公开(公告)号：US20200227277A1

公开(公告)日：2020-07-16

申请号：US16716883

申请日：2019-12-17

Applicant: CORNING INCORPORATED

Inventor： Philip Simon Brown ,  Yunfeng Gu ,  Mandakini Kanungo ,  Prantik Mazumder ,  Rajesh Vaddi

IPC: H01L21/48 ,  H01L23/15 ,  H01L23/498

Abstract: A method of forming an article, comprising: forming an adhesion layer comprising MnOx on a glass, glass-ceramic or ceramic wafer; calcining the adhesion layer such that a first portion of the MnOx of the adhesion layer is chemically bonded to the wafer; depositing a metal layer on the adhesion layer; and processing the metal layer and the adhesion layer such that a portion of the MnOx of the adhesion layer is chemically bonded to the metal layer.

公开(公告)号：US20200171799A1

公开(公告)日：2020-06-04

申请号：US16639664

申请日：2018-08-20

Applicant: CORNING INCORPORATED

Inventor： Kaveh Adib ,  Indrani Bhattacharyya ,  Pei-Chen Chiang ,  Hong-goo Choi ,  Dae youn Kim ,  Jen-Chieh Lin ,  Prantik Mazumder ,  Pei-Lien Tseng

IPC: B32B17/10

Abstract: Described herein are articles and methods of making articles, for example glass articles, comprising a thin sheet and a carrier, wherein the thin sheet and carrier are bonded together using a modification (coating) layer, for example a cationic polymer coating layer, and associated deposition methods, the carrier, or both, to control van der Waals, hydrogen and covalent bonding between the thin sheet and the carrier. The modification layer bonds the thin sheet and carrier together with sufficient bond strength to prevent delamination of the thin sheet and the carrier during high temperature (≤600° C.) processing while also preventing formation of a permanent bond between the sheets during such processing.

公开(公告)号：US20190327840A1

公开(公告)日：2019-10-24

申请号：US16386639

申请日：2019-04-17

Applicant: Corning Incorporated

Inventor： Dana Craig Bookbinder ,  Yunfeng Gu ,  Prantik Mazumder ,  Rajesh Vaddi

IPC: H05K3/38 ,  H05K3/18 ,  H05K3/00 ,  H05K3/42 ,  H05K1/03 ,  H05K1/11 ,  H05K1/09

Abstract: In some embodiments, a method comprises leaching a surface of a glass or glass ceramic substrate to form a leached layer. The glass or glass ceramic substrate comprises a multi-component material. The material has a bulk composition, in mol % on an oxide basis: 51% to 90% SiO2; 10% to 49% total of minority components ROx. Leaching comprises selectively removing components ROx of the glass or glass ceramic substrate preferentially to removal of SiO2. In the leached layer, the ROx concentration is 50% or less than the ROx concentration of the bulk composition.

公开(公告)号：US20190313524A1

公开(公告)日：2019-10-10

申请号：US16376467

申请日：2019-04-05

Applicant: Corning Incorporated

Inventor： Tian Huang ,  Mandakini Kanungo ,  Ekaterina Kuksenkova ,  Prantik Mazumder ,  Chad Byron Moore ,  Chukwudi Azubuike Okoro ,  Ah-Young Park ,  Scott Christopher Pollard ,  Rajesh Vaddi

IPC: H05K1/02 ,  C23C14/18 ,  C23C18/38 ,  C23C28/02 ,  H05K1/11 ,  H05K1/03

Abstract: An article includes a glass or glass-ceramic substrate having a first major surface and a second major surface opposite the first major surface, and at least one via extending through the substrate from the first major surface to the second major surface over an axial length in an axial dimension. The article also includes a metal connector disposed within the via that hermetically seals the via. The article has a helium hermeticity of less than or equal to 1.0×10−8 atm-cc/s after 1000 thermal shock cycles, each of the thermal shock cycle comprises cooling the article to a temperature of −40° C. and heating the article to a temperature of 125° C., and the article has a helium hermeticity of less than or equal to 1.0×10−8 atm-cc/s after 100 hours of HAST at a temperature of 130° C. and a relative humidity of 85%.

