公开(公告)号：US20030156286A1

公开(公告)日：2003-08-21

申请号：US10347842

申请日：2003-01-16

Inventor： Takeshi Takagi ,  Kazuhiro Ikeda ,  Tatsuya Hatano ,  Hiroshi Matsuura

IPC: G01J004/00

CPC classification number: G01J4/00

Abstract: An object is to accurately measure the Stokes parameters, without the occurrence of polarization fluctuations or PDL during the splitting of the incident light. When the incident light is made incident on a first-stage prism, the light is split into two first splitting light rays. Next, the first split light rays are respectively incident on a pair of prisms of a second stage. Each of the pair of first split light rays is split into two rays by a second-stage prism, to obtain four second split light rays.

Abstract translation: 目的是精确测量斯托克斯参数，而不会在入射光分裂期间出现极化波动或PDL。 当入射光入射在第一级棱镜上时，光被分成两个第一分裂光线。 接下来，第一分裂光线分别入射到第二级的一对棱镜上。 一对第一分裂光线中的每一个被第二级棱镜分成两束，以获得四条第二分裂光线。

公开(公告)号：US20030137663A1

公开(公告)日：2003-07-24

申请号：US10341225

申请日：2003-01-13

Inventor： Minna Hovinen ,  Jon Opsal

IPC: G01J004/00

CPC classification number: G01N21/211 ,  G01N21/171

Abstract: A method is disclosed for measuring the dose and energy level of ion implants forming a shallow junction in a semiconductor sample. In the method, two independent measurements of the sample are made. The first measurement monitors the response of the sample to periodic excitation. In the illustrated embodiment, the modulated optical reflectivity of a reflected probe beam is monitored to provide information related to the generation of thermal and/or plasma waves in the sample. A second spectroscopic measurement is also performed. This measurement could be either a spectroscopic reflectometry measurement or a spectroscopic ellipsometry measurement. The data from the two measurements are combined in a manner to yield information about both the dose (concentration) of the dopants as well as the energy used to inject the dopants in the semiconductor lattice. The method will useful in controlling the formation of shallow junctions.

Abstract translation: 公开了一种用于测量在半导体样品中形成浅结的离子植入物的剂量和能量水平的方法。 在该方法中，进行样品的两次独立测量。 第一个测量监测样品对周期性激发的响应。 在所示实施例中，监测反射探测光束的调制光学反射率，以提供与样品中的热和/或等离子体波的产生有关的信息。 还进行第二光谱测量。 该测量可以是光谱反射测量或光谱椭偏仪测量。 以这种方式组合来自两个测量的数据，以产生关于掺杂剂的剂量（浓度）以及用于在半导体晶格中注入掺杂剂的能量的信息。 该方法将有助于控制浅结的形成。

公开(公告)号：US20030095257A1

公开(公告)日：2003-05-22

申请号：US10288875

申请日：2002-11-06

Inventor： Geert Johannes Wijntjes ,  Constantine T. Markos

IPC: G01J004/00

CPC classification number: G01D5/34715 ,  G01D5/344 ,  G01D5/3473

Abstract: An optically coupled rotary encoder that is capable of measuring and encoding the angle of rotation of a rotating or stationary object. A polarizer rotates synchronously with the rotatable object and inputs broadband or single frequency unpolarized light. The polarizer outputs and directs polarized light towards a plurality of fixed analyzers and light detectors. Each fixed analyzer outputs and directs further polarized light towards one of the light detectors. Each light detector outputs an electrical signal to a phase processor based upon one attribute of the further polarized light. The phase processor outputs a phase angle with high resolution (>10 bit) with high accuracy and frequency (5 Mhz). The system and method can operate in harsh environments having high temperatures, dirt and debris and is not susceptible to EMI/RFI.

