公开(公告)号：US06831267B2

公开(公告)日：2004-12-14

申请号：US09780433

申请日：2001-02-12

Applicant: Kou Ishizuka

Inventor： Kou Ishizuka

IPC: H01J314

CPC classification number: G01D5/38

Abstract: A light beam emitted from a semiconductor-laser light source is projected onto a diffraction-grating scale after passing through a collimator lens, a beam splitter and a central portion of an annular reflection grating. Two diffracted light beams reflected from the diffraction-grating scale are projected onto the annular reflection grating. The annular reflection grating diffracts the light beams projected onto all portions thereon to a substantially original direction to be projected onto and diffracted from the same position on the diffraction-grating scale. The diffracted light beams are superposed and the resultant light beam is returned to the beam splitter. The light beam is guided by the beam splitter in a direction different from the semiconductor-laser light source, and is detected by a photosensor as an interference light beam. Even if the oscillation wavelength of the semiconductor-laser light source changes, for example, due to a change in the temperature environment, to change the diffraction angles of the diffracted light beams, the light beams are diffracted with original diffraction angles by the annular reflection grating, the position of rediffraction by the diffraction-grating scale and the state of emitted light beams are invariable. Hence, the state of interference is stable.

Abstract translation: 从半导体激光光源射出的光束经过准直透镜，分束器和环形反射光栅的中心部分投影到衍射光栅刻度上。 从衍射光栅标尺反射的两个衍射光束被投射到环形反射光栅上。 环形反射光栅将投影到其上的所有部分上的光束衍射到基本上原始的方向上，以投影到衍射光栅标尺上的相同位置并衍射。 衍射光束被重叠，所得到的光束返回到分束器。 光束由分束器沿与半导体激光光源不同的方向引导，并被光电传感器检测为干涉光束。 即使半导体激光光源的振荡波长例如由于温度环境的变化而变化，为了改变衍射光束的衍射角，光束以原始的衍射角被环形反射衍射 光栅，通过衍射光栅标度的再衍射位置和发射光束的状态是不变的。 因此，干扰状态是稳定的。

公开(公告)号：US06803561B2

公开(公告)日：2004-10-12

申请号：US10318457

申请日：2002-12-13

Applicant: John C. Dunfield

Inventor： John C. Dunfield

IPC: H01J314

CPC classification number: G02B26/101 ,  B81C1/00293 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/105 ,  G02B27/017 ,  G02B27/0176

Abstract: A display apparatus includes a scanning assembly that scans about two or more axes, typically in a raster pattern. A plurality of light sources emit light from spaced apart locations toward the scanning assembly such that the scanning assembly simultaneously scans more than one of the beams. The scanning assembly is a resonant scanning assembly with a variable resonant frequency. The resonant frequency of the scanning assembly can be actively controlled by controlling partial pressure of fluids in a package containing the scanning assembly. In one embodiment, the increased partial pressure increases the mass of a scanning mirror, thereby changing the resonant frequency. In another embodiment, a gas absorbing material is coupled to a support arm that carries a scanning mirror. As the gas absorbing material absorbs gas, its physical properties change, thereby shifting the resonant frequency of the scanning assembly. Monitoring the resonant frequency relative to a desired frequency provides in error signal that can be used to frequency lock the resonant scanning assembly to an input signal.

Abstract translation: 显示装置包括扫描组件，扫描组件通常以光栅图案扫描两个或多个轴。 多个光源从间隔开的位置向扫描组件发射光，使得扫描组件同时扫描多于一个的光束。 扫描组件是具有可变谐振频率的谐振扫描组件。 可以通过控制包含扫描组件的包装中的流体的分压来主动地控制扫描组件的共振频率。 在一个实施例中，增加的分压增加了扫描镜的质量，从而改变了谐振频率。 在另一个实施例中，气体吸收材料连接到承载扫描反射镜的支撑臂。 当气体吸收材料吸收气体时，其物理性质改变，从而移动扫描组件的共振频率。 监测相对于期望频率的谐振频率提供了可用于将谐振扫描组件频率锁定到输入信号的误差信号。

