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    MICROFABRICATED DEVICE
    115.
    发明申请
    MICROFABRICATED DEVICE 审中-公开
    微型设备

    公开(公告)号：US20100061870A1

    公开(公告)日：2010-03-11

    申请号：US11989984

    申请日：2006-08-01

    Applicant: Mark B. Cannell ,  Ralph Paul Cooney ,  Paul Kilmartin ,  Christian Soeller ,  Jadranka Travas-Sejdic

    Inventor： Mark B. Cannell ,  Ralph Paul Cooney ,  Paul Kilmartin ,  Christian Soeller ,  Jadranka Travas-Sejdic

    IPC: F04B39/00

    CPC classification number: F04B43/043 ,  A61M5/14228 ,  B81B3/0021 ,  B81B2201/036 ,  F04B43/082 ,  F04B43/12

    Abstract: A microfabricated device (10) includes a structure (12) defining a closed fluid delivery channel (14), the channel (14) having an inlet (16) and an opposed outlet (18). A conducting polymer actuator (20) is arranged within the fluid delivery channel (14). At least a part of the actuator (20) is configured to vary its cross sectional area in a direction transverse to a direction of fluid flow in the channel (14). An actuator control arrangement (22) is carried by the structure (12) for controlling the actuator (20) to cause the actuator (20) to expand and contract cyclically and sequentially along the length of the actuator (20) to vary the cross sectional area of the channel (14) cyclically and sequentially to effect a peristaltic pumping action to deliver fluid from the inlet (16) of the channel (14) to the outlet (18) of the channel (14).

    Abstract translation: 微加工装置（10）包括限定封闭的流体输送通道（14）的结构（12），所述通道（14）具有入口（16）和相对的出口（18）。 导电聚合物致动器（20）布置在流体输送通道（14）内。 致动器（20）的至少一部分被构造成在垂直于通道（14）中的流体流动方向的方向上改变其横截面积。 致动器控制装置（22）由结构（12）承载，用于控制致动器（20），以使致动器（20）沿致动器（20）的长度循环地和顺序地膨胀和收缩，以改变横截面 通道（14）的周边和顺序的区域以实现蠕动泵送动作，以将流体从通道（14）的入口（16）输送到通道（14）的出口（18）。

    SYSTEM AND METHOD FOR MINIATURIZATION OF SYNTHETIC JETS
    116.
    发明申请
    SYSTEM AND METHOD FOR MINIATURIZATION OF SYNTHETIC JETS 有权
    合成喷嘴微型化系统及方法

    公开(公告)号：US20100053891A1

    公开(公告)日：2010-03-04

    申请号：US12198267

    申请日：2008-08-26

    Applicant: Mehmet Arik ,  Stanto Earl Weaver

    Inventor： Mehmet Arik ,  Stanto Earl Weaver

    IPC: H05K7/20 ,  H02N2/00 ,  H01L21/00

    CPC classification number: B81B7/0093 ,  B81B2201/036 ,  B81B2201/058 ,  B81B2203/0127 ,  B81C1/00158 ,  F04B45/047 ,  H01L23/467 ,  H01L41/0973 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

    Abstract translation: 微机电（MEM）合成射流致动器包括具有延伸穿过其中的空腔的半导体衬底，使得第一开口形成在半导体衬底的第一表面中，并且第二开口形成在半导体的第二表面中 基质。 第一柔性膜形成在半导体衬底的前表面的至少一部分上并在第一开口上延伸。 第一柔性膜还包括与第一开口对准的孔口。 MEM合成射流致动器还包括第二柔性膜，其形成在半导体衬底的第二表面的至少一部分上并且在第二开口上延伸，以及一对致动器元件，其耦合到柔性膜并与 以选择性地引起第一和第二柔性膜的位移。

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