Abstract translation: 一种光学耦合旋转编码器，其能够测量和编码旋转或静止物体的旋转角度。 偏光镜与可旋转物体同步旋转并输入宽频或单频非偏振光。 偏振器输出并将偏振光引向多个固定分析器和光检测器。 每个固定分析仪输出并向其中一个光检测器引导进一步的偏振光。 每个光检测器基于另一个偏振光的一个属性将电信号输出到相位处理器。 相位处理器以高精度和高频（5 Mhz）输出高分辨率（> 10位）的相位角。 该系统和方法可以在具有高温，灰尘和碎屑的恶劣环境中工作，并且不易受到EMI / RFI的影响。

公开(公告)号：US20030053053A1

公开(公告)日：2003-03-20

申请号：US09864981

申请日：2001-05-24

Inventor： Jon Opsal ,  Youxian Wen

IPC: G01J004/00

CPC classification number: G01N21/211 ,  G01N21/8422 ,  G01N25/72

Abstract: A system is disclosed for evaluating nitrogen levels in thin gate dielectric layers formed on semiconductor samples. In one embodiment, a tool is disclosed which includes both a narrow band ellipsometer and a broadband spectrometer for measuring the sample. The narrowband ellipsometer provides very accurate information about the thickness of the thin film layer while the broadband spectrometer contains information about the nitrogen levels. In another aspect of the subject invention, a thermal and/or plasma wave detection system is used to provide information about the nitrogen levels and nitration processes.

公开(公告)号：US20030020912A1

公开(公告)日：2003-01-30

申请号：US10112138

申请日：2002-03-29

Inventor： Adam E. Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke

IPC: G01J004/00

CPC classification number: G01B11/02 ,  G01J3/02 ,  G01J3/0294 ,  G01N21/211 ,  G01N21/25 ,  G01N21/474 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213

Abstract: An optical measurement system for evaluating a sample has a azimuthally rotatable measurement head. A motor-driven rotating mechanism is coupled to the measurement head to allow the optics to rotate with respect to the sample. In particular, a preferred embodiment is a polarimetric scatterometer (FIG. 1) for measuring optical properties of a periodic structure on a wafer sample (12). This scatterometer has optics (30) directing a polarized illumination beam at non-normal incidence onto the periodic structure. In addition to a polarizer (8), the illumination path can also be provided with an E-O modulator for modulating the polarization. The measurement head optics also collect light reflected from the periodic structure and feed that light to a spectrometer (17) for measurement. A polarization beamsplitter (18) is provided in the collection path so that both S and P polarization from the sample can be separately measured. The entire measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures on the wafer. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.

Abstract translation: 用于评估样品的光学测量系统具有方位角可旋转的测量头。 马达驱动的旋转机构耦合到测量头以允许光学器件相对于样品旋转。 特别地，优选的实施例是用于测量晶片样品（12）上的周期性结构的光学性质的偏振散射仪（图1）。 该散射仪具有将非正常入射的偏振照明光束引导到周期性结构上的光学器件（30）。 除了偏振器（8）之外，照明路径还可以设置有用于调制偏振的E-O调制器。 测量头光学器件还收集从周期性结构反射的光并将该光馈送到用于测量的光谱仪（17）。 偏振分束器（18）设置在收集路径中，从而可以分别测量来自样本的S和P极化。 可以将整个测量头安装成相对于晶片上的周期性结构使入射平面旋转到不同的方位角方向。 仪器可以集成在晶片工艺工具中，其中可以以任意取向提供晶片。

公开(公告)号：US20030016358A1

公开(公告)日：2003-01-23

申请号：US10180193

申请日：2002-06-26

Applicant: Matsushita Electric Industrial Co., Ltd.

