公开(公告)号：US20230332950A1

公开(公告)日：2023-10-19

申请号：US18131508

申请日：2023-04-06

Applicant: Hitachi High-Tech Corporation

Inventor： Kaifeng ZHANG ,  Masahiro WATANABE ,  Takenori HIROSE

IPC: G01J3/02 ,  G01J3/10

CPC classification number: G01J3/021 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/10 ,  G01J2003/102

Abstract: Provided is a spectrometry apparatus that suppresses a reduction in usage efficiency of an irradiation energy of a light. A spectrometry apparatus of the disclosure includes a stage on which a sample is placed, an electromagnetic source that emits an electromagnetic wave, one or a plurality of optical elements that transform a spatial energy distribution of the electromagnetic wave and emit the electromagnetic wave, and a reflective objective lens that collects the electromagnetic wave after a transformation of the spatial energy distribution and irradiates the sample with the collected electromagnetic wave.

公开(公告)号：US20240060880A1

公开(公告)日：2024-02-22

申请号：US18270880

申请日：2021-11-02

Applicant: Hitachi High-Tech Corporation

Inventor： Masahiro WATANABE ,  Kaifeng ZHANG ,  Shuichi BABA ,  Takenori HIROSE

IPC: G01N21/35 ,  G02B21/06 ,  G02B21/26

CPC classification number: G01N21/35 ,  G02B21/06 ,  G02B21/26 ,  G01N2201/105 ,  G01N2201/0636

Abstract: Provided is a spectroscopic measurement device capable of improving detection sensitivity to a change in a physical property value such as expansion of a sample to which energy is applied by an infrared ray or the like. The spectroscopic measurement device includes: a stage on which a sample is to be placed; an energy source configured to generate an energy beam to be emitted to a predetermined region of the sample; an electromagnetic wave source configured to generate an electromagnetic wave to be emitted to the sample; an objective lens configured to focus the electromagnetic wave in the predetermined region; two confocal detectors configured to detect the electromagnetic wave reflected by the sample; and a calculation unit configured to calculate, based on each of outputs of the confocal detectors, a change in a physical property value of the sample when the energy beam is emitted to the predetermined region.

公开(公告)号：US20250138047A1

公开(公告)日：2025-05-01

申请号：US18684171

申请日：2022-07-04

Applicant: Hitachi High-Tech Corporation

Inventor： Kaifeng ZHANG ,  Masahiro WATANABE ,  Takenori HIROSE

IPC: G01Q20/02 ,  G01N21/65 ,  G01Q30/02 ,  G01Q60/22

Abstract: A scanning probe microscope in which an objective lens used to radiate exciting light and collect Raman scattering light can be disposed more near a sample and a tip is provided. The scanning probe microscope includes: a sample holder configured to hold a sample; a tip disposed near the sample; an exciting light source configured to output exciting light; an objective lens configured to condense the exciting light and radiating the exciting light to the tip; a light reception unit configured to detect scattering light generated from the sample through the radiation of the exciting light; and an incident position adjustment unit configured to cause the exciting light to be incident on a position deviating from an optical axis of the objective lens.