OPTICAL METROLOGY WITH PURGED REFERENCE CHIP
    91.
    发明申请
    OPTICAL METROLOGY WITH PURGED REFERENCE CHIP 审中-公开
    具有参考芯片的光学计量

    公开(公告)号:US20160033399A1

    公开(公告)日:2016-02-04

    申请号:US14809054

    申请日:2015-07-24

    Abstract: An integrated metrology module includes a chuck for holding a sample and positioning the sample with respect to an optical metrology device, a reference chip for the optical metrology device, the reference chip being movable to various positions with respect to the optical metrology device, and a reference chip purge device provides a flow of purge gas or air over the reference chip while the reference chip is in the various positions. The reference chip purge device may be static or movable with the reference chip.

    Abstract translation: 综合测量模块包括用于保持样品并相对于光学测量装置定位样品的卡盘,用于光学测量装置的参考芯片,参考芯片可移动到相对于光学测量装置的各个位置,以及 参考芯片清洗装置在参考芯片处于各种位置时提供吹扫气体或空气流过参考芯片。 参考芯片清洗装置可以是参考芯片的静态或可移动的。

    Infusion Set And Spectroscopic Analyzer For Analysis Of Pharmaceuticals
    93.
    发明申请
    Infusion Set And Spectroscopic Analyzer For Analysis Of Pharmaceuticals 审中-公开
    用于药物分析的输液器和光谱分析仪

    公开(公告)号:US20160011097A1

    公开(公告)日:2016-01-14

    申请号:US14859277

    申请日:2015-09-19

    Inventor: Dean O. Allgeyer

    Abstract: An infusion set and an intravenous bag adapter constructed of ultraviolet transmissive thermoplastic are used in spectroscopic validation of pharmaceuticals. The described hardware allows for qualitative and quantitative assurance of medications and is used to prevent medication errors. The thermoplastic is transmissive in the range below 315 nanometers. In one embodiment, the invention comprises a spectrometer and a test chamber that are unaffected by the presence of ambient light. The spectrometer includes an unshielded slot or receptacle into which the test chamber is easily fitted. This embodiment can function well in drug diversion programs for which unused post-op narcotics can be tested.

    Abstract translation: 由紫外线透射型热塑性塑料构成的输液器和静脉内袋式适配器用于药物的光谱验证。 所描述的硬件允许药物的定性和定量保证,并用于预防用药错误。 热塑性材料在315纳米以下的范围内是透光的。 在一个实施例中,本发明包括不受环境光的影响的光谱仪和测试室。 光谱仪包括一个非屏蔽的槽或容器,测试室容易安装在其中。 该实施例可以在可以测试未使用的操作后麻醉剂的药物转移程序中发挥良好的作用。

    Multi-Channel Backside Wafer Inspection
    98.
    发明申请
    Multi-Channel Backside Wafer Inspection 有权
    多通道背面晶圆检查

    公开(公告)号:US20150233841A1

    公开(公告)日:2015-08-20

    申请号:US14577374

    申请日:2014-12-19

    Inventor: Yakov Bobrov

    Abstract: A system for inspecting a backside surface of a wafer with multi-channel focus control includes a set of inspection sub-systems including a first inspection sub-system positioned and an additional inspection sub-system. The first and additional inspection sub-systems include an optical assembly, an actuation assembly, where the optical assembly is disposed on the actuation assembly, and a positional sensor configured to sense a position characteristic between a portion of the optical assembly and the backside surface of the wafer. The system also includes a controller configured to acquire one or more wafer profile maps of the backside surface of the wafer and adjust a first focus position of the first inspection sub-system or an additional focus position of the additional inspection sub-system based on the received one or more wafer profile maps.

    Abstract translation: 用于通过多通道聚焦控制来检查晶片的背面的系统包括一组检查子系统,包括定位的第一检查子系统和附加的检查子系统。 第一和附加检查子系统包括光学组件,致动组件,其中光学组件设置在致动组件上,以及位置传感器,其被配置为感测光学组件的一部分与背面侧面之间的位置特性 晶圆。 该系统还包括控制器,该控制器被配置为获取晶片的背面的一个或多个晶片轮廓图,并且基于所述第一检测子系统的第一焦点位置或附加检查子系统的附加焦点位置 接收到一个或多个晶片轮廓图。

    SAMPLING DEVICE
    99.
    发明申请
    SAMPLING DEVICE 审中-公开
    采样设备

    公开(公告)号:US20150233795A1

    公开(公告)日:2015-08-20

    申请号:US14429377

    申请日:2013-09-19

    Abstract: Particle collecting unit for the detection of particles in the particle level of substance without evaporating the collected particles is disclosed. The particle collecting unit, which is preferably disposable, comprises a body, a duct extending through the body and connecting between a rear opening of the body and an air intake orifice of the body, and an aperture or slit in a mid portion of the body adapted for receiving a removable sampling member into a position within the duct, wherein the particles collecting unit is configured to be removably coupled to a vacuum generator with said rear opening of the body coupled to an air intake opening of the vacuum generator. A sampling probe for use with the particle collecting unit is also disclosed. The invention further refers to a system based on the particle collecting unit for the detection of particles in the particle level of substance without evaporating the collected particles is also disclosed, and to a method of detection based on the system.

    Abstract translation: 公开了用于检测物质颗粒水平的颗粒而不蒸发收集的颗粒的颗粒收集单元。 优选一次性的颗粒收集单元包括主体,延伸穿过主体并且连接主体的后开口和主体的进气孔之间的管道,以及主体中部的孔或狭缝 适于将可移除的取样构件接收到管道内的位置,其中所述颗粒收集单元构造成可移除地联接到真空发生器,所述主体的所述后开口与所述真空发生器的进气口相连。 还公开了一种用于颗粒收集单元的取样探针。 本发明还涉及基于用于检测物质的颗粒水平的颗粒而不蒸发收集的颗粒的颗粒收集单元的系统,并且还公开了一种基于该系统的检测方法。

    Microscope
    100.
    发明申请
    Microscope 有权
    显微镜

    公开(公告)号:US20150226670A1

    公开(公告)日:2015-08-13

    申请号:US14413806

    申请日:2013-06-11

    Abstract: A microscope including a sample carrier configured to support a sample. Excitation light illuminates the sample via an excitation beam path, Detection light from the sample is guided to detection means via a detection beam oath. Through an objective arranged along the optical axis, excitation light is guided in direction of the sample carrier and detection light coming from the sample is guided in direction of the detection means. Beam-splitting means separate excitation light and detection light. Also provided are means for generating a light sheet from excitation tight, and means for illuminating the sample with this light sheet. The light sheet lies in a plane at a nonzero angle to the optical axis. The means for illuminating the sample include an optical-deflecting device arranged on or at the sample carrier, which deflects excitation light from the objective into the plane of the light sheet via an optically active surface.

    Abstract translation: 包括构造成支撑样品的样品载体的显微镜。 激发光通过激发光束路径照射样品,来自样品的检测光通过检测光束誓言被引导到检测装置。 通过沿着光轴配置的物镜,沿着样品载体的方向引导激发光,并且沿着检测装置的方向引导来自样品的检测光。 光束分束是指分离的激发光和检测光。 还提供了用于从激发致密产生光片的装置,以及用该光片照射样品的装置。 光片位于与光轴成非零角度的平面中。 用于照亮样品的装置包括布置在样品载体上或样品载体上的光学偏转装置,其通过光学活性表面将来自物镜的激发光偏转到光片的平面中。

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