Microlens formed of negative photoresist
    1.
    发明授权
    Microlens formed of negative photoresist 有权
    微透镜由负性光致抗蚀剂形成

    公开(公告)号:US06249034B1

    公开(公告)日:2001-06-19

    申请号:US09280434

    申请日:1999-03-29

    Applicant: Zong-Fu Li

    Inventor: Zong-Fu Li

    Abstract: By forming a microlens of negative photoresist, economical microlens fabrication processes may be used which, in some embodiments, may achieve microlenses having good optical clarity and high thermal stability. In one embodiment, a positive photoresist may be used as a pattern mask to transfer a pattern to the negative photoresist. The microlenses may be formed by dry etching the positive photoresist which acts as a mask to transfer a pattern to the underlying negative photoresist. At the same time a scratch protection layer may be formed over regions not overlying optical sensors.

    Abstract translation: 通过形成负光致抗蚀剂的微透镜,可以使用经济的微透镜制造工艺,其在一些实施例中可以实现具有良好光学透明度和高热稳定性的微透镜。 在一个实施例中,正光致抗蚀剂可以用作图案掩模以将图案转印到负光致抗蚀剂。 微透镜可以通过干法蚀刻作为掩模的正性光致抗蚀剂来形成,以将图案转移到下面的负光致抗蚀剂。 同时可以在不覆盖光学传感器的区域上形成刮擦保护层。

    Method for creating a color microlens array of a color display layer

    公开(公告)号:US06433844B1

    公开(公告)日:2002-08-13

    申请号:US09902012

    申请日:2001-07-09

    Applicant: Zong-Fu Li

    Inventor: Zong-Fu Li

    Abstract: The making and use of color microlenses in color image sensors and color display devices is described and claimed. The color microlenses combine the function of a colorless microlens and a color filter into a single structure simplifying the fabrication of, and increasing the reliability of display devices and image sensors using the described color microlenses.

    Microlens formed of negative photoresist

    公开(公告)号:US06646808B2

    公开(公告)日:2003-11-11

    申请号:US10284929

    申请日:2002-10-31

    Applicant: Zong-Fu Li

    Inventor: Zong-Fu Li

    Abstract: By forming a microlens of negative photoresist, economical microlens fabrication processes may be used which, in some embodiments, may achieve microlenses having good optical clarity and high thermal stability. In one embodiment, a positive photoresist may be used as a pattern mask to transfer a pattern to the negative photoresist. The microlenses may be formed by dry etching the positive photoresist which acts as a mask to transfer a pattern to the underlying negative photoresist. At the same time a scratch protection layer may be formed over regions not overlying optical sensors.

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