Abstract:
A method, system and computer program product for determining an angle of incidence of a light beam illuminating a workpiece positioned on a stage are disclosed. A method for determining an angle of incidence of a light beam illuminating a workpiece positioned on a stage may include: positioning a calibration target on the stage with multiple different tilts; first determining an angle of incident of the light beam with respect to the calibration target with each tilt using a detector; mapping a response of the detector to a determined angle of incidence; and second determining the angle of incidence with respect to the workpiece based on a result of the mapping.
Abstract:
A sample stage for performing measurements using an optical metrology system includes at least one sample section for retention of a sample, and components for controlling orientation of the sample section with relation to the optical metrology system. A method and a computer program product are provided.
Abstract:
A chuck is provided with a body, a plurality of jaws and an adjustment ring. The adjustment ring is threadably engaged with the jaws. When the adjustment ring is rotated in one direction, the jaws tighten by moving closer to each other. When the adjustment ring is rotated in the opposite direction, the jaws loosen by moving away from each other. An impact member is also provided for engagement with the adjustment ring. When the drive shaft of the power tool is rotated, the adjustment ring impacts against the impact member. As a result, the adjustment ring and the body of the chuck rotate relative to each other causing the jaws of the chuck to loosen or tighten depending on the direction the drive shaft is rotating.
Abstract:
A system and method for correcting alignment of a product on a tool and, more particularly, to a system and method for correcting alignment of a wafer on a chuck of a tool. The system is a tool comprising at least one contact near a circumference of the tool and a grounded contact proximate to the at least one contact. The method comprises measuring current on each branch of a circuit and calculating an angle of a wafer based on a difference in the current on each branch of the circuit.
Abstract:
A method and apparatus are provided for positioning a transducer relative to a track of a data storage medium and inducing lateral modulation of transducer the relative to the track. An element of the transducer is actuated toward the storage medium during the lateral modulation, and atomic interaction is detected between the element and the storage medium because of a change in a response to the lateral modulation of the transducer due to the atomic interaction.
Abstract:
Various embodiment of the present invention are directed to organic molecules that are reconfigurable under application of an external electric field. One organic molecule embodiment of the present invention has the structure: where L1X1 and L2X2 are optional connector groups, A represents an electron acceptor group, D represents an electron donor group, R and R′ represent spacer molecules, and R1, R2, R3, R4, R5, R6, R7, and R8 represent atoms and hydrocarbons.
Abstract translation:本发明的各种实施方案涉及在外部电场的应用下可重新配置的有机分子。 本发明的一个有机分子实施方案具有以下结构:其中L 1 X 1和X 2 X 2 X 2 是可选的连接基团,A表示电子受体基团,D表示电子给体基团,R和R'表示间隔基分子,R 1,R 2, R 3,R 4,R 5,R 6,R 7和R 7, 8 SUB>表示原子和烃。
Abstract:
A charged beam apparatus, such as an electron microscopy apparatus, and a method for determining an aerial dimensional map of a charged beam within the charged beam apparatus, each use a test structure that includes a feature located upon a substrate. One of the feature and the substrate is conductive and the other of the feature and the structure is non conductive. The charged beam within the charged beam apparatus is scanned in a plurality of non-parallel linear directions with respect to the substrate and the feature to provide a corresponding plurality of current versus position response curves from which may be determined the aerial dimensional map of the charged beam within the charged beam apparatus.
Abstract:
A method, system and computer program product for determining matching of a tool set in a production process are disclosed. According to an embodiment, a method for determining matching of a tool set in a production process comprises: selecting a measurement step within the production process, a subset of tools of the tool set being used in the measurement step; collecting production data for each tool of the subset, the production data being related to a process feeder tool; generating a weighted average of the production data for each tool of the subset; and analyzing weighted averages of all tools of the subset using a matching standard to determine matching of the subset.
Abstract:
The present invention is drawn to an aqueous emulsion composition. The composition includes an aqueous phase and a hydrophobic phase dispersed in the aqueous phase, which includes a plurality of hydrophobic monomers. The monomers are acid-functionalized and hydrophobic, with less than 10% solubility in water. In one aspect, the monomers can be aromatic. Such monomers can be polymerized with other monomers to form latex particulates. A latex can include latex particulates dispersed in an aqueous fluid medium. In one embodiment, latex particulates can include from about 0.1 wt % to about 25 wt % of polymerized hydrophobic acid-functionalized monomer, and at least one other polymerized film-forming monomer. The latex can be formulated as an ink-jet ink.