公开(公告)号：US5605600A

公开(公告)日：1997-02-25

申请号：US402378

申请日：1995-03-13

Applicant: Karl P. Muller ,  Klaus B. Roithner ,  Bernhard Poschenrieder ,  Toru Watanabe

Inventor： Karl P. Muller ,  Klaus B. Roithner ,  Bernhard Poschenrieder ,  Toru Watanabe

IPC: C23F4/00 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/308 ,  H01L21/8242 ,  H01L27/108

CPC classification number: H01L21/3083 ,  H01L21/3065

Abstract: In a method of etch profile shaping through wafer temperature control during an etch process wherein deposition of a passivation film is temperature dependent, a gap between a semiconductor wafer to be etched and a cathode is pressurized at a first pressure, and the pressure in the gap is changed to a second pressure at a predetermined time during the etch process, thereby altering heat transfer from the semiconductor wafer to the cathode. The temperature of the wafer is adjusted one or more times during an etching process to control profile shaping of deep trenches, contact holes and shapes for mask opening shaping during the etch process.

Abstract translation: 在蚀刻过程中通过晶片温度控制的蚀刻轮廓整形的方法中，其中钝化膜的沉积是温度依赖性的，要蚀刻的半导体晶片与阴极之间的间隙在第一压力下被加压，并且间隙中的压力 在蚀刻工艺期间在预定时间改变为第二压力，从而改变从半导体晶片到阴极的热传递。 在蚀刻过程期间，晶片的温度调整一次或多次，以控制在蚀刻工艺期间用于掩模开口成形的深沟槽，接触孔和形状的轮廓成形。

公开(公告)号：US5431794A

公开(公告)日：1995-07-11

申请号：US130199

申请日：1993-11-05

Applicant: Shigeo Matsumaru ,  Toru Watanabe ,  Akira Kubotsu ,  Shuichi Nogawa ,  Kiyoshi Ogata ,  Daisuke Inoue

Inventor： Shigeo Matsumaru ,  Toru Watanabe ,  Akira Kubotsu ,  Shuichi Nogawa ,  Kiyoshi Ogata ,  Daisuke Inoue

IPC: C23C14/20 ,  C23C14/34

CPC classification number: C23C14/20 ,  Y10S428/913 ,  Y10T428/31692

Abstract: A metal film high in reflectivity and excellent in adhesion to a synthetic resin substrate even in the case where the metal film is sufficiently thin, is formed on a surface of the substrate by sputtering a metal target by ions through an inert gas plasma in a vacuum vessel, wherein the substrate is covered with an electrostatic shield during the sputtering.

Abstract translation: 通过在真空中通过惰性气体等离子体溅射金属靶，在基板的表面上形成即使在金属膜足够薄的情况下，反射率高且对合成树脂基板的粘附性也优异的金属膜 容器，其中在溅射期间衬底被静电屏蔽覆盖。

公开(公告)号：US5429730A

公开(公告)日：1995-07-04

申请号：US144414

申请日：1993-11-02

Applicant: Hiroko Nakamura ,  Haruki Komano ,  Kazuyoshi Sugihara ,  Keiji Horioka ,  Mitsuyo Kariya ,  Soichi Inoue ,  Ichiro Mori ,  Katsuya Okumura ,  Tadahiro Takigawa ,  Toru Watanabe ,  Motosuke Miyoshi ,  Yuichiro Yamazaki ,  Haruo Okano

Inventor： Hiroko Nakamura ,  Haruki Komano ,  Kazuyoshi Sugihara ,  Keiji Horioka ,  Mitsuyo Kariya ,  Soichi Inoue ,  Ichiro Mori ,  Katsuya Okumura ,  Tadahiro Takigawa ,  Toru Watanabe ,  Motosuke Miyoshi ,  Yuichiro Yamazaki ,  Haruo Okano

IPC: B05D5/00 ,  C23C16/04 ,  G03F1/00 ,  G03F1/26 ,  G03F1/74 ,  C23C14/34 ,  B05D3/06 ,  B44C1/22

CPC classification number: G03F1/74 ,  B05D5/005 ,  C23C16/047 ,  G03F1/26

Abstract: According to this invention, there is provided a method of repairing a bump defect of a structure obtained by forming a predetermined pattern on a substrate, having the steps of forming a first thin film consisting of a material different from that of the substrate on the substrate around the bump defect or close to the bump defect, forming a second thin film on the bump defect and the first thin film to flatten an upper surface of the second thin film, performing simultaneous removal of the bump defect and the thin films on an upper portion of the projecting defect and around the bump defect using a charged particle beam, and performing removal of the thin films left in the step of performing simultaneous removal.

