公开(公告)号：US08855399B2

公开(公告)日：2014-10-07

申请号：US13368306

申请日：2012-02-07

Applicant: Zvi Goren ,  Nir Ben-David Dodzin

Inventor： Zvi Goren ,  Nir Ben-David Dodzin

IPC: G06K9/00

CPC classification number: G06T7/0008 ,  G01B11/14 ,  G01N21/9501 ,  G01N2201/10 ,  G01N2201/125 ,  G01N2201/127 ,  G06T7/32 ,  G06T2207/30148

Abstract: A system for location based wafer analysis, the system comprising: (i) a first input interface; (ii) a second input interface; (iii) a correlator; and (iv) a processor, configured to generate inspection results for the inspected wafer, with the help of at least one frame run-time displacement.

Abstract translation: 一种用于基于位置的晶片分析的系统，所述系统包括：（i）第一输入接口; （ii）第二输入接口; （iii）相关器; 以及（iv）处理器，被配置为通过至少一个帧运行时位移来产生检查的晶片的检查结果。

公开(公告)号：US08805033B2

公开(公告)日：2014-08-12

申请号：US13976177

申请日：2011-11-02

Applicant: Edward Miesak ,  V. Edward Gold

Inventor： Edward Miesak ,  V. Edward Gold

IPC: G06K9/00 ,  G06K7/00 ,  G06K9/74

CPC classification number: G06K9/00033 ,  G01N21/8851 ,  G01N21/94 ,  G01N2201/06113 ,  G01N2201/10 ,  G06K9/00013 ,  G06K9/2036

Abstract: This document relates to systems and method for latent fingerprint detection using specular reflection (glare). An exemplary system may include a light source alignment portion configured to align a light source at an illumination angle relative to a sample surface such that the light source illuminates a sample surface so that the surface produces specular reflection. The system may also include a specular reflection discriminator that directs the produced specular reflection to an optical detector aligned relative to said sample surface at an alignment angle that is substantially equal to an angle of reflection of the produced specular reflection. Preferably, the directed specular reflection does not saturate the optical detector; and the optical detector captures the specular reflection from the sample surface and generates image data using essentially only the specular reflection.

Abstract translation: 本文件涉及使用镜面反射（眩光）进行潜在指纹检测的系统和方法。 示例性系统可以包括光源对准部分，其配置成相对于样品表面以照明角度对准光源，使得光源照射样品表面，使得表面产生镜面反射。 系统还可以包括镜面反射鉴别器，其将产生的镜面反射引导到相对于所述样品表面对准的光学检测器，该对准角度基本上等于所产生的镜面反射的反射角。 优选地，定向镜面反射不会使光学检测器饱和; 并且光学检测器捕获来自样品表面的镜面反射，并且基本上仅使用镜面反射产生图像数据。

公开(公告)号：US08804110B2

公开(公告)日：2014-08-12

申请号：US13703414

申请日：2011-05-20

Applicant: Yuta Urano ,  Shigenobu Maruyama ,  Toshiyuki Nakao ,  Toshifumi Honda ,  Yukihiro Shibata

Inventor： Yuta Urano ,  Shigenobu Maruyama ,  Toshiyuki Nakao ,  Toshifumi Honda ,  Yukihiro Shibata

IPC: G01N21/00 ,  G01N21/95 ,  G01N21/94 ,  G01N21/956

CPC classification number: G01N21/94 ,  G01N21/47 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4711 ,  G01N2021/8867 ,  G01N2021/8874 ,  G01N2201/0806 ,  G01N2201/10

Abstract: Proposed is a defect inspection method whereby: illuminating light having a substantially uniform illumination intensity distribution in one direction of a sample surface irradiated on the sample surface; multiple scattered light components, which are output in multiple independent directions, are detected among the scattered light from the sample surface and multiple corresponding scattered light detection signals are obtained; at least one of the multiple scattered light detection signals is processed and the presence of defects is determined; at least one of the multiple scattered light detection signals that correspond to each of the points determined by the processing as a defect is processed and the dimensions of the defect are determined; and the position and dimensions of the defect on the sample surface, at each of the points determined as a defect, are displayed.

Abstract translation: 提出了一种缺陷检查方法，其中：照射在样品表面上的样品表面的一个方向具有基本上均匀的照明强度分布的光; 在来自样品表面的散射光中检测多个独立方向输出的多个散射光分量，并获得多个相应的散射光检测信号; 处理多个散射光检测信号中的至少一个并确定缺陷的存在; 处理与通过处理确定的每个点对应的多个散射光检测信号中的至少一个作为缺陷，并确定缺陷的尺寸; 并且显示在被确定为缺陷的每个点处的样品表面上的缺陷的位置和尺寸。

