公开(公告)号：US20110290286A1

公开(公告)日：2011-12-01

申请号：US13143992

申请日：2010-01-22

Applicant: Keisuke Ohata

Inventor： Keisuke Ohata

IPC: B08B3/12 ,  G06F19/00

CPC classification number: B08B3/12 ,  B06B1/0207 ,  B06B2201/40 ,  B06B2201/71

Abstract: To provide an ultrasonic generator capable of detecting any of a state operated without a water load, abnormality of an ultrasonic transducer and abnormality of a cleaning bath. The ultrasonic generator according to the present invention includes a signal source 9 for generating a signal having at least one of frequencies of f1, f2 and f3, a matching circuit 17 for matching the signal generated from the signal source, an ultrasonic transducer 2 to which the signal matched by the matching circuit is input, a detection circuit 10 for detecting the voltage value and current value of the signal input to the ultrasonic transducer, an impedance computing unit 11 for computing the impedance to the signal using the voltage value and current value detected by the detection circuit, and a determination part 13 for determining abnormality of the cleaning bath or the ultrasonic transducer by comparing the impedance to the signal computed by the impedance computing unit with a previously-set threshold for detecting an impedance abnormality.

Abstract translation: 提供能够检测无水载荷运转的状态的超声波发生器，超声波换能器的异常和清洗槽的异常。 根据本发明的超声波发生器包括用于产生具有f1，f2和f3的频率中的至少一个的信号的信号源9，用于匹配从信号源产生的信号的匹配电路17，超声波换能器2， 输入与匹配电路匹配的信号，用于检测输入到超声波换能器的信号的电压值和电流值的检测电路10，使用电压值和电流值计算信号阻抗的阻抗计算单元11 以及确定部13，用于通过将阻抗与由阻抗计算单元计算的信号进行比较，用于通过用于检测阻抗异常的预先设定的阈值来确定清洗槽或超声波换能器的异常。

公开(公告)号：US07828901B2

公开(公告)日：2010-11-09

申请号：US12216392

申请日：2008-07-03

Applicant: Sameer I. Madanshetty

Inventor： Sameer I. Madanshetty

IPC: B08B3/10

CPC classification number: B06B1/0215 ,  B06B1/0603 ,  B06B1/067 ,  B06B2201/71 ,  B08B3/12 ,  G10K11/006 ,  G10K11/08 ,  G10K15/043 ,  Y10S134/902

Abstract: An apparatus to produce acoustic cavitation by controlling cavitation events in a liquid insonification medium utilizing a waveform to excite a transducer with a series of bipolar inharmonic tone bursts having medium recovery intervals between respective bursts so that the medium repeatedly recovers from cavitation events between bursts. The apparatus may be used to clean a semiconductor wafer, to de-coat a painted surface having, to induce a chemical reaction, and/or to provide recycled paper made from inked paper de-inked by cavitation. Cavitation events are generated using a transducer and a waveform generator, e.g., square wave tone bursts, to excite the transducer with a signal controlled in frequency, burst repetition rate, duty-cycle and/or amplitude, e.g., utilizing bursts having a frequency between 500 KHz and 10 MHz, and a duty cycle between 0.1% and 70%.

Abstract translation: 通过利用波形来控制气泡异常介质中的气蚀事件来产生声空化的装置，利用波形来激发具有在各个脉冲串之间具有介质恢复间隔的一系列双极性非对称音调脉冲串的换能器，使得介质从突发之间的空化事件重复地恢复。 该装置可以用于清洁半导体晶片，去除涂覆有引起化学反应的涂漆表面，和/或提供由通过空化脱墨的油墨纸制成的再生纸。 使用换能器和波形发生器（例如，方波音频脉冲串）来产生气蚀事件，以频率控制的信号激发换能器，突发重复率，占空比和/或幅度，例如利用具有在 500KHz和10MHz，占空比为0.1％至70％。

公开(公告)号：US20100192974A1

公开(公告)日：2010-08-05

申请号：US12756504

申请日：2010-04-08

Applicant: Youichirou MATSUMOTO ,  Teiichirou IKEDA ,  Shin YOSHIZAWA ,  Terutaka SAHARA ,  Nobuo TSUMAKI ,  Yoshimitsu KITADA

Inventor： Youichirou MATSUMOTO ,  Teiichirou IKEDA ,  Shin YOSHIZAWA ,  Terutaka SAHARA ,  Nobuo TSUMAKI ,  Yoshimitsu KITADA

