公开(公告)号：US20140327946A1

公开(公告)日：2014-11-06

申请号：US14361472

申请日：2012-11-28

Applicant: Innoluce B.V.

Inventor： Hendrikus Wilhelmus Leonardus Antonius Maria van Lierop ,  Matthijs Alexander Gerard Suijlen

IPC: G02B26/10 ,  B81C1/00 ,  G02B26/08

CPC classification number: G02B26/10 ,  B81B3/007 ,  B81B2201/042 ,  B81B2203/0109 ,  B81C1/00134 ,  B81C1/00666 ,  B81C2201/0147 ,  G02B26/0833 ,  G02B26/0841

Abstract: A MEMS-micro-mirror (30) is provided comprising a mirror body (50) that is rotatably arranged in a mirror frame (60) around a rotation axis (58) extending in a plane defined by the mirror body. The rotation axis extends through a first and a second mutually opposite end-portion (51, 53) of the mirror body. The mirror has a reflective first main surface (55) and opposite said first main surface a second main surface (57) provided with a first and a second pair of reinforcement beams. The pair of reinforcement beams (91a, 91b) extends from the first end-portion (51) in mutually opposite directions away from the rotation axis. The second pair of reinforcement beams (93a, 93b) extends from the second end-portion (53) in mutually opposite directions away from the rotation axis. Reinforcement beams of said first pair extend towards respective ones of said second pair.

Abstract translation: 提供了一种MEMS微镜（30），其包括镜体（50），所述镜体围绕围绕由镜主体限定的平面延伸的旋转轴线（58）可旋转地布置在镜框架（60）中。 旋转轴线延伸穿过镜体的第一和第二相互相对的端部（51,53）。 反射镜具有反射的第一主表面（55）并且与第一主表面相对，第二主表面（57）设置有第一和第二对加强梁。 一对加强梁（91a，91b）从远离旋转轴线的相反方向从第一端部（51）延伸。 第二对加强梁（93a，93b）从第二端部（53）沿与旋转轴线相反的相反方向延伸。 所述第一对的加强梁朝向所述第二对中的相应的一对延伸。

公开(公告)号：US09910269B2

公开(公告)日：2018-03-06

申请号：US14361472

申请日：2012-11-28

Applicant: Innoluce B.V.

Inventor： Hendrikus Wilhelmus Leonardus Antonius Maria van Lierop ,  Matthijs Alexander Gerard Suijlen

IPC: G02B26/08 ,  G02B26/10 ,  G02B26/12 ,  B81B3/00 ,  B81C1/00

CPC classification number: G02B26/10 ,  B81B3/007 ,  B81B2201/042 ,  B81B2203/0109 ,  B81C1/00134 ,  B81C1/00666 ,  B81C2201/0147 ,  G02B26/0833 ,  G02B26/0841

Abstract: A MEMS-micro-mirror (30) is provided comprising a mirror body (50) that is rotatably arranged in a mirror frame (60) around a rotation axis (58) extending in a plane defined by the mirror body. The rotation axis extends through a first and a second mutually opposite end-portion (51, 53) of the mirror body. The mirror has a reflective first main surface (55) and opposite said first main surface a second main surface (57) provided with a first and a second pair of reinforcement beams. The pair of reinforcement beams (91a, 91b) extends from the first end-portion (51) in mutually opposite directions away from the rotation axis. The second pair of reinforcement beams (93a, 93b) extends from the second end-portion (53) in mutually opposite directions away from the rotation axis. Reinforcement beams of said first pair extend towards respective ones of said second pair.