公开(公告)号：US08646110B1

公开(公告)日：2014-02-04

申请号：US13835181

申请日：2013-03-15

Applicant: Xiaoji Xu ,  Gilbert C. Walker

Inventor： Xiaoji Xu ,  Gilbert C. Walker

IPC: G01N13/16 ,  G01N21/35 ,  G01N21/00 ,  G01Q60/24

CPC classification number: G01N21/359 ,  B82Y20/00 ,  G01B9/0203 ,  G01N2201/06113 ,  G01N2201/10 ,  G01Q10/00 ,  G01Q30/02 ,  G01Q60/06 ,  G01Q60/22

Abstract: The present disclosure provides a procedure to obtain the absorption profiles of molecular resonance with ANSOM. The method includes setting a reference field phase to φ=0.5 π relative to the near-field field, and reference amplitude A≧5|αeff|. The requirement on phase precision is found to be

Abstract translation: 本公开提供了获得与ANSOM的分子共振的吸收曲线的程序。 该方法包括将参考场相位设置为相对于近场场的phi =0.5π，参考振幅A> = 5 |αeff|。 相位精度要求为<0.3 pi。 该方法使ANSOM能够以纳米级空间分辨率执行振动光谱。

公开(公告)号：US20130301887A1

公开(公告)日：2013-11-14

申请号：US13976177

申请日：2011-11-02

Applicant: Edward Miesak ,  V. Edward Gold

Inventor： Edward Miesak ,  V. Edward Gold

IPC: G06K9/00

CPC classification number: G06K9/00033 ,  G01N21/8851 ,  G01N21/94 ,  G01N2201/06113 ,  G01N2201/10 ,  G06K9/00013 ,  G06K9/2036

Abstract: This document relates to systems and method for latent fingerprint detection using specular reflection (glare). An exemplary system may include a light source alignment portion configured to align a light source at an illumination angle relative to a sample surface such that the light source illuminates a sample surface so that the surface produces specular reflection. The system may also include a specular reflection discriminator that directs the produced specular reflection to an optical detector aligned relative to said sample surface at an alignment angle that is substantially equal to an angle of reflection of the produced specular reflection. Preferably, the directed specular reflection does not saturate the optical detector; and the optical detector captures the specular reflection from the sample surface and generates image data using essentially only the specular reflection.

Abstract translation: 本文件涉及使用镜面反射（眩光）进行潜在指纹检测的系统和方法。 示例性系统可以包括光源对准部分，其配置成相对于样品表面以照明角度对准光源，使得光源照射样品表面，使得表面产生镜面反射。 系统还可以包括镜面反射鉴别器，其将产生的镜面反射引导到相对于所述样品表面对准的光学检测器，该对准角度基本上等于所产生的镜面反射的反射角。 优选地，定向镜面反射不会使光学检测器饱和; 并且光学检测器捕获来自样品表面的镜面反射，并且基本上仅使用镜面反射产生图像数据。

公开(公告)号：US20130100276A1

公开(公告)日：2013-04-25

申请号：US13651583

申请日：2012-10-15

Applicant: Robert Bishop ,  Timothy Pinkey

Inventor： Robert Bishop ,  Timothy Pinkey

IPC: H04N7/18

CPC classification number: H04N5/2356 ,  G01N21/6456 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/6463 ,  G01N2021/95638 ,  G01N2201/0612 ,  G01N2201/062 ,  G01N2201/10 ,  G03B13/36 ,  H04N5/332 ,  H04N5/37206 ,  H04N5/378 ,  H04N7/18

Abstract: A method and apparatus for optimizing inspection high-speed optical inspection of parts using intelligent image analysis to determine optimal focus using high numerical aperture (NA) optics, achieve a superior signal-to-noise ratio, resolution, and inspection speed performance with very limited depth of field lenses.

Abstract translation: 使用智能图像分析优化检测部件的高速光学检测的方法和装置，使用高数值孔径（NA）光学元件确定最佳聚焦，实现了非常有限的信号噪声比，分辨率和检测速度性能 景深镜头。

公开(公告)号：US20130015370A1

公开(公告)日：2013-01-17

申请号：US13550291

申请日：2012-07-16

Applicant: Savvas Damaskinos ,  Arthur Edward Dixon

Inventor： Savvas Damaskinos ,  Arthur Edward Dixon

IPC: G01N21/64

CPC classification number: G01N21/6452 ,  G01N2021/6421 ,  G01N2021/6439 ,  G01N2201/10 ,  G01N2201/1042

Abstract: An instrument and method for scanning a large specimen supported on a specimen holder has a plurality of illumination sources with each illumination, source being focused on a different focus spot of the specimen simultaneously. There are a plurality of spectrally resolved detectors to receive light reflected or emitted from the different focus spots simultaneously with each spectrally resolved detector receiving light from one illumination source only.