IPC: B08B3/12

CPC classification number: B08B3/12 ,  B06B2201/71 ,  B08B3/02 ,  B08B2203/0288 ,  G10K11/352

Abstract: An ultrasonic cleaning method in which ultrasonic cleaning of a contamination attached to a surface of an object to be cleaned is performed by directing toward the object to be cleaned, a cleaning liquid to which ultrasonic waves are applied by alternately focusing first ultrasonic waves having a frequency of 1 to 10 MHz and second ultrasonic waves having a frequency equal to or lower than ½ of that of the first ultrasonic waves. A focus position adjustment device is used to adjust the distance of the focus position relative to the surface of the object to be cleaned, and a moving device is used to movie at least one of the ultrasonic wave generation device and a support base for the object so that the effect of the ultrasonic waves generated by the ultrasonic wave generation device on the surface of the object to be cleaned is uniform.

Abstract translation: 一种超声波清洗方法，其中通过朝向待清洁物体的方向引导附着在待清洁物体的表面上的污染物的超声波清洗，通过交替聚焦具有频率的第一超声波来施加超声波的清洗液体 1MHz至10MHz的频率，以及具有等于或低于第一超声波的频率的1/2的频率的第二超声波。 焦点位置调整装置用于调整聚焦位置相对于待清洁物体的表面的距离，并且使用移动装置拍摄超声波产生装置和物体的支撑基底中的至少一个 使得由超声波产生装置产生的超声波对被清洁物体的表面的影响是均匀的。

公开(公告)号：US20090025761A1

公开(公告)日：2009-01-29

申请号：US11577120

申请日：2005-10-06

Applicant: Youichirou Matsumoto ,  Teiichirou Ikeda ,  Shin Yoshizawa ,  Terutaka Sahara ,  Nobuo Tsumaki ,  Yoshimitsu Kitada

Inventor： Youichirou Matsumoto ,  Teiichirou Ikeda ,  Shin Yoshizawa ,  Terutaka Sahara ,  Nobuo Tsumaki ,  Yoshimitsu Kitada

IPC: B08B13/00

CPC classification number: B08B3/12 ,  B06B2201/71 ,  B08B3/02 ,  B08B2203/0288 ,  G10K11/352

Abstract: An ultrasonic cleaning apparatus which performs ultrasonic cleaning of a contamination attached to a surface of an object to be cleaned, by using a cleaning liquid to which ultrasonic waves are applied has a cleaning bath pooling the cleaning liquid, a support base on which the object to be cleaned is supported in the cleaning liquid, ultrasonic wave generation device for alternately focusing first ultrasonic waves having a frequency of 1 to 10 MHz and second ultrasonic waves having a frequency equal to or lower than ½ of that of the first ultrasonic waves toward the object to be cleaned, a focus position adjustment device of adjusting the distance between a focus position for the focus and the surface of the object to be cleaned, and moving device of moving at least any one of the ultrasonic wave generation device and the support base so that the effect on the surface of the object to be cleaned of the ultrasonic waves generated by the ultrasonic wave generation device is uniform.

Abstract translation: 一种超声波清洗装置，其通过使用施加了超声波的清洗液对附着在待清洁物体的表面上的污染物进行超声波清洗，具有将清洗液收集在一起的清洗液， 清洗液被支撑在清洗液中，超声波产生装置用于交替聚焦具有1至10MHz的频率的第一超声波和具有等于或低于第一超声波的频率的1/2的第二超声波朝向物体 要被清洁的焦点位置调节装置，调整焦点的焦点位置和待清洁物体的表面之间的距离以及移动超声波产生装置和支撑基底中的至少一个的移动装置， 由超声波发生装置产生的超声波对待清洁物体的表面的影响是均匀的。

公开(公告)号：US20090009027A1

公开(公告)日：2009-01-08

申请号：US12216392

申请日：2008-07-03

Applicant: Sameer I. Madanshetty

Inventor： Sameer I. Madanshetty

IPC: H02N2/00

CPC classification number: B06B1/0215 ,  B06B1/0603 ,  B06B1/067 ,  B06B2201/71 ,  B08B3/12 ,  G10K11/006 ,  G10K11/08 ,  G10K15/043 ,  Y10S134/902

Abstract: An apparatus to produce acoustic cavitation by controlling cavitation events in a liquid insonification medium utilizing a waveform to excite a transducer with a series of bipolar inharmonic tone bursts having medium recovery intervals between respective bursts so that the medium repeatedly recovers from cavitation events between bursts. The apparatus may be used to clean a semiconductor wafer, to de-coat a painted surface having, to induce a chemical reaction, and/or to provide recycled paper made from inked paper de-inked by cavitation. Cavitation events are generated using a transducer and a waveform generator, e.g., square wave tone bursts, to excite the transducer with a signal controlled in frequency, burst repetition rate, duty-cycle and/or amplitude, e.g., utilizing bursts having a frequency between 500 KHz and 10 MHz, and a duty cycle between 0.1% and 70%.