Inventor： Takeshi Nagashima ,  Masanori Hangyo ,  Kouichi Hiranaka

IPC: G01J004/00

CPC classification number: G01N21/3581 ,  G01J4/04 ,  G01N21/21 ,  G01N21/3586

Abstract: A time domain polarization analyzing apparatus that is able to derive the complex optical constant spectrum in the terahertz region of a sample without necessitating any reference measurement will be proposed. The polarization analyzing apparatus of the present invention has: a light source for generating optical pulses; a light dividing part for dividing optical pulses emitted from the light source; an electromagnetic wave radiation part for inputting one of divided optical pulses and radiating electromagnetic wave; a collimation part for collimating the radiated electromagnetic wave; a polarizer part for inputting the collimated electromagnetic wave and letting polarized electromagnetic wave pass therethrough, and also capable of switching over its polarization plane; a light analyzer part for inputting the polarized electromagnetic wave reflected from a sample and letting the polarized electromagnetic wave component pass therethrough; a condenser part for condensing the passing polarized electromagnetic wave component; an optical time-delay part for variably causing a time-delay in the other divided optical pulses; and an electromagnetic wave detector part for inputting the condensed polarized electromagnetic wave component and the time-delayed optical pulses and converting the condensed polarized electromagnetic wave component into an electrical signal.

Abstract translation: 将提出能够在不需要任何参考测量的情况下导出样品的太赫兹区域中的复数光学常数谱的时域偏振分析装置。 本发明的极化分析装置具有：产生光脉冲的光源; 光分离部，用于分割从所述光源发射的光脉冲; 用于输入划分的光脉冲和辐射电磁波的电磁波辐射部分; 用于准直辐射电磁波的准直部分; 用于输入准直电磁波并使极化电磁波通过的偏振器部件，并且还能够切换其偏振面; 光分析器部，用于输入从样品反射的极化电磁波，使极化电磁波分量通过; 用于冷凝经过的极化电磁波分量的电容器部分; 光学时间延迟部分，用于可变地在其它划分的光脉冲中引起时间延迟; 以及用于输入聚光偏振电磁波分量和时间延迟光脉冲并将聚光偏振电磁波分量转换成电信号的电磁波探测器部分。

公开(公告)号：US20030007152A1

公开(公告)日：2003-01-09

申请号：US10153029

申请日：2002-05-21

Applicant: Symyx Technologies, Inc.

Inventor： Eric W. McFarland ,  Earl Danielson ,  William Archibald

IPC: G01J004/00

CPC classification number: G01N21/6402 ,  B01J19/0046 ,  B01J2219/00315 ,  B01J2219/00317 ,  B01J2219/00364 ,  B01J2219/00378 ,  B01J2219/0043 ,  B01J2219/00443 ,  B01J2219/00497 ,  B01J2219/005 ,  B01J2219/00511 ,  B01J2219/00515 ,  B01J2219/0052 ,  B01J2219/00527 ,  B01J2219/00536 ,  B01J2219/00583 ,  B01J2219/00585 ,  B01J2219/0059 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00621 ,  B01J2219/00641 ,  B01J2219/00659 ,  B01J2219/00675 ,  B01J2219/00689 ,  B01J2219/00702 ,  B01J2219/00722 ,  B01J2219/00738 ,  B01J2219/00745 ,  B01J2219/00747 ,  B01J2219/0075 ,  B01J2219/00754 ,  B82Y30/00 ,  C07F15/0066 ,  C07F15/045 ,  C08F10/00 ,  C40B30/08 ,  C40B40/14 ,  C40B40/18 ,  C40B50/14 ,  C40B60/14 ,  G01J4/00 ,  G01N21/6452 ,  G01N29/036 ,  G01N29/2418 ,  G01N29/348 ,  G01N29/4427 ,  G01N2291/106 ,  C08F4/70

Abstract: Methods and apparatus for screening diverse arrays of materials are provided. In particular, techniques for rapidly characterizing compounds in arrays of materials in order to discover and/or optimize new materials with specific desired properties are provided. The substrate can be screened for materials having useful properties, and/or the resulting materials can be ranked, or otherwise compared, for relative performance with respect to useful properties or other characterizations. In particular, systems and methods are provided for screening a library of magnetic materials for their bulk magnetization, saturation magnetization, and coercivity by imaging their individual optical Kerr rotation, screening a library of dielectric materials for their dielectric coefficients by imaging their individual electro-optical rotation and screening a library of luminescent materials by imaging their individual luminescent properties under a variety of excitation conditions. Optical or visible luminescence systems are also provided as well as their application to screening libraries of different materials.

