公开(公告)号：US5280217A

公开(公告)日：1994-01-18

申请号：US930127

申请日：1992-08-14

Applicant: Walter P. Lapatovich ,  Scott J. Butler

Inventor： Walter P. Lapatovich ,  Scott J. Butler

IPC: F21S2/00 ,  H01J65/04 ,  H01P5/12 ,  H01P5/16 ,  H05B41/24 ,  H05B41/16

CPC classification number: H01J65/044 ,  H05B41/24

Abstract: An improved apparatus for delivering energy to two field applicators includes a power divider electrically coupled to a planar transmission line connecting the two field applicators. The power divider receives an input microwave signal and delivers a first power signal to an applicator along a first leg of the line, and delivers a second power signal to the other applicator along a second leg of the line. The power divider is coupled to the transmission line at a point which is remote from the applicators such that the power signals will encounter substantially identical discontinuities as the signals are coupled into their respective applicators.

Abstract translation: 将能量输送到两个场施加器的改进的装置包括电耦合到连接两个场施加器的平面传输线的功率分配器。 功率分配器接收输入的微波信号，并沿着线的第一支路向施加器传送第一功率信号，并沿着线的第二支路将另一功率信号传送到另一个施加器。 功率分配器在远离施加器的点处耦合到传输线，使得当信号耦合到它们各自的施加器中时，功率信号将遇到基本相同的不连续性。

公开(公告)号：US5115168A

公开(公告)日：1992-05-19

申请号：US616244

申请日：1990-11-20

Applicant: Isao Shoda ,  Hitoshi Kodama ,  Kazuo Magome ,  Akihiko Iwata ,  Kenji Yoshizawa ,  Masakazu Taki

Inventor： Isao Shoda ,  Hitoshi Kodama ,  Kazuo Magome ,  Akihiko Iwata ,  Kenji Yoshizawa ,  Masakazu Taki

IPC: H01J65/04 ,  H05B41/24 ,  H05B41/282 ,  H05B41/392

CPC classification number: H01J65/044 ,  H05B41/24

Abstract: A power supply circuit for a magnetron adapted to supply microwave energy to an electrodeless discharge bulb is disclosed. The circuit includes a rectifier coupled across a commerical AC voltage source, a filter for smoothing the output of the rectifier, an inverter for converting the DC voltage supplied from the filter into a high frequency AC voltage, a step-up transformer for stepping up the high frequency AC voltage outputted from the inverter, and a rectifier which rectifies the high voltage AC output of the transformer into a unidirectional voltage which is supplied to the magnetron. The inverter switching is controlled by a pulse width modulation control circuit to maintain the magnetron output power at a predetermined level. According to one aspect, an inductance is provided in the circuit which supresses high frquency components in the current flowing through the windings of the transformer; according to another aspect, the inverter switching frequency (expressed in kHz) is set at a value not less than 1500/D, wherein D represents the diameter of the electrodeless bulb expressed in millimeters; according to still another aspect, the peak to the mean value ratio of the magnetron current is limited under 3.75 inclusive.

公开(公告)号：US5113119A

公开(公告)日：1992-05-12

申请号：US576322

申请日：1990-08-29

Applicant: Ulrich Niemann ,  Stephan Offermanns ,  Bernhard Weber

Inventor： Ulrich Niemann ,  Stephan Offermanns ,  Bernhard Weber

IPC: H01J61/12 ,  H01J65/04

CPC classification number: H01J65/044 ,  H01J61/12

Abstract: An electrodeless high pressure discharge lamp contains a halide or oxyhalide of W, Ta, Re, or rhenium oxide in such a quantity that a supersaturated metal vapor arises in the discharge, by which metal particles are formed. Owing to their high temperature these particles generate thermal emission. The lamp has a high color temperature and a high color rendering index.

公开(公告)号：US4965540A

公开(公告)日：1990-10-23

申请号：US345813

申请日：1989-05-01

Applicant: James J. Sullivan

Inventor： James J. Sullivan

IPC: G01N21/68 ,  H01J65/04 ,  H01P7/04 ,  H05H1/46

CPC classification number: H05H1/46 ,  G01N21/68 ,  H01J65/044 ,  H01P7/04

Abstract: A microwave resonant cavity for a spectroscopic light source includes a housing having therein a chamber formed by side walls and a cylindrical outer wall. The side walls having aligned openings therethrough which are on the longitudinal axis of the outer wall. A refractory tube which is adapted to contain a gaseous plasma extends through the aligned openings and across the chamber in the housing. The portion of the side walls of the chamber adjacent the openings are closer together than the remaining portions of the side walls so that the chamber has a first portion around the refractory tube which is narrower than a second portion of the chamber around the first portion. A coupling loop is electrically coupled to a side wall of the chamber within the second portion of the chamber and is connector to a coaxial connector which extends through the outer wall of the housing to deliver microwave power to the chamber. This provides a resonant cavity in which the plasma formed in the refractory tube is very short for increased power and greater brightness of the plasma. This also provides a resonant cavity which requires no tuning and is more stable.

