公开(公告)号：US10106700B2

公开(公告)日：2018-10-23

申请号：US15127378

申请日：2015-03-23

Applicant: Lintec Corporation

Inventor： Daisuke Yamamoto ,  Hiroyuki Yoneyama ,  Youichi Inao

IPC: C09D163/00 ,  H01L23/544 ,  H01L21/66 ,  H01L23/31 ,  H01L21/683 ,  H01L21/78 ,  C09J7/02 ,  H01L23/29 ,  C08K5/00 ,  C08K3/00 ,  C08K3/013

Abstract: A protection membrane-forming film (1) containing a filler, wherein the average particle size of the filler is not more than 0.4 μm, a protection membrane-forming sheet (2), a production method and an inspection method for a workpiece or a processed product which use the film and the sheet, and a workpiece and a processed product determined as adequate products by the inspection method. The protection membrane-forming film and the protection membrane-forming sheet of the invention enable the formation of a protection membrane having excellent print legibility when subjected to print processing by laser irradiation.

公开(公告)号：US09890293B2

公开(公告)日：2018-02-13

申请号：US15032515

申请日：2014-11-10

Applicant: LINTEC CORPORATION

Inventor： Daisuke Yamamoto ,  Hiroyuki Yoneyama

IPC: C08K3/38 ,  C09D133/08 ,  C08K3/00 ,  C08L33/06 ,  C09D133/06 ,  C08J5/18 ,  H01L21/56 ,  H01L23/29 ,  C09D163/00

CPC classification number: C09D133/08 ,  C08J5/18 ,  C08J2333/08 ,  C08K3/00 ,  C08K2201/001 ,  C08L33/06 ,  C09D133/06 ,  C09D163/00 ,  H01L21/563 ,  H01L23/295 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A composition for protective film formation capable of forming a protective film excellent in attachability by a tape mounter or the like, with good visibility at a laser-printed portion and heat dissipation properties, allowing a protective film-equipped chip having high reliability to be manufactured, and a sheet for protective film formation and a protective film-equipped chip are provided. The composition for protective film formation contains a polymer component (A), a curable component (B), and a heat conductive filler (C) having an average particle size of 2.0 to 10.0 μm. The content of components that are liquid at 25° C. contained in the composition for protective film formation is 20 to 70 parts by mass relative to 100 parts by mass of the total of the (A) component and the (B) component.

公开(公告)号：US20160176169A1

公开(公告)日：2016-06-23

申请号：US14907538

申请日：2014-07-16

Applicant: LINTEC CORPORATION

Inventor： Hiroyuki Yoneyama ,  Naoya Saiki

IPC: B32B27/32 ,  H01L21/683 ,  C09J7/02 ,  B32B7/12 ,  B32B27/08

CPC classification number: B32B27/32 ,  B32B7/12 ,  B32B27/08 ,  B32B2457/14 ,  C09J7/20 ,  C09J7/22 ,  C09J7/243 ,  C09J7/30 ,  C09J201/00 ,  C09J2201/122 ,  C09J2201/622 ,  C09J2203/326 ,  C09J2423/106 ,  H01L21/6836 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2221/68377 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A composite sheet (1) for forming a protective film, including an adhesive sheet (2) formed by laminating an adhesive layer (22) on one surface of a base material (21), and a protective-film forming film (3) laminated on the adhesive layer (22) side of the adhesive sheet (2), wherein the adhesive sheet (2) does not have a through hole penetrating through the adhesive sheet (2) in the thickness direction, and the light transmittance of the adhesive sheet (2) at a wavelength of 532 nm which is measured using an integrating sphere is from 75 to 85%.According to this composite sheet (1) for forming a protective film, while using an adhesive sheet having no through holes, it is still possible to suppress the generation of a gas reservoir between the adhesive sheet and the protective-film forming film (protective film) when laser printing is performed on the protective-film forming film (protective film).

Abstract translation: 一种用于形成保护膜的复合片材（1），包括通过在基材（21）的一个表面上层压粘合剂层（22）而形成的粘合片（2）和层压的保护膜形成膜 在粘合片（2）的粘合剂层（22）侧，粘合片（2）在厚度方向上不具有穿透粘合片（2）的通孔，并且粘合片 使用积分球测定的波长为532nm的（2）为75〜85％。 根据这种用于形成保护膜的复合片（1），在使用不具有通孔的粘合片的同时，仍然可以抑制粘合片和保护膜形成膜之间的气体储存器的产生（保护膜 ）在保护膜形成膜（保护膜）上进行激光打印时。

公开(公告)号：US20170005016A1

公开(公告)日：2017-01-05

申请号：US15112940

申请日：2015-01-21

Applicant: LINTEC CORPORATION

Inventor： Daisuke Yamamoto ,  Hiroyuki Yoneyama

IPC: H01L21/66 ,  C09J7/02 ,  H01L23/29 ,  C09J7/00

Abstract: Provided is a sheet (2) for forming protective film, including: a protective film-forming film (1) characterized in that the light transmittance thereof at a wavelength of 1600 nm of 72% or more, and the light transmittance thereof at a wavelength of 550 nm of 20% or less; and a release sheet (21) laminated upon one or both faces of the protective film-forming film (1). According to this sheet (2) for forming a protective film, it is possible to form a protective film that allows for the inspection of cracks, etc., on a workpiece or a product obtained by processing the workpiece, while preventing grinding marks on the workpiece or the product from being visible to the naked eye.

