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公开(公告)号:US09810576B2
公开(公告)日:2017-11-07
申请号:US15026989
申请日:2014-12-12
Inventor: Mitsuhiro Okada , Soichiro Hiraoka
CPC classification number: G01J3/26 , G01J3/0205 , G01J3/021 , G01J3/0259 , G02B26/001
Abstract: A variable wavelength optical filter module according to the present invention includes a package, a variable wavelength optical filter, and a detector. The package includes a reflection part (reflecting faces) in the inside of the package. The variable wavelength optical filter is disposed in the inside of the package and includes a first reflecting plate and a second reflecting plate facing each other, with a clearance between the first reflecting plate and the second reflecting plate being variable. The detector is disposed in the inside of the package and detects a ray of light having passed through the variable wavelength optical filter. Then, the variable wavelength optical filter and the detector are disposed on the opposite side to the reflection part (reflecting faces). The ray of the light incident into the inside of the package via the variable wavelength optical filter enters the detector via the reflection part (reflecting faces).