Abstract translation: 用于分光光源的微波谐振腔包括壳体，其中具有由侧壁形成的室和圆柱形外壁。 侧壁具有穿过其的对准的开口，其在外壁的纵向轴线上。 适于容纳气态等离子体的难熔管延伸穿过对齐的开口并穿过壳体中的室。 邻近开口的室的侧壁部分比侧壁的其余部分更靠近在一起，使得腔室具有围绕第一部分的腔室的第一部分，该第一部分围绕耐火管的第二部分窄。 耦合回路电耦合到室的第二部分内的室的侧壁，并且是连接到同轴连接器，其延伸穿过壳体的外壁以将微波功率递送到腔室。 这提供了谐振腔，其中形成在耐火管中的等离子体对于增加功率和更高亮度的等离子体非常短。 这也提供了不需要调谐并且更稳定的谐振腔。

公开(公告)号：US4749915A

公开(公告)日：1988-06-07

申请号：US865488

申请日：1986-05-21

Applicant: Donald Lynch ,  Mohammad Kamarehi ,  Michael G. Ury ,  Charles H. Wood

Inventor： Donald Lynch ,  Mohammad Kamarehi ,  Michael G. Ury ,  Charles H. Wood

IPC: F21S2/00 ,  H01J65/04 ,  H01P1/208 ,  H05B41/24 ,  H05B41/16

CPC classification number: H01J65/04 ,  H01J65/044 ,  H01P1/2082

Abstract: A microwave powered electrodeless light source in which a relatively high power level is coupled to the bulb. This is accomplished by arranging for a plurality of energy modes which are substantially de-coupled from each other to be present in the microwave cavity.

Abstract translation: 一种微波供电的无电极光源，其中相对较高的功率电平耦合到灯泡。 这通过布置彼此基本上去耦合以存在于微波空腔中的多个能量模式来实现。

公开(公告)号：US4532427A

公开(公告)日：1985-07-30

申请号：US362825

申请日：1982-03-29

Applicant: John C. Matthews ,  Michael G. Ury ,  Charles H. Wood ,  Marshal Greenblatt

Inventor： John C. Matthews ,  Michael G. Ury ,  Charles H. Wood ,  Marshal Greenblatt

IPC: F21S2/00 ,  G03F7/20 ,  H01J65/04 ,  H01L21/027

CPC classification number: G03F7/70008 ,  H01J65/044

Abstract: A method and apparatus for performing deep UV photolithography which utilizes a microwave generated electrodeless light source for producing deep UV radiation. This results in faster semiconductor exposure times and less system downtime for changing failed bulbs as well as other advantages which are detailed herein.

Abstract translation: 一种用于进行深紫外光刻的方法和装置，其利用微波产生的无电极光源产生深紫外线辐射。 这导致更快的半导体曝光时间和更换失败灯泡的系统停机时间以及这里详细描述的其他优点。

公开(公告)号：US4501993A

公开(公告)日：1985-02-26

申请号：US433070

申请日：1982-10-06

Applicant: Peter Mueller ,  Michael G. Ury ,  Charles H. Wood

Inventor： Peter Mueller ,  Michael G. Ury ,  Charles H. Wood

IPC: G03F7/20 ,  H01J61/30 ,  H01J65/04 ,  H01K1/32 ,  H05B41/16 ,  H05B41/24

CPC classification number: G03F7/70016 ,  H01J61/30 ,  H01J65/044

Abstract: An electrodeless lamp bulb for producing relatively high radiation output in the deep ultraviolet part of the spectrum when excited with microwave energy wherein the bulb envelope is made of synthetic quartz which is substantially water-free. This results in increased bulb lifetime, since loss of bulb transparency with exposure to deep ultraviolet radiation over time is substantially reduced. An electrodeless lamp incorporating the above-described bulb includes a microwave chamber in which the bulb is situated and means for coupling microwave energy to the chamber.

Abstract translation: 一种无电极灯泡，用于在用微波能量激发时在光谱的深紫外部分产生相对高的辐射输出，其中灯泡外壳由基本上无水的合成石英制成。 这导致增加的灯泡寿命，因为随着时间的流逝暴露于深紫外线辐射的灯泡透明度的损失显着降低。 结合上述灯泡的无电极灯包括其中放置灯泡的微波室和用于将微波能量耦合到腔室的装置。

公开(公告)号：US4498029A

公开(公告)日：1985-02-05

申请号：US625565

申请日：1984-07-02

Applicant: Kenji Yoshizawa ,  Hitoshi Kodama ,  Yoshibumi Minowa ,  Hirotsugu Komura ,  Hiroshi Ito

Inventor： Kenji Yoshizawa ,  Hitoshi Kodama ,  Yoshibumi Minowa ,  Hirotsugu Komura ,  Hiroshi Ito

IPC: F21S2/00 ,  H01J65/04 ,  H01J7/46 ,  H01J19/80

CPC classification number: H01J65/044 ,  H01J61/54

Abstract: A microwave generated plasma light source including a microwave generator, a microwave cavity having a light reflecting member forming at least a portion of the cavity, and a member transparent to light and opaque to microwaves disposed across an opening of the cavity opposite the feeding opening through which the microwave generator is coupled. An electrodeless discharge bulb is disposed at a position in the cavity such that the cavity operates as a resonant cavity at least when the bulb is emitting light. In the bulb is encapsulated at least one discharge light emissive substance. The bulb has a shape and is sufficiently small that the bulb acts substantially as a point light source.