Abstract translation: 根据本发明，提供了一种修复通过在基板上形成预定图案而获得的结构的凸点缺陷的方法，该方法具有以下步骤：在基板上形成由不同于基板的材料构成的第一薄膜 在凸起缺陷附近或接近凸块缺陷的情况下，在凸起缺陷上形成第二薄膜和使第一薄膜平坦化第二薄膜的上表面，同时去除凸起缺陷和上部的薄膜 使用带电粒子束的突出缺陷的一部分和凸起缺陷周围，并且执行在执行同时移除的步骤中留下的薄膜的去除。

公开(公告)号：USD331039S

公开(公告)日：1992-11-17

申请号：US525395

申请日：1990-05-18

Applicant: Toru Watanabe

Designer： Toru Watanabe

公开(公告)号：US5146047A

公开(公告)日：1992-09-08

申请号：US665964

申请日：1991-03-07

Applicant: Kouji Nagata ,  Minoru Sugita ,  Keisuke Kida ,  Toru Watanabe ,  Ken'yo Matsushita

Inventor： Kouji Nagata ,  Minoru Sugita ,  Keisuke Kida ,  Toru Watanabe ,  Ken'yo Matsushita

IPC: C04B22/00 ,  C08K9/10 ,  E04B1/92 ,  H05K9/00

CPC classification number: H05K9/0003 ,  C04B22/002 ,  C08K9/10 ,  E04B1/92

Abstract: The electric-wave absorbing material for construction includes a medium and a large number of electric-wave absorbing particles dispersed therein. The particles are in the form of capsules filled with water. The electric-wave absorbing material for construction may be made of a construction material having provided thereon an electric-wave absorbing layer which includes such electric-wave absorbing particles.

Abstract translation: 用于构造的电波吸收材料包括分散在其中的介质和大量的电波吸收颗粒。 颗粒是充满水的胶囊形式。 用于构造的电波吸收材料可以由其上设置有包括这种电波吸收颗粒的电波吸收层的构造材料制成。

公开(公告)号：US5064996A

公开(公告)日：1991-11-12

申请号：US559365

申请日：1990-07-30

Applicant: Toru Watanabe

Inventor： Toru Watanabe

IPC: F27D99/00 ,  H05B3/64

CPC classification number: F27D99/0006 ,  H05B3/64

Abstract: An electric furnace wherein a belt-like heating member in the shape of zigzag or wave is wound helically on the inner surface of a cylindrical heat insulating member and portions of the inner surface of the belt-like heating member are covered with portions of the heat insulating member, so that the heating member is held securely by the heat insulating member.

Abstract translation: 一种电炉，其形状为锯齿状或波浪形的带状加热构件螺旋地卷绕在圆筒形绝热构件的内表面上，带状加热构件的内表面的一部分被部分热量覆盖 绝热构件，使得加热构件被绝热构件牢固地保持。

公开(公告)号：US10468607B2

公开(公告)日：2019-11-05

申请号：US14237764

申请日：2012-08-02

Applicant: Koji Takaku ,  Tetsu Kitamura ,  Wataru Sotoyama ,  Yasunori Yonekuta ,  Toru Watanabe ,  Toshihiro Ise ,  Saki Takada

Inventor： Koji Takaku ,  Tetsu Kitamura ,  Wataru Sotoyama ,  Yasunori Yonekuta ,  Toru Watanabe ,  Toshihiro Ise ,  Saki Takada

IPC: H01L51/00 ,  C07D403/04 ,  C07D405/04 ,  C07D471/04 ,  C07D487/04 ,  C07D491/052 ,  C07D491/16 ,  C07D209/86 ,  C07D209/88 ,  C09K11/06 ,  H05B33/10 ,  H01L51/50

Abstract: An organic electroluminescent element including a substrate, a pair of electrodes including an anode and a cathode, disposed on the substrate, and at least one organic layer including a light emitting layer, disposed between the electrodes, in which the organic layer includes a compound represented by the following general formula (1), has high luminous efficiency, excellent blue color purity, and a small change in the chromaticity due to deterioration by driving, wherein Cy, Dn1, Ac1, L1, L2, L3, ring Z1, u1, q1, n1, m1, A11, and A12 are as defined herein.

公开(公告)号：US09876175B2

公开(公告)日：2018-01-23

申请号：US14239696

申请日：2012-08-06

Applicant: Koji Takaku ,  Tetsu Kitamura ,  Toru Watanabe ,  Yosuke Yamamoto ,  Kimiatsu Nomura ,  Wataru Sotoyama ,  Saki Takada ,  Toshihiro Ise

Inventor： Koji Takaku ,  Tetsu Kitamura ,  Toru Watanabe ,  Yosuke Yamamoto ,  Kimiatsu Nomura ,  Wataru Sotoyama ,  Saki Takada ,  Toshihiro Ise

IPC: H01L51/00 ,  H05B33/14 ,  H01L51/50 ,  C07D209/56

CPC classification number: H01L51/0056 ,  C07D209/56 ,  C09K2211/1011 ,  C09K2211/1014 ,  C09K2211/1029 ,  C09K2211/1088 ,  H01L51/0058 ,  H01L51/006 ,  H01L51/0061 ,  H01L51/0072 ,  H01L51/0073 ,  H01L51/0074 ,  H01L51/50 ,  H01L51/5012 ,  H05B33/14

Abstract: An organic electroluminescent element including a substrate, a pair of electrodes including an anode and a cathode, disposed on the substrate, and at least one organic layer including a light emitting layer, disposed between the electrodes, in which a compound represented by the following formula (I) is contained in any layer of the at least one organic layer. The organic electroluminescent element has high luminous efficiency and a strong effect of improving the durability by driving aging: wherein X, A1, A2, A3, A4, and R1 to R8 are as defined herein.

