公开(公告)号：US20230092539A1

公开(公告)日：2023-03-23

申请号：US17759518

申请日：2021-01-27

Applicant: Layer Metrics Inc.

Inventor： Dominic Murphy

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/45

Abstract: Spectroferometers and methods of use are provided. The spectroferometers includes an enclosure, one or more interferometer beam-splitting elements, and one or more spectrometer beam-dispersing elements. The one or more interferometer beam-splitting elements and the one or more spectrometer beam-dispersing elements are housed in the enclosure, share one or more radiation sensitive elements, which are arranged to generate a signal in response to incident electromagnetic radiation, and each generate one or more optical outputs. The one or more optical outputs are arranged such that respective optical axes intersect substantially in a plane of the one or more radiation sensitive elements.