公开(公告)号：US06700114B2

公开(公告)日：2004-03-02

申请号：US10150073

申请日：2002-05-20

Applicant: Tamotsu Mizuno ,  Takamoto Watanabe ,  Katsuji Kosaka ,  Yoshiaki Hoashi

Inventor： Tamotsu Mizuno ,  Takamoto Watanabe ,  Katsuji Kosaka ,  Yoshiaki Hoashi

IPC: H01J314

CPC classification number: G02B26/105

Abstract: A system working to detect a reciprocating motion of an object such as a scanner mirror of an optical scanner. The system is designed to compensate for an error which is concluded in an amplified sensor signal used to determine a reference position of the scanner mirror and which is sensitive to a change in environmental condition of use such as a change in ambient temperature. The system also works to monitor a change in amplitude of swing of the scanner mirror accurately to keep it constant.

Abstract translation: 一种用于检测物体（例如光学扫描仪的扫描镜）的往复运动的系统。 该系统被设计为补偿用于确定扫描器反射镜的参考位置的放大的传感器信号中所确定的误差，并且其对使用环境条件的变化（例如环境温度的变化）敏感。 该系统还可以准确地监测扫描仪镜的摆幅幅度变化，以保持其恒定。

公开(公告)号：US06686586B2

公开(公告)日：2004-02-03

申请号：US09816642

申请日：2001-03-23

Applicant: Frank Check

Inventor： Frank Check

IPC: H01J314

CPC classification number: G01J1/32 ,  G02B26/106 ,  H01S5/0612 ,  H01S5/0687

Abstract: The improved diffractive-based laser scanning system of the present invention monitors portions of the laser light beams generated by a laser light source (e.g., VLD) employed therein to generate a mode switching signal indicative of a shift in the characteristic wavelength of the laser light beams emitted from the laser light source. In response thereto, a temperature controller selectively heats (or cool) the laser light source to minimize and avoid such wavelength changes, thereby mitigating any potential problems caused by such wavelength changes (for example, unwanted beam distortion and signal processing errors as described above). Preferably, mode switching (e.g., change in characteristic wavelength of light emitted from the laser light source) is detected by monitoring a zeroth diffractive order beam produced by a diffractive element of the system. Moreover, temperature control of the laser light source is preferably accomplished using active heating elements (e.g., a heating resistor) and passive cooling elements (e.g., a heat sink) in thermal contact with the laser light source. In addition, temperature control of the laser light source is preferably accomplished over a heating range (between a minimum heat and maximum heat applied to the laser light source), whereby temperature within this range is approximated by a look-up table. Such a scheme may be implemented by an inexpensive microcontroller, which eliminates the costs for directly measuring the temperature of the laser light source thereby contributing further to a simple and cost-effective design.

Abstract translation: 本发明的改进的基于衍射的激光扫描系统监测由其中使用的激光源（例如，VLD）产生的激光束的部分，以产生表示激光的特征波长偏移的模式切换信号 从激光光源射出的光束。 响应于此，温度控制器选择性地加热（或冷却）激光光源以最小化并避免这种波长变化，从而减轻由这种波长变化（例如，如上所述的不期望的波束失真和信号处理错误）引起的任何潜在问题， 。 优选地，通过监视由系统的衍射元件产生的零级衍射光束来检测模式切换（例如，从激光光源发射的光的特征波长的变化）。 此外，激光光源的温度控制优选使用与激光光源热接触的主动加热元件（例如，加热电阻器）和被动冷却元件（例如，散热器）来实现。 此外，激光光源的温度控制优选在加热范围（施加到激光光源的最小热和最大热之间）之间实现，由此在该范围内的温度由查找表近似。 这种方案可以由廉价的微控制器实现，其消除了直接测量激光光源的温度的成本，从而进一步促成简单和成本有效的设计。