公开(公告)号：US09608207B2

公开(公告)日：2017-03-28

申请号：US14110630

申请日：2012-04-11

Applicant: Koji Takaku ,  Tetsu Kitamura ,  Toru Watanabe ,  Yasunori Yonekuta

Inventor： Koji Takaku ,  Tetsu Kitamura ,  Toru Watanabe ,  Yasunori Yonekuta

IPC: H01L51/00 ,  C07C13/62 ,  C07C25/22 ,  C07D213/74 ,  C07D239/22 ,  C07D295/04 ,  C07D307/77 ,  C07D333/50 ,  C07D333/78 ,  C07D487/06 ,  C07D493/06 ,  C07D495/06 ,  C09K11/06 ,  C07C211/61 ,  C07B59/00 ,  C07F7/08 ,  H01L51/50 ,  C07C33/26 ,  C09B57/00 ,  C09B1/00

CPC classification number: H01L51/0067 ,  C07B59/001 ,  C07B2200/05 ,  C07C13/62 ,  C07C25/22 ,  C07C33/26 ,  C07C211/61 ,  C07C2603/54 ,  C07D213/74 ,  C07D239/22 ,  C07D295/04 ,  C07D307/77 ,  C07D333/50 ,  C07D333/78 ,  C07D487/06 ,  C07D493/06 ,  C07D495/06 ,  C07F7/0807 ,  C09B1/00 ,  C09B57/00 ,  C09B57/001 ,  C09K11/06 ,  C09K2211/1011 ,  C09K2211/1022 ,  C09K2211/1033 ,  C09K2211/1044 ,  C09K2211/1088 ,  C09K2211/1092 ,  C09K2211/1096 ,  H01L51/0056 ,  H01L51/0058 ,  H01L51/006 ,  H01L51/0061 ,  H01L51/0071 ,  H01L51/0072 ,  H01L51/0073 ,  H01L51/0074 ,  H01L51/0094 ,  H01L51/50 ,  H01L51/5012

Abstract: An organic electroluminescence element that uses a compound expressed by the following general formula has low inter-molecular interaction and high orientation during vapor deposition, and by using compounds that are resistant to aggregation, luminous efficiency is high, and there is little change in chromaticity accompanying drive deterioration (either V1 or W1 and either V2 or W2 form rings, the rings formed by V1 and V2 are six-membered rings, and the rings formed by W1 and W2 are five-membered rings; A2 to A4 and A6 to A8 represent CRZ or N, and RZ represents a hydrogen atom or a substituent; and R2, R3, R7, and R8 represent a hydrogen atom, an alkyl group, an aryl group, a heteroaryl group, a fluorine atom, a hydrogen atom [sic], or a deuterium atom.).

公开(公告)号：US09133118B2

公开(公告)日：2015-09-15

申请号：US13522180

申请日：2010-12-28

Applicant: Tetsu Kitamura ,  Toru Watanabe ,  Toshihiro Ise

Inventor： Tetsu Kitamura ,  Toru Watanabe ,  Toshihiro Ise

IPC: H01L51/50 ,  C07D209/86 ,  C09K11/06 ,  H01L51/00 ,  H01L51/52

CPC classification number: C07D209/86 ,  C09K11/06 ,  C09K2211/1007 ,  C09K2211/1011 ,  C09K2211/1014 ,  C09K2211/1029 ,  H01L51/0037 ,  H01L51/0072 ,  H01L51/0081 ,  H01L51/0085 ,  H01L51/0087 ,  H01L51/0094 ,  H01L51/5016 ,  H01L51/5096 ,  H01L51/5268

Abstract: Provided is an organic electroluminescence device having excellent light emission efficiency and durability. Furthermore, provided is an organic electroluminescence device having a low driving voltage, a small change in chromaticity when driving at high luminance, a small change in chromaticity by aging and a small voltage rise by aging.An organic electroluminescence device including a pair of electrodes composed of an anode and a cathode, a light emitting layer between the electrodes and an organic layer which is adjacent to the light emitting layer between the light emitting layer and the cathode, on a substrate, whereto the the light emitting layer contains at least one compound having a carbazole structure and the organic layer adjacent to the light emitting layer contaions at least one hydrocarbon compound having a specific structure.

Abstract translation: 提供了发光效率和耐久性优异的有机电致发光元件。 此外，提供了具有低驱动电压，在高亮度驱动时的色度变化小，老化引起的色度变化小，并且老化的电压上升小的有机电致发光元件。 一种有机电致发光器件，包括由阳极和阴极构成的一对电极，电极之间的发光层和与发光层和阴极之间的发光层相邻的有机层，在基板上， 发光层含有至少一种具有咔唑结构的化合物，并且与发光层相邻的有机层包含至少一种具有特定结构的烃化合物。