公开(公告)号：US12244115B2

公开(公告)日：2025-03-04

申请号：US18083228

申请日：2022-12-16

Applicant: FEI COMPANY

Inventor： Francis Deck ,  Justin Morrow

IPC: G01J3/44 ,  G01J3/02 ,  H01S3/00

Abstract: A laser device for use with a scientific instrument. The laser device includes a laser emitter and a control system. The laser emitter is configured to generate a laser beam for radiating a sample disposed in a vacuum chamber of the scientific instrument. The control system is configured to receive a pressure signal associated with the vacuum chamber from a pressure sensor, and to change a state of the laser beam in response to the pressure reaching a threshold level.

公开(公告)号：US20240204470A1

公开(公告)日：2024-06-20

申请号：US18083228

申请日：2022-12-16

Applicant: FEI COMPANY

Inventor： Francis Deck ,  Justin Morrow

IPC: H01S3/00 ,  G01J3/02 ,  G01J3/44

CPC classification number: H01S3/0014 ,  G01J3/0205 ,  G01J3/0218 ,  G01J3/027 ,  G01J3/44 ,  H01S3/005

Abstract: A laser device for use with a scientific instrument. The laser device includes a laser emitter and a control system. The laser emitter is configured to generate a laser beam for radiating a sample disposed in a vacuum chamber of the scientific instrument. The control system is configured to receive a pressure signal associated with the vacuum chamber from a pressure sensor, and to change a state of the laser beam in response to the pressure reaching a threshold level.