公开(公告)号：US06618129B2

公开(公告)日：2003-09-09

申请号：US09828025

申请日：2001-04-06

Applicant: J. Christopher Dries ,  Marshall Cohen

Inventor： J. Christopher Dries ,  Marshall Cohen

IPC: G01N2100

CPC classification number: H04B10/07955 ,  G01J3/2803 ,  G01J3/447 ,  G01J4/04 ,  G02B6/29371 ,  G02B6/29385 ,  H04B10/077 ,  H04J14/02

Abstract: An apparatus for use in wave division multiplexing optical telecommunication systems includes a dual photodiode array which converts parallel and perpendicularly polarized light beams at given wavelengths to electrical signals which are digitized and used to rapidly and simultaneously determine all wavelengths and associated components of power and angle of polarization. This information can be displayed for monitoring purposes, or can be used to control signals travelling through optical fiber.

公开(公告)号：US20030117624A1

公开(公告)日：2003-06-26

申请号：US10298435

申请日：2002-11-18

Inventor： James Maurice Daniels

IPC: G01J004/00

CPC classification number: G01J4/04

Abstract: This device makes measurements of the intensity of light in four different polarizations, chosen for maximum accuracy and efficiency. In the nullmeasuring headnull the light passes through two liquid crystal waveplates and a polarizing filter before falling on a light sensitive element. Different interchangeable measuring heads, using this principle, can be made for different applications. The device has electronic control and display circuits, coordinated by a microprocessor. With a photodiode as the light sensitive element, the device is a portable stand alone polarimeter which displays the polarization parameters in whatever representation the operator chooses. With a digital camera as the light sensitive element, the device produces four scenes which can be processed digitally and uploaded as a scene seen in any arbitrary polarization. Also, the unpolarized component can be filtered out; something impossible with physical filters placed before the lens.

Abstract translation: 该设备可以测量四种不同极化的光强度，以获得最大的精度和效率。 在“测量头”中，光在光敏元件落下之前通过两个液晶波片和偏振滤光片。 使用这一原理的不同的可互换的测量头可以用于不同的应用。 该设备具有电子控制和显示电路，由微处理器协调。 使用光电二极管作为光敏元件，该器件是便携式独立式偏振计，其以操作者选择的任何表示方式显示偏振参数。 使用数码相机作为感光元件，该设备产生四个可以数字处理的场景，并且作为任何极化中看到的场景上传。 此外，非偏振组件可以过滤掉; 物理滤镜放置在镜头之前是不可能的。

公开(公告)号：US20030103214A1

公开(公告)日：2003-06-05

申请号：US10001304

申请日：2001-11-02

Inventor： Jay S. VanDelden

IPC: G01B009/02

CPC classification number: G01J4/04

Abstract: A method and apparatus for instantaneous measurement of the complete state of polarization across an image. A polarimetric encoding scheme is employed to uniquely map the spatially-varying state of polarization across a partially-polarized image to irradiance variations in a polarization-encoded interference pattern. In one embodiment of the method, two spatially-varying retarders and a linear polarizer comprise an interferometric polarization interrogating filter assembly. When a conventional irradiance image is presented to the filter assembly, it is decomposed into polarized and unpolarized components. While the unpolarized component passes through the filter substantially unaffected, the polarized component gives rise to a M polarization-encoded interference pattern that overlaps the scene so that local regions within the image having specific polarization content may be recognized. Discretization of the interference pattern by an array of electronic point detectors produces an electronic image from which the polarimetric parameters of interest may be calculated using a mathematical reconstruction algorithm.

Abstract translation: 一种用于瞬时测量跨越图像的完整极化状态的方法和装置。 采用极化编码方案将偏光图像上的空间变化状态唯一地映射到偏振编码干涉图案中的辐照度变化。 在该方法的一个实施例中，两个空间变化的延迟器和线性偏振器包括干涉式偏振询问过滤器组件。 当传统的辐照度图像呈现给滤光片组件时，它被分解为极化和非偏振组件。 当非偏振组件基本上不受影响时，偏振分量产生与场景重叠的M偏振编码干涉图案，使得可以识别出具有特定偏振内容的图像内的局部区域。 通过电子点检测器的阵列离散干涉图案产生电子图像，利用数学重建算法可以从中计算感兴趣的极化参数。