Abstract translation: 一种微波产生的等离子体光源，包括微波发生器，具有形成至少一部分空腔的光反射部件的微波腔，以及对透明的光而不透明的构件，其布置在与供给开口相对的空腔的开口处 微波发生器耦合。 无电极放电灯泡设置在空腔中的位置，使得至少当灯泡发光时，腔体作为谐振腔起作用。 在灯泡中封装有至少一种放电光发射物质。 灯泡具有足够小的形状，使得灯泡基本上作为点光源起作用。

公开(公告)号：US4042850A

公开(公告)日：1977-08-16

申请号：US667759

申请日：1976-03-17

Applicant: Michael Gerson Ury ,  Bernard John Eastlund ,  Ray S. Braden ,  Charles H. Wood

Inventor： Michael Gerson Ury ,  Bernard John Eastlund ,  Ray S. Braden ,  Charles H. Wood

IPC: H01J65/04 ,  H05B6/80 ,  H05B41/24 ,  H01J7/46 ,  H01J19/80

CPC classification number: H01J65/044 ,  H05B6/80

Abstract: An apparatus for efficiently coupling microwave energy to a highly dissipative load such as a plasma lamp tube. A longitudinally extending lamp tube is enclosed in a longitudinally extending non-resonant microwave chamber having a pair of coupling slots therein which are oriented perpendicular to the direction of the lamp tube. The slots are azimuthally offset in opposite directions with respect to a longitudinally extending top center line of the chamber by about 15.degree. to 20.degree., and are located near respective ends of the chambers but at different distances therefrom. Microwave energy from a pair of microwave energy generating means is coupled to the respective slots with the frequency outputs of the generating means being offset from each other by a small amount.

Abstract translation: 用于有效地将微波能量耦合到诸如等离子体灯管的高耗散负载的装置。 纵向延伸的灯管被封闭在纵向延伸的非谐振微波室中，其中具有一对垂直于灯管的方向定向的耦合槽。 槽相对于室的纵向延伸的顶部中心线在相对方向上方位偏移大约15°至20°，并且位于腔室的相应端部附近，但距离其不同的距离处。 来自一对微波能量产生装置的微波能量被耦合到相应的时隙，所述发生装置的频率输出彼此偏移少量。

公开(公告)号：US3995195A

公开(公告)日：1976-11-30

申请号：US632416

申请日：1975-11-17

Applicant: Paul O. Haugsjaa ,  William McNeill ,  Robert J. Regan

Inventor： Paul O. Haugsjaa ,  William McNeill ,  Robert J. Regan

IPC: H01J65/04 ,  H01J61/56

CPC classification number: H01J65/044 ,  H01J65/046

Abstract: In a light source in which an electrodeless lamp is excited by high frequency power coupled into a lamp termination fixture having an inner and outer conductor, the fixture has a dynamically variable characteristic impedance, thereby facilitating dynamic matching of the variable impedance of the lamp during the lamp-off to lamp-run conditions to the output impedance of the power source. This feature is possible because the position of the inner conductor with respect to the outer conductor is controlled as a function of the heat generated within the fixture. The inner conductor is made of a conductive material having a non-uniform coefficient of thermal expansion. When the fixture is cold, the lamp and the lamp-coupled end of the inner conductor are substantially concentric to the outer conductor thereby creating a high characteristic impedance to match the high starting lamp impedance to the source impedance. When the lamp is running, the inner conductor and lamp become eccentric to the outer conductor due to the heat generated in the fixture, thereby reducing the fixture characteristic impedance to match the lower lamp impedance to the output impedance of the source.

Abstract translation: 在其中无电极灯被耦合到具有内导体和外导体的灯端接固定器的高频功率激发的光源中，该固定装置具有动态可变的特性阻抗，从而有助于灯的可变阻抗的动态匹配 灯灭灯灯运行条件到电源的输出阻抗。 该特征是可能的，因为内部导体相对于外部导体的位置被控制为在夹具内产生的热的函数。 内导体由具有不均匀热膨胀系数的导电材料制成。 当灯具冷却时，内部导体的灯和灯联接端基本上与外部导体同心，从而产生高的特性阻抗，以使高起动灯阻抗与源阻抗相匹配。 当灯运行时，由于灯具中产生的热量，内部导体和灯变得偏心于外部导体，从而降低灯具特性阻抗，使灯泡的阻抗与源的输出阻抗相匹配。