Abstract translation: 通过利用波形来控制气泡异常介质中的气蚀事件来产生声空化的装置，利用波形来激发具有在各个脉冲串之间具有介质恢复间隔的一系列双极性非对称音调脉冲串的换能器，使得介质从突发之间的空化事件重复地恢复。 该装置可以用于清洁半导体晶片，去除涂覆有引起化学反应的涂漆表面，和/或提供由通过空化脱墨的油墨纸制成的再生纸。 使用换能器和波形发生器（例如，方波音频脉冲串）来产生气蚀事件，以频率控制的信号激发换能器，突发重复率，占空比和/或幅度，例如利用具有在 500KHz和10MHz，占空比为0.1％至70％。

公开(公告)号：US20070205695A1

公开(公告)日：2007-09-06

申请号：US11704875

申请日：2007-02-09

Applicant: William Puskas

Inventor： William Puskas

IPC: B01J19/10

CPC classification number: B01J19/10 ,  B06B1/0284 ,  B06B2201/71

Abstract: The invention utilizes single and multiple frequency ultrasound generators driving single and multiple frequency resonant and harmonic transducer arrays at frequencies into the megasonic range. Generator signals that increase cavitation efficiency improve the performance of the cleaning, microbiological inactivation, sonochemistry or processing systems.

Abstract translation: 本发明利用单频和多频超声波发生器将频率上的单频和多频谐振和谐波换能器阵列驱动到兆声波范围。 增加气穴效率的发电机信号提高清洁，微生物灭活，声化学或加工系统的性能。

公开(公告)号：US07253551B2

公开(公告)日：2007-08-07

申请号：US11241961

申请日：2005-10-04

Applicant: Sameer I. Madanshetty

Inventor： Sameer I. Madanshetty

IPC: H02N2/00

CPC classification number: B06B1/0215 ,  B06B1/0603 ,  B06B1/067 ,  B06B2201/71 ,  B08B3/12 ,  G10K11/006 ,  G10K11/08 ,  G10K15/043 ,  Y10S134/902

Abstract: An apparatus to produce acoustic cavitation by controlling cavitation events in a liquid insonification medium utilizing a waveform to excite a transducer with a series of bipolar inharmonic tone bursts having medium recovery intervals between respective bursts so that the medium repeatedly recovers from cavitation events between bursts. The apparatus may be used to clean a semiconductor wafer, to de-coat a painted surface having, to induce a chemical reaction, and/or to provide recycled paper made from inked paper de-inked by cavitation. Cavitation events are generated using a transducer and a waveform generator, e.g., square wave tone bursts, to excite the transducer with a signal controlled in frequency, burst repetition rate, duty-cycle and/or amplitude, e.g., utilizing bursts having a frequency between 500 KHz and 10 MHz, and a duty cycle between 0.1% and 70%.

Abstract translation: 通过利用波形来控制气泡异常介质中的气蚀事件来产生声空化的装置，利用波形来激发具有在各个脉冲串之间具有介质恢复间隔的一系列双极性非对称音调脉冲串的换能器，使得介质从突发之间的空化事件重复地恢复。 该装置可以用于清洁半导体晶片，去除涂覆有引起化学反应的涂漆表面，和/或提供由通过空化脱墨的油墨纸制成的再生纸。 使用换能器和波形发生器（例如，方波音频脉冲串）来产生气蚀事件，以频率控制的信号激发换能器，突发重复率，占空比和/或幅度，例如利用具有在 500KHz和10MHz，占空比为0.1％至70％。

公开(公告)号：US20060000487A1

公开(公告)日：2006-01-05

申请号：US11217523

申请日：2005-08-31

Applicant: John Boyd ,  Andras Kuthi ,  Michael Smith ,  Thomas Anderson ,  William Thie

Inventor： John Boyd ,  Andras Kuthi ,  Michael Smith ,  Thomas Anderson ,  William Thie

IPC: B08B3/12

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/10 ,  B08B3/12 ,  H01L21/67057 ,  Y10S134/902

Abstract: A system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer.

