公开(公告)号：US08436994B2

公开(公告)日：2013-05-07

申请号：US12930762

申请日：2011-01-15

Applicant: Martin M. Liphardt ,  Jeffrey S. Hale ,  Ping He ,  Galen L. Pfeiffer

Inventor： Martin M. Liphardt ,  Jeffrey S. Hale ,  Ping He ,  Galen L. Pfeiffer

IPC: G01J4/00

CPC classification number: G01N21/01 ,  G01N21/21 ,  G01N21/211 ,  G01N21/55 ,  G01N2021/151 ,  G01N2021/212 ,  G01N2021/213 ,  G01N2021/214 ,  G01N2201/021 ,  G01N2201/0693

Abstract: A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.

Abstract translation: 与对准系统（AS）功能组合的样本调查系统（ES）以及启用校准和非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，具有 映射椭偏仪等应用。

公开(公告)号：US08427643B2

公开(公告)日：2013-04-23

申请号：US12598061

申请日：2008-06-17

Applicant: Hanee Park ,  Il kyu Choi ,  Han Oh Park

Inventor： Hanee Park ,  Il kyu Choi ,  Han Oh Park

IPC: G01J4/00

CPC classification number: G01N21/6445 ,  G01J3/0224 ,  G01J3/4406 ,  G01N21/6452 ,  G01N2021/6478 ,  G01N2021/6484 ,  G01N2201/0631 ,  G01N2201/0636

Abstract: The present invention relates to a real-time PCR monitoring apparatus for real-time monitoring production of reaction product produced during the reaction while performing nucleic acid amplification such as PCR for various kinds of trace samples. Specifically, the present invention relates to an apparatus for real-time monitoring biochemical reaction for efficiently dividing interference between an excitation light and a fluorescence, which includes a polarizer, a polarizing beam splitter, a polarization converter and so on.

Abstract translation: 本发明涉及一种用于实时监测在反应过程中产生的反应产物的实时PCR监测装置，同时对各种痕量样品进行核酸扩增如PCR。 具体地说，本发明涉及一种用于实时监测生化反应的装置，用于有效地分离激发光和荧光之间的干扰，其包括偏振器，偏振分束器，偏振转换器等。

公开(公告)号：US08405830B2

公开(公告)日：2013-03-26

申请号：US13126618

申请日：2009-10-28

Applicant: Denis Cattelan ,  Enric Garcia-Caurel ,  Antonello De Martino ,  Bernard Drevillon

Inventor： Denis Cattelan ,  Enric Garcia-Caurel ,  Antonello De Martino ,  Bernard Drevillon

IPC: G01J4/00

CPC classification number: G01N21/211 ,  G01N2021/213

Abstract: A spectroscopic polarimetric system of broad spectral range, includes a light source suitable for emitting an incident light beam over a wavelength range, a polarization state generator (PSG), a polarization state analyzer (PSA), and a detector. The PSG and the PSA have respective elements for modulating the polarization of the light beam. The elements of the PSG for modulating polarization are suitable for generating a sequence of m polarization states with m>4 at each measurement wavelength, the elements of the PSA for modulating polarization are suitable for determining a sequence of n polarization states with n>4 for each measurement wavelength, and the detector elements are suitable for acquiring a sequence of N measurements with 16

Abstract translation: 具有宽光谱范围的光谱极化系统包括适于发射波长范围内的入射光束的光源，偏振状态发生器（PSG），偏振状态分析器（PSA）和检测器。 PSG和PSA具有用于调制光束的偏振的各自的元件。 用于调制偏振的PSG的元件适用于在每个测量波长处产生具有m≥4的m个偏振态的序列，用于调制偏振的PSA的元件适用于确定n≥4的n个极化状态的序列 每个测量波长和检测器元件适合于在每个波长处获得具有16

公开(公告)号：US20130057861A1

公开(公告)日：2013-03-07

申请号：US13604845

申请日：2012-09-06

Applicant: Toshihiro Ishii ,  Yoshihiro Oba ,  Fumikazu Hoshi ,  Satoru Sugawara

Inventor： Toshihiro Ishii ,  Yoshihiro Oba ,  Fumikazu Hoshi ,  Satoru Sugawara

IPC: G01J4/00

CPC classification number: G01N21/4738 ,  G01N21/21

Abstract: A moisture sensor for detecting moisture content of an object includes a light source to emit light having an infrared wavelength that is absorbed by water; an optical system to receive the light from the light source and output linearly polarized light having a first polarization direction in a direction toward the object, and to receive light scattered from the object and output linearly polarized light having a second polarization direction perpendicular to the first polarization direction in another direction other than the direction toward the object; and a photodetector to receive the linearly polarized light having the second polarization direction output from the optical system.

