公开(公告)号：US20240060880A1

公开(公告)日：2024-02-22

申请号：US18270880

申请日：2021-11-02

Applicant: Hitachi High-Tech Corporation

Inventor： Masahiro WATANABE ,  Kaifeng ZHANG ,  Shuichi BABA ,  Takenori HIROSE

IPC: G01N21/35 ,  G02B21/06 ,  G02B21/26

CPC classification number: G01N21/35 ,  G02B21/06 ,  G02B21/26 ,  G01N2201/105 ,  G01N2201/0636

Abstract: Provided is a spectroscopic measurement device capable of improving detection sensitivity to a change in a physical property value such as expansion of a sample to which energy is applied by an infrared ray or the like. The spectroscopic measurement device includes: a stage on which a sample is to be placed; an energy source configured to generate an energy beam to be emitted to a predetermined region of the sample; an electromagnetic wave source configured to generate an electromagnetic wave to be emitted to the sample; an objective lens configured to focus the electromagnetic wave in the predetermined region; two confocal detectors configured to detect the electromagnetic wave reflected by the sample; and a calculation unit configured to calculate, based on each of outputs of the confocal detectors, a change in a physical property value of the sample when the energy beam is emitted to the predetermined region.