Method and apparatus for phase correction of position and detection signals in scanning microscopy, and scanning microscope
    92.
    发明授权
    Method and apparatus for phase correction of position and detection signals in scanning microscopy, and scanning microscope 有权
    扫描显微镜下位置和检测信号相位校正的方法和装置,以及扫描显微镜

    公开(公告)号:US06677579B2

    公开(公告)日:2004-01-13

    申请号:US09920311

    申请日:2001-08-03

    CPC classification number: G02B21/008 G02B21/0072 G02B21/0084

    Abstract: A method and an apparatus for phase correction of position and detection signals in scanning microscopy. The method includes generation of a position signal from the position of a beam deflection device (7) and generation, from the light (17) proceeding from the specimen (15), of a detection signal pertinent to the position signal. The position signal and detection signal are then transferred to a processing unit (23). In the processing unit (23), a correction value is determined. The correction value is transferred to a computer (34) to compensate for time differences between the position signal and detection signal.

    Abstract translation: 一种用于扫描显微镜中位置和检测信号的相位校正的方法和装置。 该方法包括从光束偏转装置(7)的位置产生位置信号,并从与样本(15)进行的光(17)产生与位置信号相关的检测信号。 然后,位置信号和检测信号被传送到处理单元(23)。 在处理单元(23)中,确定校正值。 校正值被传送到计算机(34)以补偿位置信号和检测信号之间的时间差。

    High speed confocal microscope
    93.
    发明授权

    公开(公告)号:US06642504B2

    公开(公告)日:2003-11-04

    申请号:US09814197

    申请日:2001-03-21

    CPC classification number: G02B27/0025 G02B21/004 G02B21/0084

    Abstract: An improved confocal microscope utilizes an array of light sources imaged onto an object, and an array of small detectors to detect the light from each source. Cross talk between the beams of light is prevented by temporally modulating the sources at different frequencies. Light from one source is temporally modulated at a first frequency, for example in the megahertz region. A reference signal at the same frequency plus an offset frequency is also sent to the detector assigned to that source. The detected signal and the reference signal are then beat together, and heterodyne detection is used to detect only the light from the assigned source, which will beat with the reference signal and produce a signal at the offset frequency. Light from other sources beat with the reference signal to produce different frequency beat signals, which are filtered out using bandpass filters.

    Measurement and correction of a scan line length error
    94.
    发明授权
    Measurement and correction of a scan line length error 失效
    扫描线长度误差的测量和校正

    公开(公告)号:US06635864B2

    公开(公告)日:2003-10-21

    申请号:US09905277

    申请日:2001-07-13

    Applicant: B. Mark Hirst

    Inventor: B. Mark Hirst

    Abstract: A method for determining a scan line error for a scan line, wherein the scan line is produced from one of a plurality of facets of a rotating reflector of a scanning device. The method comprises the steps of (a) determining a difference between a time of an occurrence of a point in a scan line produced from a first facet and a time of an occurrence of a point in a scan line produced from a second facet, and (b) determining from the difference, a scan line error for the scan line produced from the first facet.

    Abstract translation: 一种用于确定扫描线的扫描线误差的方法,其中扫描线由扫描装置的旋转反射器的多个面中的一个产生。 该方法包括以下步骤:(a)确定从第一面产生的扫描线中的点的发生时间与从第二面产生的扫描线中的点的出现时间之间的差异,以及 (b)根据该差异确定从第一面产生的扫描线的扫描线误差。

    Apparatus for optoelectronically determining power using a light source being of annular design
    95.
    发明授权
    Apparatus for optoelectronically determining power using a light source being of annular design 失效
    使用环形设计的光源光电确定功率的装置

    公开(公告)号:US06563109B1

    公开(公告)日:2003-05-13

    申请号:US09726298

    申请日:2000-11-27

    Inventor: Jürgen Kösters

    CPC classification number: G01L3/12 G01L3/242

    Abstract: The present invention provides an apparatus for optoelectronically determining power for a moving machine element. The apparatus includes two parallel coding discs which are mounted on the machine element and each have grid lines or light windows distributed over their circumference. A light source is arranged on one side of the coding discs and has an associated light meter on the opposite side of the discs. The light source and the light meter are preferably of an annular design in order to transilluminate all the light windows to a largely uniform degree. A diffusion disc is arranged in the beam path between the light source and the coding discs and a light barrier is mounted outside the region of the light windows. At least one of the light windows on one of the coding discs is formed in the beam path of the light barrier and a translucent endless zone is formed on the other of the parallel coding discs.