公开(公告)号：US20030067602A1

公开(公告)日：2003-04-10

申请号：US10146228

申请日：2002-05-14

Inventor： Jayantilal S. Patel ,  Zhizhong Zhuang ,  John A. Yeazell

IPC: G01J004/00

CPC classification number: G01J4/04 ,  G01J3/447 ,  G01J4/00 ,  G01M11/331

Abstract: Measurements at multiple distinct polarization measurement states are taken to define the polarization state of an input, for example to calculate a Stokes vector. High accuracy and/or capability of frequent recalibration are needed, due to the sensitivity of measurement to retardation of the input signal. A multiple measurement technique takes a set of spatially and/or temporally distinct intensity measurements through distinct waveplates and polarizers. These can be optimized as to orientation and retardation using initial choices and also using tunable elements, especially controllable birefringence elements. A device matrix defines the response of the device at each of the measurement states. The matrix can be corrected using an iterative technique to revise the device matrix, potentially by automated recalibration. Two input signals (or preferably the same signal before and after a polarization transform) that are known to have a common polarization attribute or other attribute relationship are measured and the common attribute and/or attribute relationship is derived for each and compared. The device matrix is revised, for example by iterative correction or by random search of candidates to improve the accuracy of the device matrix. Optional tunable spectral and temporal discrimination provide additional functions.

Abstract translation: 采用多个不同极化测量状态的测量来定义输入的偏振状态，例如计算斯托克斯矢量。 由于测量对输入信号的延迟的敏感性，需要高精度和/或频繁重新校准的能力。 多重测量技术通过不同的波片和偏振器采取一组空间和/或时间上不同的强度测量。 可以使用初始选择以及使用可调谐元件，特别是可控双折射元件来定向和延迟这些。 器件矩阵定义了器件在每个测量状态下的响应。 可以使用迭代技术校正矩阵，以便通过自动重新校准来修改器件矩阵。 测量已知具有共同极化属性或其他属性关系的两个输入信号（或优选地，在偏振变换之前和之后的相同信号），并且为每个并且进行比较导出公共属性和/或属性关系。 修改设备矩阵，例如通过迭代校正或通过随机搜索候选来改进设备矩阵的准确性。 可选的可调谐光谱和时间辨别提供附加功能。

公开(公告)号：US20030058442A1

公开(公告)日：2003-03-27

申请号：US10196593

申请日：2002-07-17

Inventor： Gyozo Garab ,  Istvan Pomozi ,  Georg Weiss ,  Reinhard Jorgens

IPC: G01J004/00

CPC classification number: G02B21/002 ,  G01J4/04 ,  G01N21/21

Abstract: The invention relates to a method and apparatus for determining the polarization properties of light emitted, reflected or transmitted by a material using a laser scanning microscope with the tested material being illuminated point by point with a laser beam of known polarization state. According to the invention the light beam with a polarization state modified by the material or the light emitted by the material is being examined by measuring the intensity of two different polarization components of a selected light beam received from each point of said material essentially at the same time and assigning a signal obtained by processing the two intensity signals to a respective point of an image of said material. The apparatus has a polarization state generator between the laser light source and the material being tested, and a detector in a light beam for determining the intensity of light with a polarization state modified by the material or the intensity of light emitted by the material, the improvement of which is that a means for dividing the polarization components in space or time is used in front of the detector.

Abstract translation: 本发明涉及一种用于使用激光扫描显微镜来测定由材料发射，反射或透射的光的偏振特性的方法和装置，其中测试材料用已知偏振状态的激光束逐点点亮。 根据本发明，通过材料或由材料发射的光改变的偏振状态的光束正在通过测量从基本上相同的所述材料的每个点接收的所选择的光束的两个不同的偏振分量的强度来检查 并将通过将两个强度信号处理得到的信号分配给所述材料的图像的相应点。 该装置具有在激光光源与被测试材料之间的偏振状态发生器，以及光束中的检测器，用于确定由该材料发出的材料或光的强度改变的偏振状态的光的强度， 改进之处在于在检测器的前面使用用于将偏振分量在空间或时间上划分的装置。