Abstract translation: 清洁衬底的系统和方法包括包括换能器和衬底的兆声波室。 换能器朝向基板。 可变距离d分离换能器和基板。 该系统还包括具有耦合到换能器的输出的动态可调的RF发生器。

公开(公告)号：US20040256952A1

公开(公告)日：2004-12-23

申请号：US10825036

申请日：2004-04-15

Inventor： William Puskas

IPC: H02N002/00

CPC classification number: G01N27/06 ,  B01J19/10 ,  B06B1/0276 ,  B06B1/0284 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  B08B3/12 ,  B08B2203/002 ,  G01N29/032 ,  G01N29/222 ,  G01N29/348 ,  G01N2291/02818 ,  G01N2291/02863 ,  G10K11/004

Abstract: The invention provides systems, methods and apparatus for processing delicate parts within a process tank such as an ultrasonic tank. Typically, one or more transducers connect to the tank and respond to drive signals from a generator to produce ultrasound within process liquid within the tank. Specific features of the invention include: (1) a power up-sweep ultrasonic system for moving contaminants upwards within the tank by sweeping transducer drive signals from an upper frequency to a lower frequency without sweeping from the lower frequency to the upper frequency; (2) a multi-generator system for producing ultrasound at selected different frequencies within the tank by switching a common transducer bank to one of the generators in response to remote relays initiated by the user; (3) a probe sensing system for sensing process conditions within the tank including an enclosure for housing a sample liquid and one or more sensing transducers within the sample liquid, the transducers generating signals indicative of characteristics of the sample liquid, a subsystem analyzing the signals in feedback with the generator to modify process conditions; (4) variable voltage ultrasonic generator systems to accommodate varying world-wide voltage supplies; (5) a laminar process tank for efficiently pushing contaminants upwards in a tank; (6) a quick dump rinse tank including a pressure cavity to accelerate dumping processes; (7) an ultrasonic generating unit formed of a printed circuit board (PCB) and multiple transducers within the PCB; (8) an AC power system to produce an AC voltage at frequency f that is impressed across a capacitive element; and (9) various configurations of transducers, including acid-safe transducers, double-compression transducers, and transducers with increased reliability.

Abstract translation: 本发明提供了用于处理诸如超声波罐的处理罐内的精密部件的系统，方法和装置。 通常，一个或多个换能器连接到油箱并响应来自发电机的驱动信号，以在罐内的处理液体内产生超声波。 本发明的具体特征包括：（1）上行扫描超声波系统，用于通过从较高频率向较低频率扫描换能器驱动信号而不用从较低频率扫频到上频频段来将污染物向上移动; （2）多发生器系统，用于响应由用户发起的远程继电器，通过将公共换能器组切换到发电机中的一个，在罐内以选定的不同频率产生超声波; （3）用于感测罐内的工艺条件的探针感测系统，包括用于容纳样品液体和样品液体内的一个或多个感测传感器的外壳，换能器产生指示样品液体特性的信号，分析信号的子系统 用发电机反馈修改工艺条件; （4）可变电压超声波发生器系统，以适应不同的世界范围的电压源; （5）用于在罐中有效地将污染物向上推动的层流工艺罐; （6）快速倾倒冲洗槽，包括压力腔，以加速倾倒过程; （7）由印刷电路板（PCB）和PCB内的多个换能器构成的超声波发生单元; （8）交流电力系统，以产生跨过电容元件施加的频率f的交流电压; 和（9）各种配置的传感器，包括耐酸性传感器，双压缩传感器和具有更高可靠性的传感器。

公开(公告)号：US06832519B2

公开(公告)日：2004-12-21

申请号：US10817887

申请日：2004-04-06

Applicant: Seung Taek Baek

Inventor： Seung Taek Baek

IPC: G01N1511

CPC classification number: D06F37/203 ,  B06B1/045 ,  B06B2201/71 ,  G01H11/02

Abstract: A vibration detecting apparatus includes a bobbin having a moving path of desired length in an inner periphery of the bobbin; a core movable along the moving path in the inner periphery of the bobbin by vibration applied from exterior or vibration applied to the bobbin; and a coil wound on an outer periphery of the bobbin, the inductance of which being changed in accordance with the shift of the core.

Abstract translation: 振动检测装置包括在筒管的内周具有所需长度的移动路径的线轴， 可以通过外部施加的振动或施加到筒管的振动沿着线轴的内周沿着移动路径移动的芯体; 卷绕在筒管的外周的线圈，其电感根据芯的移动而变化。