公开(公告)号：US20050130360A1

公开(公告)日：2005-06-16

申请号：US11031320

申请日：2005-01-05

Applicant: Changqing Zhan ,  Michael Wolfson ,  John Hartzell

Inventor： Changqing Zhan ,  Michael Wolfson ,  John Hartzell

IPC: H01L21/336

CPC classification number: B81B3/0021 ,  B81B2201/0292 ,  B81B2203/0118 ,  B81C1/00246 ,  B81C2203/075 ,  C30B1/02 ,  C30B29/00 ,  G01L1/044 ,  G01L9/0042 ,  G01P15/0802 ,  G01P15/124 ,  G01P2015/0828 ,  H01L27/12 ,  H01L29/66757 ,  H04R17/02 ,  H04R31/006

Abstract: A piezo-TFT cantilever microelectromechanical system (MEMS) and associated fabrication processes are provided. The method comprises: providing a substrate, such as glass for example; forming thin-films overlying the substrate; forming a thin-film cantilever beam; and simultaneously forming a TFT within the cantilever beam. The TFT is can be formed least partially overlying a cantilever beam top surface, at least partially overlying a cantilever beam bottom surface, or embedded within the cantilever beam. In one example, forming thin-films on the substrate includes: selectively forming a first layer with a first stress level; selectively forming a first active Si region overlying the first layer; and selectively forming a second layer overlying the first layer with a second stress level. The thin-film cantilever beam is formed from the first and second layers, while the TFT source/drain (S/D) and channel regions are formed from the first active Si region.

Abstract translation: 提供了压电TFT悬臂微机电系统（MEMS）及相关制造工艺。 该方法包括：提供例如玻璃等基板; 形成覆盖衬底的薄膜; 形成薄膜悬臂梁; 并且同时在悬臂梁内形成TFT。 TFT可以形成为最少部分地覆盖在悬臂梁顶表面上，至少部分地覆盖悬臂梁底表面或嵌入在悬臂梁内。 在一个示例中，在衬底上形成薄膜包括：选择性地形成具有第一应力水平的第一层; 选择性地形成覆盖在第一层上的第一有源Si区; 以及以第二应力水平选择性地形成覆盖所述第一层的第二层。 薄膜悬臂梁由第一和第二层形成，而TFT源极/漏极（S / D）和沟道区域由第一有源Si区形成。

公开(公告)号：US20040261514A1

公开(公告)日：2004-12-30

申请号：US10854756

申请日：2004-05-27

Inventor： Akira Umebayashi

IPC: G01L001/04

CPC classification number: G01L5/0057 ,  G01L1/044

Abstract: A spring has a fixed end and a free end, the free end when elevated to a specific elevation from the fixed end produces a load on an object. A spring constant of the spring is calculated, a load correction amount for correcting load of the spring is calculated using the spring constant, and the spring based on the load correction amount.

公开(公告)号：US20040206184A1

公开(公告)日：2004-10-21

申请号：US10487046

申请日：2004-02-17

Inventor： Dietmar Arndt ,  Reinhard Hegewald ,  Thomas Hellfeld ,  Lutz Schmidt ,  Bernhard Steiger

IPC: G01L009/00

CPC classification number: G01L23/16 ,  G01L1/044 ,  G01L9/0077 ,  G01L11/02

Abstract: The invention relates to optical devices for measuring pressure or force, comprising an clectromagnetic radiation source, and a pressure membrane or a spiral spring which has a surface that at least partially reflects the electromagnetic rays of the electromagnetic radiation source. The inventive devices are especially characterized in that they allow, inter alia, measurement of even the slightest pressure changes of fluids and other flowable materials in the stationary and/or flowing state or even the slightest mechanical deformations on spiral springs. In order to do this, the rays of an electromagnetic radiation source are incident on the at least partially reflective surface of the pressure membrane or spiral spring. At least one section of a stationarily located body or of a stationarily located body having a reflective layer is disposed in the path of the reflected rays, upstream of a photodetector for said rays, and projects into said rays. A mechanical modification causes the reflected rays to be absorbed, diffracted, reflected again and/or split to a higher or lesser extent by the body.

