Abstract:
An aerosol delivery apparatus is used to deliver an aerosol into a reaction chamber for chemical reaction to produce reaction products such as nanoparticles. A variety of improved aerosol delivery approaches provide for the production of more uniform reaction products. In preferred embodiments, a reaction chamber is used that has a cross section perpendicular to the flow of reactant having a dimension along a major axis greater than a dimension along a minor axis. The aerosol preferably is elongated along the major axis of the reaction chamber.
Abstract:
A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.
Abstract:
A chemical delivery system which utilizes multiple techniques to achieve a suitable chemical purge of the chemical delivery system is provided. A purge sequence serves to purge the manifold and canister connection lines of the chemical delivery system prior to removal of an empty chemical supply canister or after a new canister is installed. More particularly, a purge technique which may utilizes a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system is disclosed. By utilizing a plurality of purge techniques, chemicals such as TaEth, TDEAT, BST, etc. which pose purging difficulties may be efficiently purged from the chemical delivery system. The chemical delivery system may also be provided with an efficient and conveniently located heater system for heating the chemical delivery system cabinet.
Abstract:
A method of emptying vessels containing dispersions, solutions or suspensions of polymers in which during the emptying process the liquid medium also used to take up the polymers into the dispersion, solution or suspension is passed into the space within the vessel that is not filled by the solution, dispersion or suspension, wherein the liquid medium used to take up the polymers into the dispersion, solution or suspension is introduced in vapor form.
Abstract:
Containers for ultrahigh purity chemicals having aspect ratios of greater than 3:1 and methods of making the same from seamless electropolished stainless steel tubing are described. Chemical delivery systems for semiconductor fabrication processes that utilize these high aspect ratio containers also are described.
Abstract:
A method for treating a liquid flow to be cleaned passing through a flow line into a flotation plant including passing a portion of the liquid flow to be cleaned from the flow line along a first branch line into a pump. The suction capacity of the pump is regulated to draw in a direct flow of gas so that the pump sucks the gas as a direct flow. The drawn-in direct flow of gas is then mixed with the liquid flow in the pump and passed along a discharge pipe of the pump into a mixing part wherein the discharge pipe ends in a pressure release. The remaining portion of the liquid flow to be cleaned from the flow line is then passed along a second branch line into the mixing part. A liquid flow is discharged from the pressure release, the liquid flow including gas bubbles containing dissolved gas. The remaining portion of the liquid flow to be cleaned is then mixed with the liquid flow discharged from the pressure release to obtain a resultant flow which is then passed along a mixing duct into the flow line and further into the flotation plant.
Abstract:
A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Abstract:
A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Abstract:
The present invention provides an agent dispenser, a method and an apparatus for introducing an agent into a liquid or gas where the agent is miscible with such liquid or gas. The agent dispenser comprises a hollow casing constructed of a material having a coefficient of cubical expansion that differs from the coefficient of cubical expansion of the liquid or gas. At least one opening is provided in the hollow casing for permitting the flow of the liquid or gas to and from the interior of the hollow casing. The dispenser contains the agent and the agent is introduced into the liquid or gas through liquid or gas drawn into and expelled from said dispenser as a result of variations in the internal pressure of the dispenser resulting from thermal expansion and contraction of the dispenser and its contents caused by variations in the temperature of the liquid or gas surrounding the dispenser.
Abstract:
A bulk material dosing or feeder device has at least one upright post mounted to a base and carrying a horizontal head section. A supply hopper is supported by the head section. Modular units such as a stirrer, a weigher or feeder or the like are vertically aligned, vertically below the hopper. At least one, preferably each modular unit is mounted on a respective swivel arm. The swivel arm is journalled to the upright post whereby the modular unit may be tilted into an operative position below the hopper or into an out position for easy access to and exchange of the modular units.