Abstract translation: 用于扫描支撑在样本保持器上的大样本的仪器和方法具有多个照明源，每个照明源同时聚焦在样本的不同聚焦点上。 存在多个光谱分辨检测器，用于接收来自不同焦点的反射或发射的光，同时每个光谱分辨检测器仅接收来自一个照明源的光。

公开(公告)号：US20110164228A1

公开(公告)日：2011-07-07

申请号：US12989902

申请日：2009-04-27

Applicant: Marcus Adrianus Van De Kerkhof

Inventor： Marcus Adrianus Van De Kerkhof

IPC: G06F19/00 ,  G03B27/00

CPC classification number: G03F7/70633 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/10 ,  G03F7/70616

Abstract: The invention relates to detecting targets located within patterns. The invention operates in the pupil plane by filtering the fourier transform from the surrounding pattern. In particular the method includes performing a fourier transform on reflected radiation data to form fourier transform data; removing portions of the fourier transform data which correspond to the target to form reduced fourier transform data; interpolating the portions of the reduced fourier transform data which were removed, to form product fourier transform data; and subtracting the product fourier transform data from the fourier transform data.

Abstract translation: 本发明涉及检测位于图案内的目标。 本发明通过从周围图案过滤傅立叶变换而在瞳孔平面中操作。 特别地，该方法包括对反射辐射数据执行傅里叶变换以形成傅里叶变换数据; 去除与目标对应的傅里叶变换数据的部分，以形成缩小的傅里叶变换数据; 内插被去除的缩小傅立叶变换数据的部分，以形成乘积变换数据; 并从傅里叶变换数据中减去乘积傅立叶变换数据。

公开(公告)号：US07602479B2

公开(公告)日：2009-10-13

申请号：US11666629

申请日：2005-11-01

Applicant: Ryuji Sawada ,  Yoshio Nakashima

Inventor： Ryuji Sawada ,  Yoshio Nakashima

IPC: G02B21/00 ,  G01N21/63 ,  G01N21/64

CPC classification number: G01N21/6458 ,  G01N2201/10 ,  G02B21/0076 ,  G02B21/16

Abstract: A light fluctuation measuring apparatus, comprising a parameter setting unit 2 which sets parameters of a microscopic image obtaining unit and/or parameters of a light emission measuring unit used for observing light emission in a desired area of a sample in time series, a parameter storage 4 which stores parameters, a mode selector 3 which selects one of a microscopic image obtaining mode for obtaining a microscopic image by a microscopic image obtaining unit, and a light emission measuring mode for observing light emission in a desired area by a light emission measuring unit, and a control unit 1 which reads parameters stored in the storage 4 based on a selected mode, inputs the parameter to a microscopic image obtaining unit or a light emission measuring unit, and controls these units.

Abstract translation: 一种光波动测量装置，包括参数设置单元2，其设置用于以时间序列观察样品的期望区域中的发光的微观图像获得单元的参数和/或用于观察发光的发光测量单元的参数;参数存储 存储参数的模式选择器3，选择由微观图像获得单元获得显微图像的显微图像获得模式之一的模式选择器3以及用于通过发光测量单元观察所需区域中的发光的发光测量模式 以及基于所选择的模式读取存储在存储器4中的参数的控制单元1，将参数输入到显微图像获取单元或发光测量单元，并且控制这些单元。

公开(公告)号：US20090225399A1

公开(公告)日：2009-09-10

申请号：US12042252

申请日：2008-03-04

Applicant: Guoheng Zhao ,  Rex Runyon ,  Mehdi Vaez-Iravani

Inventor： Guoheng Zhao ,  Rex Runyon ,  Mehdi Vaez-Iravani

IPC: G02B26/08 ,  G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2201/10 ,  G01N2201/104 ,  G02B26/123 ,  Y10S359/90

Abstract: A multi-spot scanning technique using a spot array having a predetermined gap between spots can advantageously provide scalability to a large number of spots as well as the elimination of cross-talk between channels. The multi-spot scanning technique can select a number of spots for the spot array (1D or 2D), determine a separation between the spots to minimize crosstalk, and perform a scan on a wafer using the spot array and a full field of view (FOV). Performing the scan includes performing a plurality of scan line cycles, wherein each scan line cycle can fill in gaps left by previous scan line cycles. This “delay and fill” scan allows large spacing between spots, thereby eliminating cross-talk at the detector plane. In one embodiment, the scan is begun and ended outside a desired scan area on the wafer to ensure full scan coverage.

Abstract translation: 使用具有点之间的预定间隙的点阵列的多点扫描技术可以有利地提供大量斑点的可扩展性以及消除通道之间的串扰。 多点扫描技术可以选择点阵列（1D或2D）的多个斑点，确定斑点之间的间隔以最小化串扰，并使用斑点阵列和全视场对晶片进行扫描（ FOV）。 执行扫描包括执行多个扫描线周期，其中每个扫描线周期可以填充先前扫描线周期留下的间隙。 这种“延迟和填充”扫描允许斑点之间的大间距，从而消除检测器平面处的串扰。 在一个实施例中，扫描开始并在晶片上期望的扫描区域外部结束以确保全扫描覆盖。