    Abstract translation: 本发明提供了一种用于光电确定移动机器元件的功率的装置。 该装置包括两个平行编码盘,它们安装在机器元件上,并且每个具有分布在其圆周上的网格线或光窗口。 光源设置在编码盘的一侧,并且在光盘的相对侧上具有相关联的光度计。 光源和光计优选为环形设计,以便将所有的光窗透光到大致均匀的程度。 扩散盘布置在光源和编码盘之间的光束路径中,并且光栅被安装在光窗口的区域的外部。 其中一个编码盘上的光窗中的至少一个形成在光栅的光束路径中,并且在另一个并行编码盘上形成半透明的环形区。

    Device and method for combining scanning and imaging methods in checking photomasks

    公开(公告)号:US06552331B2

    公开(公告)日:2003-04-22

    申请号:US09923703

    申请日:2001-08-06

    Inventor: Christian Rotsch

    CPC classification number: G01Q30/025 G01Q40/00 G03F1/84 Y10S977/869

    Abstract: An apparatus and method for imaging and scanning masks for semiconductor production includes placing a scanning instrument having a probe at a position to scan a layer side of a mask with the probe, placing an optical microscope on a side of the mask opposite the layer side at a position to image a detail of the mask from the side of the mask opposite the layer side, positioning the scanning instrument and the optical microscope relative to each other such that the optical microscope images the probe and the mask simultaneously, and laterally displacing the mask between and relative to the scanning instrument and the optical microscope to permit selection of an imaged detail of the mask while a relative position between the scanning instrument and the optical microscope is maintained. A selected detail of the mask is imaged and/or scanned.

    Process and device for reading radiation image information stored on an image medium by detecting both the luminescent light emitted and the reflected read out light
    97.
    发明授权
    Process and device for reading radiation image information stored on an image medium by detecting both the luminescent light emitted and the reflected read out light 失效
    通过检测发出的发光和反射的读出光来读取存储在图像介质上的放射线图像信息的处理和装置

    公开(公告)号:US06518564B1

    公开(公告)日:2003-02-11

    申请号:US09601370

    申请日:2000-09-07

    CPC classification number: G01T1/2014

    Abstract: The invention relates to a method and a device for reading out radiation image information stored on an image medium (12). A scanning unit (10) has a laser (16) for scanning the image medium (12) with a readout light beam (22). The read/processing device (14) functions with two channels so that the luminescent light emitted by the image medium (12) during scanning and also the reflected read-out light are synchronously detected, evaluated and correlated. The digital luminescent light image values are corrected according to the digital reflection light values in order to better obtain the radiation image information.

    Abstract translation: 本发明涉及一种用于读出存储在图像介质(12)上的辐射图像信息的方法和装置。 扫描单元(10)具有用读取光束(22)扫描图像介质(12)的激光器(16)。 读/处理装置(14)具有两个通道的功能,使得在扫描期间由图像介质(12)发射的发光光以及反射的读出光同步地被检测,评估和相关。 根据数字反射光值校正数字荧光光图像值,以便更好地获得辐射图像信息。

    Nano-pattern lithographic fabrication using pulled micro-pipette and method thereof
    100.
    发明授权
    Nano-pattern lithographic fabrication using pulled micro-pipette and method thereof 失效
    使用拉伸微量移液管的纳米图案光刻制造及其方法

    公开(公告)号:US06476381B1

    公开(公告)日:2002-11-05

    申请号:US09443051

    申请日:1999-11-18

    Abstract: A nano-pattern lithographic fabrication apparatus for fabricating a fine pattern using a pulled micro-pipette is disclosed. This apparatus includes a container for receiving a certain solution therein, a container controlling unit for controlling the movement of the container and an ejection of the solution filled in the container, a sample moving unit for supporting and moving the sample, a detector for detecting a distance between the container controlling unit and the sample moving unit, and a controlling unit for receiving a detection signal from the detector and controlling the movement of the container and the sample moving unit and a distance therebetween.

    Abstract translation: 公开了一种使用拉动的微量移液管制造精细图案的纳米图案平版印刷制造装置。 该装置包括用于容纳一定溶液的容器,用于控制容器的移动和填充在容器中的溶液的排出的容器控制单元,用于支撑和移动样品的样品移动单元, 容器控制单元和样品移动单元之间的距离,以及用于从检测器接收检测信号并控制容器和样品移动单元的移动以及它们之间的距离的控制单元。

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