Abstract translation: 提供一种用于形成保护膜的片材（2），其包括：保护膜形成膜（1），其特征在于，其波长为1600nm的透光率为72％以上，其波长 为550nm以上20％以下; 和层压在保护膜形成膜（1）的一面或两面上的剥离片（21）。 根据用于形成保护膜的该片材（2），可以形成保护膜，该保护膜能够检测通过加工工件而获得的工件或产品上的裂纹等，同时防止在 工件或产品从肉眼可见。

公开(公告)号：US20160185089A1

公开(公告)日：2016-06-30

申请号：US14907547

申请日：2014-07-16

Applicant: LINTEC CORPORATION

Inventor： Hiroyuki Yoneyama ,  Naoya Saiki

IPC: B32B27/32 ,  B32B27/08 ,  B32B7/12

CPC classification number: B32B27/32 ,  B32B7/12 ,  B32B27/08 ,  B32B2457/14 ,  C09J7/22 ,  C09J7/30 ,  C09J201/00 ,  C09J2201/622 ,  C09J2203/326 ,  H01L21/6836 ,  H01L2221/68327 ,  H01L2221/68377

Abstract: A composite sheet (1) for forming a protective film which is provided with an adhesive sheet (2) formed by laminating an adhesive layer (22) on one surface of a base material (21), and a protective-film forming film (3) laminated on the adhesive layer (22) side of the adhesive sheet (2), wherein the adhesive sheet (2) does not have a through hole penetrating the adhesive sheet (2) in the thickness direction, and the light transmittance at a wavelength of 532 nm of the adhesive sheet (2), measured using an integrating sphere, is from 25 to 85%.

Abstract translation: 一种用于形成保护膜的复合片材（1），其具有通过在基材（21）的一个表面上层压粘合层（22）而形成的粘合片（2）和保护膜形成膜（3） ），其中粘合片（2）在厚度方向上不具有穿透粘合片（2）的通孔，并且在波长处的透光率 使用积分球测定的粘合片（2）的532nm为25〜85％。

公开(公告)号：US10030174B2

公开(公告)日：2018-07-24

申请号：US14778802

申请日：2014-03-26

Applicant: LINTEC CORPORATION

Inventor： Hiroyuki Yoneyama ,  Naoya Saiki

IPC: H01L23/544 ,  H01L23/552 ,  C09J7/38 ,  C09J7/40 ,  C09J7/20 ,  C09J7/02 ,  H01L21/683 ,  C09J7/24

Abstract: A protective film-forming composite sheet 10 comprises a pressure sensitive adhesive sheet 16 in which a pressure sensitive adhesive layer 12 is provided on a base material 11, a protective film-forming film 13, and a release film 14. When α (mN/25 mm) represents the maximum peel force between the protective film-forming film 13 and the release film 14; β (mN/25 mm) represents the minimum peel force between the pressure sensitive adhesive sheet 16 and the protective film-forming film 13; and γ (mN/25 mm) represents the maximum peel force between the pressure sensitive adhesive sheet 16 and the protective film-forming film 13, the following relationships (1) to (3) hold for α, β, and γ; β≥70  (1) α/β≤0.50  (2) γ≤2000  (3).

公开(公告)号：US09953856B2

公开(公告)日：2018-04-24

申请号：US15113561

申请日：2015-01-21

Applicant: Lintec Corporation

Inventor： Daisuke Yamamoto ,  Hiroyuki Yoneyama

IPC: H01L21/683 ,  C09J7/02 ,  C09J7/00 ,  C09J11/06 ,  C09J133/10 ,  H01L21/268 ,  H01L21/56 ,  H01L21/78

CPC classification number: H01L21/6836 ,  C08K2201/002 ,  C09J7/00 ,  C09J7/10 ,  C09J7/20 ,  C09J7/255 ,  C09J7/35 ,  C09J11/06 ,  C09J133/10 ,  C09J2201/622 ,  C09J2203/326 ,  C09J2205/102 ,  C09J2205/114 ,  C09J2400/22 ,  C09J2467/006 ,  H01L21/268 ,  H01L21/561 ,  H01L21/78 ,  H01L2221/68327 ,  H01L2221/68336

Abstract: Provided is protective film-forming sheet (2) including: a protective film-forming film (1) having a light transmittance at a wavelength of 1064 nm of 55% or greater and a light transmittance at a wavelength of 550 nm of 20% or less; and a release sheet (21) which is laminated on one or both faces of the protective film-forming film (1). According to this protective film-forming sheet (2), it is possible to form a protective film which allows a workpiece such as a semiconductor wafer to have a modified layer disposed in advance therein by a laser so that the workpiece can be split through the application of force thereon, while preventing grinding marks on the workpiece or a product formed therefrom from being visible to the naked eye.