公开(公告)号：US06683319B1

公开(公告)日：2004-01-27

申请号：US10187294

申请日：2002-07-16

Applicant: Steven E. Koenck ,  Stan V. Lyons

Inventor： Steven E. Koenck ,  Stan V. Lyons

IPC: H01J314

CPC classification number: G21K5/10

Abstract: A system and method for providing irradiation to material shapes an electron beam into a profile having a substantially rectangular intensity distribution. The profile is deflected onto the material in a pattern with substantial overlap in a first dimension and without substantial overlap in a second dimension. In an exemplary embodiment, irradiation is provided to the material from first and second opposite sides.

Abstract translation: 用于向材料提供照射的系统和方法将电子束形成具有基本上矩形强度分布的轮廓。 轮廓以第一尺寸具有实质重叠的图案偏转到材料上，而在第二维度上没有实质重叠。 在示例性实施例中，从第一和第二相对侧向材料提供照射。

公开(公告)号：US06653621B2

公开(公告)日：2003-11-25

申请号：US10304724

申请日：2002-11-25

Applicant: David W. Wine ,  Mark P. Helsel ,  Jon D. Barger ,  Clarence T. Tegreene

Inventor： David W. Wine ,  Mark P. Helsel ,  Jon D. Barger ,  Clarence T. Tegreene

IPC: H01J314

CPC classification number: G02B27/0172 ,  G02B26/0841 ,  G02B26/101 ,  G06K7/10633

Abstract: A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to establish the resonant frequency. The material can be removed by laser ablation, etching, or other processing approaches. In another approach, a migratory material is placed on the torsion arm and selectively stimulated to migrate into the torsion arm, thereby changing the mechanical properties of the torsion arm. The changed mechanical properties in turn changes the resonant frequency of the torsion arm. In another approach, symmetrically distributed masses are removed or added in response to a measured resonant frequency to tune the resonant frequency to a desired resonant frequency. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.

Abstract translation: MEM扫描装置具有可变谐振频率。 在一个实施例中，MEM装置包括支撑摆动体的扭转臂。 在一个实施例中，将可移除质量的阵列放置在振荡体的暴露部分上并选择性地去除以建立谐振频率。 材料可以通过激光烧蚀，蚀刻或其他处理方法去除。 在另一种方法中，将迁移材料放置在扭转臂上并选择性地被刺激以迁移到扭转臂中，从而改变扭转臂的机械特性。 改变的机械性能又改变了扭转臂的共振频率。 在另一种方法中，响应于测量的谐振频率去除或添加对称分布的质量，以将谐振频率调谐到期望的谐振频率。 显示装置包括扫描装置和扫描装置扫描关于两个或多个轴，通常以光栅图案扫描。 描述了控制扫描装置的频率响应的各种方法，包括MEMs扫描器的主动控制和无源频率调谐。

公开(公告)号：US06627869B2

公开(公告)日：2003-09-30

申请号：US10131720

申请日：2002-04-24

Applicant: Yasuhiro Tanaka ,  Michihiro Yamagata ,  Tomohiko Sasano

Inventor： Yasuhiro Tanaka ,  Michihiro Yamagata ,  Tomohiko Sasano

IPC: H01J314

CPC classification number: G02B27/0955 ,  G02B27/09 ,  G02B27/0911 ,  G11B7/1378 ,  G11B7/13922 ,  G11B7/1398

Abstract: A beam shaper is made up of a single lens whose both surfaces are toric surfaces. Assuming that directions where the beam divergence angle are larger and smaller in the far field from the semiconductor laser source are referred to as the vertical and horizontal directions, respectively, both of the toric surfaces have aspheric surfaces in a cross-section in the vertical direction, both of the toric surfaces have spherical surfaces in a cross-section in the horizontal direction, and both centers of curvature of the spherical surfaces are located substantially at a luminous point of the semiconductor laser source.

