-side irradiating processing and continuous processing.