公开(公告)号：US20190233321A1

公开(公告)日：2019-08-01

申请号：US16248911

申请日：2019-01-16

Applicant: Corning Incorporated

Inventor： Adam James Ellison ,  Leonard Thomas Masters ,  Prantik Mazumder ,  Alexander Mikhailovich Streltsov

IPC: C03B33/08

CPC classification number: C03B33/082 ,  B23K26/009 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/384 ,  B23K26/40 ,  G02B6/3644

Abstract: A method for forming features in transparent dielectric materials is described. The method includes laser micromachining of a transparent dielectric material. The transparent dielectric material is in contact with a liquid containing a fluorinated compound. Features formed by the method have low surface roughness and highly uniform linear dimensions.

公开(公告)号：US20190176435A1

公开(公告)日：2019-06-13

申请号：US16327497

申请日：2017-08-29

Applicant: CORNING INCORPORATED

Inventor： Robert Alan Bellman ,  Jiangwei Feng ,  Prantik Mazumder

IPC: B32B7/12 ,  B32B27/28 ,  C09J5/04 ,  C09J183/04 ,  B32B37/24

Abstract: Described herein are glass articles and methods of making glass articles, comprising a thin sheet and a carrier, wherein the thin sheet and carrier or bonded together using a coating layer, which is preferably an organosiloxane polymer coating layer, and associated deposition methods and inert gas treatments that may be applied on the thin sheet, the carrier, or both, to control van der Waals, hydrogen and covalent bonding between the thin sheet and the carrier. The coating layer bonds the thin sheet and carrier together to prevent a permanent bond at high temperature processing while at the same time maintaining a sufficient bond to prevent delamination during high temperature processing.

公开(公告)号：US10155248B2

公开(公告)日：2018-12-18

申请号：US15044330

申请日：2016-02-16

Applicant: CORNING INCORPORATED ,  ICFO (THE INSTITUTE OF PHOTONIC SCIENCES) ,  ICREA (INSTITUTE CATALANA DE RECERCA I ESTUDIS AVANCATS)

Inventor： David Eugene Baker ,  Carme Gomez Carbonell ,  David Francis Dawson-Elli ,  Prantik Mazumder ,  Valerio Pruneri ,  Lili Tian

IPC: B05D3/00 ,  B32B33/00 ,  B05D3/02 ,  C23C14/18 ,  C23C14/58 ,  C03C17/06

Abstract: Described herein are improved dewetting methods and improved patterned articles produced using such methods. The improved methods and articles generally implement continuous ultra-thin metal-containing films or film stacks as the materials to be dewetted. For example, a method can involve the steps of providing a substrate that has a continuous ultra-thin metal-containing film or film stack disposed on a surface thereof, and dewetting at least a portion of the continuous ultra-thin metal-containing film or film stack to produce a plurality of discrete metal-containing dewetted islands on the surface of the substrate.

公开(公告)号：US20170182744A1

公开(公告)日：2017-06-29

申请号：US15302098

申请日：2015-04-07

Applicant: Corning Incorporated

Inventor： Robert Alan Bellman ,  Prantik Mazumder ,  Robert George Manley ,  Kaveh Adib

IPC: B32B17/06 ,  B32B38/10 ,  B32B27/06 ,  B32B37/06 ,  B32B7/06 ,  B32B3/26

CPC classification number: B32B17/06 ,  B32B3/266 ,  B32B7/06 ,  B32B7/12 ,  B32B9/005 ,  B32B9/04 ,  B32B17/00 ,  B32B27/06 ,  B32B38/0008 ,  B32B2250/02 ,  B32B2255/00 ,  B32B2307/308 ,  B32B2307/50 ,  B32B2307/546 ,  B32B2307/702 ,  B32B2307/732 ,  B32B2307/748 ,  B32B2307/75 ,  B32B2309/02 ,  B32B2309/04 ,  B32B2309/105 ,  B32B2315/08 ,  B32B2457/00 ,  C03C15/00 ,  H01L21/02043 ,  H01L21/02079

Abstract: A method of making a device substrate article having a device modified substrate supported on a glass carrier substrate, including: treating at least a portion of the first surface of a device substrate, at least a portion of a first surface of a glass carrier, or a combination thereof, wherein the treating produces a surface having: silicon; oxygen; carbon; and fluorine amounts; and a metal to fluorine ratio as defined herein; contacting the treated surface with an untreated or like-treated counterpart device substrate or glass carrier substrate to form a laminate comprised of the device substrate bonded to the glass carrier substrate; modifying at least a portion of the non-bonded second surface of the device substrate of the laminate with at least one device surface modification treatment; and separating the device substrate having the device modified second surface from the glass carrier substrate.