Abstract translation: 本发明涉及用于测量压力或力的光学装置，其包括电磁辐射源，以及具有至少部分地反映电磁辐射源的电磁射线的表面的压力膜或螺旋弹簧。 本发明的装置的特征在于，它们尤其允许测量在静止和/或流动状态下的流体和其它可流动材料的甚至最轻微的压力变化，甚至在螺旋弹簧上甚至最轻微的机械变形。 为了做到这一点，电磁辐射源的射线入射到压力膜或螺旋弹簧的至少部分反射表面上。 具有反射层的固定位置体或固定位置体的至少一个部分设置在反射射线的路径中，用于所述射线的光电检测器的上游并投射到所述射线中。 机械修改使得反射的光线被身体吸收，衍射，反射和/或分裂到或多或少的程度。

公开(公告)号：US06578434B1

公开(公告)日：2003-06-17

申请号：US09638547

申请日：2000-08-16

Applicant: Philippe Maubant ,  Yvon Rancourt

Inventor： Philippe Maubant ,  Yvon Rancourt

IPC: G01N320

CPC classification number: G01L1/044 ,  G01B7/16 ,  G01L25/00

Abstract: The invention concerns a tensile testing sensor mounted on a mechanical member wherein forces to be measures develop comprising a bendable metal blade (1, 22) provided with measuring gauges (2, 23) implanted and positioned on the blade. Said blade (1, 22) is sensitive to mechanical tensile and compressive deformations sustained and transmitted via two bearing parts (4, 5, 20) coupled to the mechanical member wherein the forces develop. The sensor is equipped with a mechanically locking flange (31) placed during calibration between the bearing parts (4, 5, 20) and the sensor blade.

Abstract translation: 本发明涉及一种安装在机械构件上的拉力测试传感器，其中要测量的力是包括设置有植入和定位在叶片上的测量计（2,33）的可弯曲金属叶片（1,22）。 所述叶片（1,22）对于机械拉伸和压缩变形敏感，所述机械拉伸和压缩变形通过联接到力产生的机械构件的两个轴承部件（4,5，20）而保持和传递。 传感器配备有在轴承部件（4,5,10）和传感器刀片之间的校准期间放置的机械锁定凸缘（31）。

公开(公告)号：US4144516A

公开(公告)日：1979-03-13

申请号：US817556

申请日：1977-07-21

Applicant: Harry E. Aine

Inventor： Harry E. Aine

IPC: G01L1/04 ,  G01L1/14 ,  G01L1/18 ,  G01L1/22

CPC classification number: G01L1/18 ,  G01L1/044 ,  G01L1/148 ,  Y10T29/49002 ,  Y10T29/49103

Abstract: Solid state dual leaf spring transducers are fabricated by batch photolithographic etching techniques from a monocystalline nonmetallic material, such as silicon. Each leaf spring structure includes a leaf spring portion surrounded by a support structure defined by an intervening region of the wafer disposed between adjacent leaf spring structures etched into the wafer. A pair of such leaf spring structures with their respective surrounding support structures are joined together in mutually opposed relation to form a composite dual leaf spring transducer structure of the type wherein a pair of leaf spring structures are mechanically coupled together in axially spaced relation along an axis of sensitivity for equal displacement along said axis of sensitivity in response to displacement of either one of the spring structures relative to the support structure. In one embodiment, a third wafer is interposed between the first two opposed wafers, such third wafer having apertures formed therein so that the leaf spring structures are coupled together through the apertures in the third wafer. In another embodiment, conductive capacitive patterns are formed on the leaf spring structures so as to provide a capacitor structure for sensing displacement of the leaf spring structure.

Abstract translation: 固态双片簧传感器通过从单晶非金属材料（例如硅）的分批光刻蚀刻技术制造。 每个板簧结构包括一个板簧部分，由一个支撑结构所围绕，该支撑结构由设置在蚀刻到晶片中的相邻板簧结构之间的晶片的中间区限定。 一对这样的具有它们相应的周围支撑结构的板簧结构以相互相对的关系连接在一起以形成这种类型的复合双板簧换能器结构，其中一对板簧结构沿轴线以轴向间隔的关系机械耦合在一起 响应于弹簧结构中的任一个相对于支撑结构的位移，沿着所述灵敏度轴相等位移的灵敏度。 在一个实施例中，第三晶片插入在前两个相对的晶片之间，这样的第三晶片具有形成在其中的孔，使得板簧结构通过第三晶片中的孔耦合在一起。 在另一个实施例中，导电电容图案形成在板簧结构上，以便提供用于感测板簧结构位移的电容器结构。