Abstract translation: 用于检测物体的水分含量的湿度传感器包括发射具有被水吸收的红外波长的光的光源; 光学系统，用于接收来自光源的光，并且在朝向物体的方向上输出具有第一偏振方向的线偏振光，并且接收从物体散射的光，并输出具有与第一偏振方向垂直的第二偏振方向的线偏振光 朝向物体的方向以外的另一方向的偏振方向; 以及光电检测器，用于接收从光学系统输出的具有第二偏振方向的线偏振光。

公开(公告)号：US08368890B2

公开(公告)日：2013-02-05

申请号：US12707962

申请日：2010-02-18

Applicant: Timothy A. Brunner ,  Gregory R. McIntyre

Inventor： Timothy A. Brunner ,  Gregory R. McIntyre

IPC: G01J4/00

CPC classification number: G06F17/50 ,  G01J4/04 ,  G03F1/44 ,  G03F7/70466 ,  G03F7/70566

Abstract: This invention relates to the manufacture of semiconductor substrates such as wafers and to a method for monitoring the state of polarization incident on a photomask in projection printing using a specially designed polarization monitoring reticle for high numerical aperture lithographic scanners. The reticle measures 25 locations across the slit and is designed for numerical apertures above 0.85. The monitors provide a large polarization dependent signal which is more sensitive to polarization. A double exposure method is also provided using two reticles where the first reticle contains the polarization monitors, clear field reference regions and low dose alignment marks. The second reticle contains the standard alignment marks and labels. For a single exposure method, a tri-PSF low dose alignment mark is used. The reticles also provide for electromagnetic bias wherein each edge is biased depending on that edge's etch depth.

Abstract translation: 本发明涉及诸如晶片的半导体衬底的制造以及用于在使用专门设计的用于高数值孔径光刻扫描仪的偏振监测掩模版的投影印刷中监视入射到光掩模上的偏振状态的方法。 标线测量穿过狭缝的25个位置，并设计为高于0.85的数值孔径。 监视器提供对极化更敏感的大偏振相关信号。 还使用两个掩模版提供双曝光方法，其中第一掩模版包含偏振监视器，清晰的场参考区域和低剂量对准标记。 第二个掩模版包含标准对准标记和标签。 对于单次曝光方法，使用三PSF低剂量对准标记。 标线还提供电磁偏压，其中每个边缘根据该边缘的蚀刻深度而偏置。

公开(公告)号：US20130023399A1

公开(公告)日：2013-01-24

申请号：US13543002

申请日：2012-07-06

Applicant: Teppei Agawa

Inventor： Teppei Agawa

IPC: G01J4/00 ,  C03C3/00 ,  B23Q17/24

CPC classification number: B23Q17/2428 ,  G01B11/002 ,  G01B11/26 ,  Y10T29/49769

Abstract: Provided is a laser light deflection amount detecting apparatus that accurately measures deflection of the optical axis of laser light in two directions orthogonal to the optical axis.

Abstract translation: 提供一种激光偏转量检测装置，其精确地测量与光轴正交的两个方向的激光的光轴的偏转。

公开(公告)号：US20120314215A1

公开(公告)日：2012-12-13

申请号：US13135974

申请日：2011-07-06

Applicant: Allen D. Parks ,  Scott E. Spence

Inventor： Allen D. Parks ,  Scott E. Spence

IPC: G01J4/00

CPC classification number: G01J3/0224 ,  G01J9/00

Abstract: An apparatus is provided for determining a target wavelength λ of a target photon beam. The apparatus includes a photon emitter, a pre-selection polarizer, a prism composed of a Faraday medium, a post-selection polarizer, a detector and an analyzer. The photon emitter projects a monochromatic light beam at the target wavelength λ substantially parallel to a magnetic field having strength B. The target wavelength is offset from established wavelength λ′ as λ=λ′+Δλ by wavelength difference of Δλ

Abstract translation: 提供了一种用于确定目标光子束的目标波长λ的装置。 该装置包括光子发射器，预选择偏振器，由法拉第介质组成的棱镜，后选择偏振器，检测器和分析器。 光子发射器投影基本上平行于具有强度B的磁场的目标波长λ的单色光束。目标波长从建立的波长λ'偏移为λ=λ'+＆Dgr;λ，波长差为＆Dgr;λ< <λ。 法拉第棱镜具有Verdet值V.在通过预选择偏振器之后，光束通过棱镜，并以入射角入射到界面表面; 0到表面的法线，并作为 第一和第二圆偏振光束被目标分离角δ分开并具有平均折射角。 次级介质具有n0的折射率。 在通过后选择偏振器之后，检测器基于目标分离角度δ来测量目标指针旋转角度Aw。 分析仪通过基于建立的对应于建立的波长λ'的分离角δ'计算偏移指针旋转角度＆Dgr; Aw = Aw-A'w来校准目标波长λ，校准指针旋转角度A'w，并且通过估计 基于＆Dgr的波长差; ㄧλ≈≈≈;; ;ㄧ; ;;;;; 'VB抄 0，其中 是放大系数。 提供了一种结合为该装置描述的操作的方法。