公开(公告)号：US06617572B2

公开(公告)日：2003-09-09

申请号：US09839234

申请日：2001-04-23

Applicant: Koh Ishizuka

Inventor： Koh Ishizuka

IPC: H01J314

CPC classification number: G01D5/38 ,  G01D5/2457 ,  G01D5/36

Abstract: A displacement information detection apparatus includes a light generation unit, a first unit including a first grating for displacement information detection and one or more lens members for original detection, and a second unit including a second grating for displacement detection, which cooperates with the first grating, and an origin detection mark. The apparatus also includes at least one first light-receiving element for receiving light generated by the light generation unit and propagated via the first and second gratings, and outputting a signal including relative displacement information between the first and second units. The apparatus also includes one or more second light-receiving elements for receiving light generated by the light generation unit and propagated via the lens member. The second light-receiving elements output a signal indicating an origin based on a change in light-receiving state when the origin detection mark is present in the optical path of light leaving the lens member.

Abstract translation: 位移信息检测装置包括光生成单元，包括用于位移信息检测的第一光栅和用于原始检测的一个或多个透镜构件的第一单元，以及包括用于位移检测的第二光栅的第二单元，其与第一光栅 ，和原点检测标记。 该装置还包括至少一个第一光接收元件，用于接收由光产生单元产生并经由第一和第二光栅传播的光，并输出包括第一和第二单元之间的相对位移信息的信号。 该装置还包括一个或多个第二光接收元件，用于接收由光产生单元产生的光并经由透镜构件传播。 当原点检测标记存在于离开透镜构件的光的光路中时，第二光接收元件基于光接收状态的变化输出指示原点的信号。

公开(公告)号：US06608301B2

公开(公告)日：2003-08-19

申请号：US09920388

申请日：2001-07-31

Applicant: Rong-Ji Liu ,  Kuo-Jeng Wang ,  Tom-Chin Chang

Inventor： Rong-Ji Liu ,  Kuo-Jeng Wang ,  Tom-Chin Chang

IPC: H01J314

CPC classification number: H04N1/486

Abstract: A single step multi-section exposure scanning method for a scanner. The scanner includes a photo-sensor and a stepper motor. The photo-sensor has N rows of sensor cells that correspond to each primary color. The scanning device is driven forward an exposure distance for each revolution of the stepper motor. The single step multi-section exposure scanning method includes the following steps. First, the photo-sensor moves forward one exposure distance. One row of sensor cells is exposed after moving every 1/Nth of the exposure distance. Thereafter, analogue voltages obtained through the exposed row of sensor cells are transmitted to an analogue/digital converter. The above process is repeated until the entire document is scanned.

公开(公告)号：US06580066B2

公开(公告)日：2003-06-17

申请号：US09938581

申请日：2001-08-27

Applicant: Takahisa Uehira ,  Toshihiko Kuga

Inventor： Takahisa Uehira ,  Toshihiko Kuga

IPC: H01J314

CPC classification number: G01R19/0053

Abstract: A measurement signal generating circuit for a linear scale capable of increasing an Signal-to-Noise (S/N) ratio, wherein S stands for Corona signal strength, and N for noise strength ratio of a signal for measurement of a linear scale. A photo detector or a low-pass filter for removing noise entering the measurement signal generating circuit is arranged rearwardly of each of an A phase signal generating circuit and a B phase signal generating circuit. Such construction permits a noise component at a different phase as well as that at the same phase to be effectively removed during synthesis of the measurement signal, to thereby reduce an error in measuring by the linear scale.

Abstract translation: 一种能够提高信噪比（S / N）比的线性刻度的测量信号发生电路，其中S代表电晕信号强度，N表示用于测量线性标尺的信号的噪声强度比。 用于去除进入测量信号产生电路的噪声的光检测器或低通滤波器布置在A相信号发生电路和B相信号发生电路中的每一个的后面。 这样的结构允许在合成测量信号期间在不同相位处的噪声分量以及相同相位处的噪声分量被有效地去除，从而减少线性刻度的测量误差。