公开(公告)号：US20150329415A1

公开(公告)日：2015-11-19

申请号：US14651728

申请日：2013-12-13

Applicant: Robert Alan BELLMAN ,  Dana Craig BOOKBINDER ,  Robert George MANLEY ,  Prantik MAZUMDER ,  CORNING INCORPORATED

Inventor： Robert Alan Bellman ,  Dana Craig Bookbinder ,  Robert George Manley ,  Prantik Mazumder

IPC: C03C17/30 ,  B32B17/06 ,  B32B7/12 ,  B32B37/18 ,  C03C17/32

CPC classification number: C03C17/30 ,  B32B7/06 ,  B32B7/12 ,  B32B17/06 ,  B32B37/18 ,  B32B2255/26 ,  B32B2307/538 ,  B32B2307/546 ,  B32B2315/08 ,  B32B2551/00 ,  C03C17/32 ,  C03C27/10 ,  C03C2218/328 ,  Y10T428/24355 ,  Y10T428/269 ,  Y10T428/31544 ,  Y10T428/31612

Abstract: Surface modification layers (30) and associated heat treatments, that may be provided on a sheet (20), a carrier (10), or both, to control both room-temperature van der Waals (and/or hydrogen) bonding and high temperature covalent bonding between the thin sheet and carrier. The room-temperature bonding is controlled so as to be sufficient to hold the thin sheet and carrier together during vacuum processing, wet processing, and/or ultrasonic cleaning processing, for example. And at the same time, the high temperature covalent bonding is controlled so as to prevent a permanent bond between the thin sheet and carrier during high temperature processing, as well as maintain a sufficient bond to prevent delamination during high temperature processing.

Abstract translation: 可以提供在片材（20），载体（10）或两者上的表面改性层（30）和相关的热处理以控制室温范德华力（和/或氢）键合和高温 在薄片和载体之间共价键合。 例如，在真空处理，湿法处理和/或超声波清洗处理中，室温粘合被控制为足以将薄片和载体保持在一起。 同时控制高温共价键，以防止在高温加工过程中薄片和载体之间的永久性结合，并且保持足够的粘结以防止在高温加工过程中的分层。

公开(公告)号：US09023457B2

公开(公告)日：2015-05-05

申请号：US13687227

申请日：2012-11-28

Applicant: Corning Incorporated ,  ICFO (The Institute of Photonic Sciences) ,  ICREA (Institute Catalana de Recerca I Estudis Avancats)

Inventor： Albert Carrilero ,  Prantik Mazumder ,  Johann Osmond ,  Valerio Pruneri ,  Paul Arthur Sachenik ,  Lili Tian

IPC: C23F1/02 ,  G03F7/00 ,  B08B17/06

CPC classification number: C23F1/02 ,  B08B17/065 ,  C03C15/00 ,  C03C17/06 ,  C03C2218/33 ,  C03C2218/34 ,  G03F7/00 ,  Y10S977/773 ,  Y10S977/89 ,  Y10T428/24355

Abstract: Described herein are various methods for making textured articles, textured articles that have improved fingerprint resistance, and methods of using the textured articles. The methods generally make use of masks comprising nanostructured metal-containing features to produce textured surfaces that also comprise nanostructured features. These nanostructured features in the textured surfaces can render the surfaces hydrophobic and oleophobic, thereby beneficially providing the articles with improved fingerprint resistance relative to similar or identical articles that lack the texturing.

Abstract translation: 本文描述了用于制造纹理制品，具有改善的耐指纹性的纹理制品以及使用纹理制品的方法的各种方法。 所述方法通常使用包含纳米结构的含金属特征的掩模以产生也包含纳米结构特征的纹理表面。 纹理表面中的这些纳米结构特征可以使表面疏水和疏油，从而有利地为制品提供相对于缺乏纹理的类似或相同制品的改进的指纹抗性。