公开(公告)号：US06535284B1

公开(公告)日：2003-03-18

申请号：US09579338

申请日：2000-05-25

Applicant: Damian Hajduk ,  Eric Carlson

Inventor： Damian Hajduk ,  Eric Carlson

IPC: G01J400

CPC classification number: G01N21/21 ,  B01J2219/00286 ,  B01J2219/00315 ,  B01J2219/00585 ,  B01J2219/00659 ,  B01J2219/00707 ,  B01J2219/0072 ,  B01J2219/00745 ,  C40B40/18 ,  C40B60/14 ,  G01J4/04 ,  G01N2201/0813

Abstract: A method and apparatus for characterizing and screening an array of material samples is disclosed. The apparatus includes a sample block having a plurality of regions for containing the material samples, a polarized light source to illuminate the materials, an analyzer having a polarization direction different than the polarization direction of the polarized light source, and a detector for analyzing changes in the intensity of the light beams. The light source, together with a polarizer, may include a plurality of light beams to simultaneously illuminate the entire array of materials with linearly polarized light so that characterization and screening can be performed in parallel. In addition, the materials in the sample block maybe subjected to different environmental conditions or mechanical stresses, and the detector analyzes the array as a function of the different environmental conditions or mechanical stresses.

Abstract translation: 公开了一种表征和筛选材料样品阵列的方法和装置。 该装置包括具有用于容纳材料样本的多个区域的样本块，用于照射材料的偏振光源，具有与偏振光源的偏振方向不同的偏振方向的分析器，以及用于分析变化的检测器 光束的强度。 光源与偏振器一起可以包括多个光束，以同时以线性偏振光照射整个材料阵列，从而可以并行执行表征和筛选。 此外，样品块中的材料可能经受不同的环境条件或机械应力，并且检测器根据不同的环境条件或机械应力来分析阵列。

公开(公告)号：US20030030806A1

公开(公告)日：2003-02-13

申请号：US10042592

申请日：2002-01-09

Inventor： Martin Ebert ,  Li Chen

IPC: G01J004/00

CPC classification number: G01N21/211 ,  G01J4/04

Abstract: An ellipsometric apparatus provides two impinging focused probe beams directed to reflect off the sample along two mutually distinct and preferably substantially perpendicular directions. A rotating stage rotates sections of the wafer into the travel area defined by two linear axes of two perpendicularly oriented linear stages. As a result, an entire wafer is accessed for measurement with the linear stages having a travel range of only half the wafer diameter. The reduced linear travel results in a small travel envelope occupied by the wafer and consequently in a small footprint of the apparatus. The use of two perpendicularly directed probe beams permits measurement of periodic structures along a preferred direction while permitting the use of a reduced motion stage.

Abstract translation: 椭圆仪器提供了两个撞击的聚焦探针光束，其被引导以沿两个相互不同的，优选地基本垂直的方向反射出样品。 旋转台将晶片的部分旋转到由两个垂直取向的线性级的两个线性轴限定的行进区域中。 结果，整个晶片被访问用于测量，线性级的行程范围仅为晶片直径的一半。 减小的线性行程导致由晶片占据的小行程信封，因此在该设备的小占地面积内。 使用两个垂直定向的探针光束允许沿优选方向测量周期性结构，同时允许使用减小的运动级。

公开(公告)号：USRE37752E1

公开(公告)日：2002-06-18

申请号：US09010838

申请日：1998-01-22

Applicant: Lawrence B. Wolff

Inventor： Lawrence B. Wolff

IPC: H04N5225

CPC classification number: G01J4/04

Abstract: A polarization viewer comprising a mechanism for forming a broadview image having a spectral width greater than 2 angstroms and 0.50° based on polarization information of a scene. The polarization viewer is also comprised of a mechanism for providing polarization information to the forming mechanism. The providing mechanism is in communication with the forming mechanism. In a first embodiment, the providing mechanism includes a camera mechanism in communication with the forming mechanism. The camera mechanism includes a fixed polarizer analyzer disposed such that electromagnetic radiation entering the camera mechanism passes through the polarizer analyzer. The providing mechanism can also include a mechanism for steering a polarization plane of the radiation. The steering mechanism is disposed such that radiation passing through the polarizer analyzer first passes through the steering mechanism. The steering mechanism preferably includes a first twist crystal and at least a second twist crystal aligned with the first twist crystal such that radiation passing through the first crystal then passes through the second crystal. Each crystal has a first state and a second state. The first state does not effect the polarization plane of the radiation as the radiation passes through the crystal. The second state rotates the polarization plane of the radiation as the radiation passes through the crystal.