公开(公告)号：US3969934A

公开(公告)日：1976-07-20

申请号：US506318

申请日：1974-09-16

Applicant: Seymour H. Raskin

Inventor： Seymour H. Raskin

IPC: G01G3/14 ,  G01G5/00 ,  G01G7/02 ,  G01G9/00 ,  G01L1/04 ,  G01L1/22

CPC classification number: G01L1/044 ,  G01G3/1402 ,  G01G5/003 ,  G01G7/02 ,  G01G9/005 ,  G01L1/2231

Abstract: A load cell of the beam type comprising an operator member having a pair of parallel longitudinally extending slots forming a central beam member and a pair of parallel bearing members spaced outwardly of the central beam member, the outer ends of the bearing members and the central beam member being integral. The operator member has a pair of support members extending outwardly from opposite sides thereof, the support members being positionable on horizontal laterally spaced surfaces on a support block. The load or force to be measured is applied to the central portion of the central beam member which is provided with deflection measuring apparatus at points of inflection of the elastic curve of a beam member. The deflection measuring apparatus preferably comprises an indicator arm extending perpendicularly from the central beam member such that the end of the indicator arm is moved a substantial distance upon slight angular deflection of the elastic curve or the neutral axis of the central beam member to indicate the magnitude of force applied to deflect the beam member.

Abstract translation: 梁型的测力传感器包括操作器构件，该操作器构件具有形成中心梁构件的一对平行的纵向延伸的槽和与中心梁构件向外隔开的一对平行的轴承构件，轴承构件的外端和中心梁 会员是不可分割的。 操作者构件具有从其相对侧向外延伸的一对支撑构件，支撑构件可定位在支撑块上的水平横向间隔开的表面上。 要测量的载荷或力被施加到中心梁构件的中心部分，该中心梁构件在梁构件的弹性曲线的拐点处设置有偏转测量装置。 偏转测量装置优选地包括从中心梁构件垂直延伸的指示臂，使得指示臂的端部在中心梁构件的弹性曲线或中性轴的轻微角度偏转时移动相当大的距离，以指示幅度 施加以使梁构件偏转的力。

公开(公告)号：US3718047A

公开(公告)日：1973-02-27

申请号：US3718047D

申请日：1970-12-15

Applicant: YOKOGAWA ELECTRIC WORKS LTD

Inventor： NISHIHARA T ,  NAKAGAWA M ,  TAUCHI T

IPC: G01L1/04 ,  G01L9/00 ,  G01L7/08 ,  G01L9/10

CPC classification number: G01L1/044 ,  G01L9/0036 ,  G01L9/007 ,  G01L19/02 ,  G01L19/04

Abstract: A force-to-signal converter having a device for receiving an external force, a device for transmitting the external force, a third device for converting the external force delivered from the second-mentioned device into a corresponding deflection, and a device for converting the deflection obtained from the thirdmentioned device into a signal, in which the third-mentioned device is a substantially E-shaped spring.

Abstract translation: 具有用于接收外力的装置的力 - 信号转换器，用于传递外力的装置，用于将从第二提到的装置传递的外力转换成相应偏转的第三装置，以及用于转换 从第三提到的装置获得的偏转为信号，其中第三提到的装置是大致E形的弹簧。

公开(公告)号：US3362219A

公开(公告)日：1968-01-09

申请号：US45973665

申请日：1965-05-28

Applicant: ROBERT B. CORBETT

Inventor： CORBETT FOBERT B

IPC: G01L1/04

CPC classification number: G01L1/044

公开(公告)号：US3279254A

公开(公告)日：1966-10-18

申请号：US32778463

申请日：1963-12-03

Applicant: ZUMBUSCH PETER C

Inventor： ZUMBUSCH PETER C

IPC: G01F23/00 ,  G01L1/04

CPC classification number: G01L1/044 ,  G01F23/0038

公开(公告)号：US2559800A

公开(公告)日：1951-07-10

申请号：US63808845

申请日：1945-12-29

Applicant: RYAN JR JAMES J

Inventor： RYAN JR JAMES J

IPC: G01L1/04

CPC classification number: G01L1/044