公开(公告)号：US20030007151A1

公开(公告)日：2003-01-09

申请号：US09894250

申请日：2001-06-27

Inventor： John Eckert

IPC: G01J004/00

CPC classification number: G01J4/04

Abstract: Source light of unknown polarization is input into a polarization controller. The polarization controller transforms the polarization of the source light to a plurality of different polarizations. The transformed source light output by the polarization controller is input to a fixed polarizer, which passes a maximal transmitted intensity of the transformed source light at a given transformation perpendicular to an axis of propagation of the source light. The polarizer passes a minimal transmitted intensity of the transformed source light at a transformation orthogonal to the transformation at which the maximal transmitted intensity is passed. The discriminated transformed source light output by the fixed polarizer is input to a light-wave power meter, which measures the intensity thereof. The maximal and minimal measured transmitted intensities of the discriminated transformed source light can be used to determine the DOP of the source light. In the alternative, Mueller calculus can be used to determine the degree of polarization when at least four polarization transformations are performed by the polarization controller and angles by which a half-wave plate and a quarter-wave plate of the polarization controller are rotated are known.

Abstract translation: 未知极化的源光被输入到偏振控制器中。 偏振控制器将源极的偏振变换为多个不同的偏振。 由偏振控制器输出的经变换的光源被输入到固定的偏振器，其以垂直于源光的传播轴的给定变换通过变换的源光的最大透射强度。 偏振器以与通过最大透射强度的变换正交的变换通过变换源光的最小透射强度。 由固定偏振器输出的识别变换源光输入到测量其强度的光波功率计。 鉴别变换源光的最大和最小测量透射强度可用于确定源光的DOP。 另一方面，当偏振控制器进行至少四个偏振变换和偏振控制器的半波片和四分之一波片旋转的角度时，可以使用米勒微积分来确定偏振度 。

公开(公告)号：US20030002041A1

公开(公告)日：2003-01-02

申请号：US10147143

申请日：2002-05-15

Inventor： Jens Peupelmann ,  Egbert Krause ,  Adalbert Bandemer

IPC: G01J004/00

CPC classification number: G02B6/274 ,  G01J4/00 ,  G02B6/02109 ,  G02B6/276 ,  G02B6/2766 ,  G02B6/29317

Abstract: A fiber polarimeter has one or more oblique fiber Bragg gratings disposed one behind the other in a fiber. The fiber Bragg gratings couple out portions of a light wave input to the fiber depending on its polarization. For more than one fiber Bragg grating a wave plate is disposed in the fiber between consecutive fiber Bragg gratings. The portions of the light wave from the fiber Bragg grating(s) are detected to produce measurement data that is used to calculate four Stokes parameters for determining polarization, degree of polarization and/or power of the light wave.

公开(公告)号：US20020196438A1

公开(公告)日：2002-12-26

申请号：US10157936

申请日：2002-05-31

Inventor： Harald Kerschbaumer ,  Walter Pokorny ,  Gottfried Rohner ,  Graham Pye

IPC: G01J003/28 ,  G01J004/00

CPC classification number: G01J3/50 ,  A61B1/24 ,  G01J3/0224 ,  G01J3/0272 ,  G01J3/508

Abstract: A light analyzer with a first light source configured and disposed for irradiating with a first light an object disposed at an object location. A second light source is configured and disposed for irradiating the object with a second light that is preferably polarized along a first axis. A light receiving element is configured and disposed for receiving the first and second light reflected from the object and comprising a sensing device that is configured for sensing and producing an image corresponding to the reflected light. The light receiving element preferably comprises a polarizing filter configured for polarizing the reflected second light along a second axis at an angle to the first axis for reducing glare and reflection.

Abstract translation: 一种具有第一光源的光分析器，其被配置和设置成用于照射设置在物体位置处的物体的第一光。 第二光源被配置和设置成用第二光照射物体，该第二光优选地沿着第一轴线极化。 光接收元件被配置和布置成用于接收从物体反射的第一和第二光，并且包括被配置为感测并产生对应于反射光的图像的感测装置。 光接收元件优选地包括偏振滤光器，其被配置为使得反射的第二光沿着与第一轴线成一定角度的第二轴线偏振，以减少眩光和反射。