公开(公告)号：US20250110328A1

公开(公告)日：2025-04-03

申请号：US18477316

申请日：2023-09-28

Applicant: Omnitron Sensors

Inventor： Trent Huang ,  Jia Li ,  Curtis Ray ,  Jianing Zhao

IPC: G02B26/08 ,  G01S7/481

Abstract: A dual axis MEMS mirror assembly is disclosed. The assembly has a mirror and two arms, each having a rotational degree of motion and a translational degree of freedom. Each arm is hingedly attached to opposite ends of the mirror. A first pair of actuators is coupled to opposite ends of the first arm. A second pair of actuators is coupled to opposite ends of the second arm. The mirror is rotated around a first axis by the first and second arms when the first and second pair of actuators are rotated in the same angular direction causing the arms to translate in the translational degree of freedom. The mirror is rotated around a second axis by the first and second arms when the first and second pair of actuators are rotated in the opposite angular direction causing the arms to move in the rotational degree of motion.