公开(公告)号：US20120314202A1

公开(公告)日：2012-12-13

申请号：US13571481

申请日：2012-08-10

Applicant: Steven Danyluk ,  Fang Li

Inventor： Steven Danyluk ,  Fang Li

IPC: G01B11/16 ,  G01J4/00

CPC classification number: G01B11/168 ,  G01L1/241 ,  G01L5/0047

Abstract: The present invention provides a tool for and method of using an infrared transmission technique to extract the full stress components of the in-plane residual stresses in thin, multi crystalline silicon wafers including in situ measurement of residual stress for large cast wafers. The shear difference method is used to obtain full stress components by integrating the shear stress map from the boundaries. System ambiguity at the boundaries is resolved completely by introducing a new analytical function. A new anisotropic stress optic law is provided, and stress optic coefficients are calibrated for different crystal grain orientations and stress orientations.

Abstract translation: 本发明提供了一种使用红外透射技术提取薄多晶硅晶片中的平面内残余应力的全应力分量的工具和方法，包括原位测量大型晶圆的残余应力。 剪切差法用于通过从边界积分剪切应力图来获得全应力分量。 通过引入新的分析功能，完全解决了边界的系统模糊。 提供了新的各向异性应力光学定律，并且针对不同的晶粒取向和应力取向校准了应力光学系数。

公开(公告)号：US20120300207A1

公开(公告)日：2012-11-29

申请号：US13479764

申请日：2012-05-24

Applicant: Christoph Baer

Inventor： Christoph Baer

IPC: G01J4/00

CPC classification number: G01N22/00 ,  G01N33/222

Abstract: A device for determining the volume fraction of at least one component of a multi-phase medium on the basis of the running time of an electromagnetic desired signal emitted in the multi-phase medium, having at least one emitting device for emitting the desired signal into the multi-phase medium, having at least one receiving device for receiving the desired signal, and having an evaluation device for determining the running time of the desired signal between the emitting device and the receiving device, and at least one polarization device arranged between the emitting device and the receiving device. The desired signal is emitted at least indirectly from the emitting device through the multi-phase medium to the polarization device, the polarization device influences the polarization of the desired signal and the polarization-influenced desired signal is emitted at least indirectly from the polarization device to the receiving device which receives it.

Abstract translation: 一种用于基于在多相介质中发射的电磁期望信号的运行时间来确定多相介质的至少一个分量的体积分数的装置，具有至少一个用于发射所需信号的发射装置 所述多相介质具有用于接收所述期望信号的至少一个接收装置，以及具有用于确定所述发射装置与所述接收装置之间的期望信号的运行时间的评估装置，以及布置在所述多个相位介质之间的至少一个极化装置 发射装置和接收装置。 期望的信号至少间接地从发射装置通过多相介质发射到偏振装置，偏振装置影响期望信号的极化，偏振影响的期望信号至少间接地从偏振装置发射到 接收它的接收设备。

公开(公告)号：US20120287436A1

公开(公告)日：2012-11-15

申请号：US13469695

申请日：2012-05-11

Applicant: Michael SPEIDEL ,  Mark JOHNSON

Inventor： Michael SPEIDEL ,  Mark JOHNSON

IPC: G01J4/00

CPC classification number: G01D5/3473 ,  G01D5/345

Abstract: Measurement of the rotating angle of two objects rotating in relation to each other is achieved with a transmitter assigned to one of the objects. The transmitter emits light that is either polarized or becomes polarized by means of a polarization filter, and with a polarization-sensitive polarizer such that the transmitter and the polarizer rotate relative to each other as dependent on the rotating angle. A receiver measures the luminosity of light passing through the polarizer in order to create a signal that is dependent on the rotating angle, and where the receiver has at least two receiver elements which detect light of differing polarization.

Abstract translation: 相对于彼此旋转的两个物体的旋转角度的测量通过分配给其中一个物体的发射器来实现。 发射器发射的光被偏振或通过偏振滤光器偏振，并且偏振敏感的偏振器使得发射器和偏振器相对于彼此旋转，这取决于旋转角度。 接收器测量通过偏振器的光的亮度，以便产生取决于旋转角度的信号，并且其中接收器具有至少两个检测不同偏振光的接收器元件。