公开(公告)号：US20160326403A1

公开(公告)日：2016-11-10

申请号：US15109803

申请日：2014-12-25

Applicant: LINTEC CORPORATION

Inventor： Hiroyuki Yoneyama ,  Naoya Saiki ,  Akio Kabuto

IPC: C09J7/02 ,  B32B7/12 ,  B32B27/32 ,  H01L21/683

CPC classification number: B32B27/32 ,  B32B3/04 ,  B32B7/06 ,  B32B7/12 ,  B32B27/08 ,  B32B27/20 ,  B32B27/26 ,  B32B27/304 ,  B32B27/36 ,  B32B2250/02 ,  B32B2250/246 ,  B32B2255/10 ,  B32B2255/26 ,  B32B2264/102 ,  B32B2264/105 ,  B32B2264/107 ,  B32B2307/202 ,  B32B2307/304 ,  B32B2307/4026 ,  B32B2307/51 ,  B32B2307/748 ,  B32B2323/10 ,  B32B2457/14 ,  B32B2571/00 ,  C09J7/22 ,  C09J7/38 ,  C09J2201/122 ,  C09J2201/28 ,  C09J2201/36 ,  C09J2201/606 ,  C09J2203/326 ,  C09J2423/006 ,  C09J2423/106 ,  C09J2433/00 ,  C09J2463/00 ,  H01L21/6836 ,  H01L2221/68327 ,  H01L2221/68336 ,  H01L2221/68377

Abstract: A composite sheet 1 for forming a protective film which includes: a pressure sensitive adhesive sheet 2 obtained by laminating a pressure sensitive adhesive layer 22 on one surface of a base material 21; a protective film-forming film 3 laminated on the pressure sensitive adhesive layer 22 side of the pressure sensitive adhesive sheet 2; and a pressure sensitive adhesive layer 4 for jigs, the layer being laminated on a peripheral portion on the opposite side of the pressure sensitive adhesive sheet 2 side of the protective film-forming film 3, wherein a thickness of the pressure sensitive adhesive layer 22 of the pressure sensitive adhesive sheet 2 is from 1 to 8 μm.According to the composite sheet 1 for forming a protective film, it is possible to effectively suppress loosening of the sheet 1 in the heating step and the cooling step, and the dicing and picking up processes can also be performed satisfactorily.

Abstract translation: 根据用于形成保护膜的复合片材1，可以有效地抑制加热步骤和冷却步骤中的片材1的松动，并且还可以令人满意地进行切割和拾取过程。

公开(公告)号：US10510578B2

公开(公告)日：2019-12-17

申请号：US15120492

申请日：2014-09-03

Applicant: Lintec Corporation

Inventor： Naoya Saiki ,  Daisuke Yamamoto ,  Hiroyuki Yoneyama ,  Youichi Inao

IPC: H01L21/683 ,  B23K26/53 ,  B32B27/08 ,  B32B27/16 ,  C08J7/04 ,  C09D133/10 ,  C09D163/00 ,  C09D163/04 ,  C09J133/10 ,  C09J163/00 ,  C09J163/04 ,  H01L21/268 ,  H01L21/78 ,  C09J7/29

Abstract: A protective film forming film 1 is provided in which the product of the breaking stress (MPa) measured at a measurement temperature of 0° C. and the breaking strain (unit: %) measured at a measurement temperature of 0° C. in at least one of the protective film forming film 1 and a protective film formed from the protective film forming film 1 is in a range of 1 MPa·% to 250 MPa·%. According to such a protective film forming film 1, the protective film forming film 1 or the protective film formed from the protective film forming film 1 can be suitably divided in an expanding process performed on a workpiece when the workpiece is divided to obtain a work product.

公开(公告)号：US10399306B2

公开(公告)日：2019-09-03

申请号：US14908524

申请日：2014-01-30

Applicant: Lintec Corporation

Inventor： Naoya Saiki ,  Daisuke Yamamoto ,  Hiroyuki Yoneyama ,  Ken Takano

IPC: B32B27/06 ,  H01L21/683 ,  B32B7/06 ,  B32B27/30 ,  B32B27/38 ,  C09D5/00 ,  C09D133/08 ,  H01L21/66 ,  H01L23/31 ,  C09J133/06 ,  B32B7/12 ,  B32B27/08 ,  B32B27/32 ,  B32B27/36 ,  C09J7/22 ,  C09J7/30 ,  H01L23/544

Abstract: Provided is a sheet 2 for forming a protective film including a protective film-forming film 1 of which the light transmittance at a wavelength of 1600 nm is 25% or greater, and light transmittance at a wavelength of 550 nm is 20% or less, and a release sheet 21 which is laminated on one or both surfaces of the protective film-forming film 1. According to such a sheet 2 for forming a protective film, cracks existing in a workpiece or a manufactured product obtained by processing the workpiece can be inspected and a protective film in which grinding marks existing in the workpiece or the manufactured product are not visually recognized can be formed.