Abstract translation: 一种偏振观察器，包括用于基于场景的偏振信息形成具有大于2埃的光谱宽度和0.50°的宽视角图像的机构。 偏振观察器还包括用于向成形机构提供偏振信息的机构。 提供机构与成形机构连通。 在第一实施例中，提供机构包括与成形机构连通的相机机构。 相机机构包括固定的偏振器分析器，其设置成使得进入相机机构的电磁辐射通过偏振器分析器。 提供机构还可以包括用于转向辐射的偏振面的机构。 转向机构被布置成使得穿过偏振器分析器的辐射器首先通过转向机构。 转向机构优选地包括第一扭转晶体和与第一扭转晶体对准的至少第二扭转晶体，使得通过第一晶体的辐射然后通过第二晶体。 每个晶体都具有第一状态和第二状态。 当辐射通过晶体时，第一状态不影响辐射的偏振平面。 当辐射通过晶体时，第二状态旋转辐射的偏振面。

公开(公告)号：US20020054290A1

公开(公告)日：2002-05-09

申请号：US10036062

申请日：2001-10-19

Inventor： Gerard H. Vurens ,  David L. Klein

IPC: G01J004/00

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: An optical measurement system for evaluating the surface of a substrate or the thickness and optical characteristics of a thin film layer overlying the substrate includes a light source for generating a light beam, a static polarizing element for polarizing the light beam emanating from the light source, and a measurement system for measuring the light reflected from the substrate location. The measurement system includes a static beam splitting element for splitting the light reflected from the substrate into s-polarized light and p-polarized light. The measurement system further includes two optical sensors for separately measuring the amplitude of the s-polarized light and the intensity of the p-polarized light. A control system analyzes the measured amplitude of the s-polarized light and the p-polarized to determine changes in the topography of substrate or changes in the thickness or optical characteristics of the thin film layer.

Abstract translation: 用于评价基板的表面的光学测量系统或覆盖基板的薄膜层的厚度和光学特性包括用于产生光束的光源，用于使从光源发出的光束偏振的静态偏振元件， 以及用于测量从基板位置反射的光的测量系统。 测量系统包括用于将从衬底反射的光分解成s偏振光和p偏振光的静态分束元件。 该测量系统还包括用于分别测量s偏振光的振幅和p偏振光的强度的两个光学传感器。 控制系统分析s偏振光和p偏振的测量幅度，以确定衬底的形貌变化或薄膜层的厚度或光学特性的变化。

公开(公告)号：US06384916B1

公开(公告)日：2002-05-07

申请号：US09715921

申请日：2000-11-17

Applicant: Thomas E. Furtak

Inventor： Thomas E. Furtak

IPC: G01J404

CPC classification number: G01J4/04 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211

Abstract: The parallel detecting spectroscopic ellipsometer/polarimeter sensor has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample within a processing chamber. It includes a multi-spectral source of radiation for producing a collimated beam of radiation directed towards the surface of the sample through a polarizer. The thus polarized collimated beam of radiation impacts and is reflected from the surface of the sample, thereby changing its polarization state due to the intrinsic material properties of the sample. The light reflected from the sample is separated into four separate polarized filtered beams, each having individual spectral intensities. Data about said four individual spectral intensities is collected within the processing chamber, and is transmitted into one or more spectrometers. The data of all four individual spectral intensities is then analyzed using transformation algorithms, in real-time.

Abstract translation: 平行检测光谱椭偏仪/偏振计传感器没有移动部件，可以实时地进行处理室内样品的薄膜表面性质的现场监测。 它包括用于产生通过偏振器指向样品表面的准直辐射束的多光谱辐射源。 这样偏振的准直辐射光束会从样品表面反射并反射，从而由于样品的固有材料特性而改变其偏振状态。 从样品反射的光被分离成四个分离的偏振滤光束，每个具有单独的光谱强度。 关于所述四个单个光谱强度的数​​据被收集在处理室内，并被传送到一个或多个光谱仪中。 然后使用变换算法实时分析所有四个单独光谱强度的数​​据。