Mems Resonator and Manufacturing Method of the Same
    122.
    发明申请
    Mems Resonator and Manufacturing Method of the Same 有权
    Mems谐振器及其制造方法

    公开(公告)号:US20110121908A1

    公开(公告)日:2011-05-26

    申请号:US13012099

    申请日:2011-01-24

    CPC classification number: H03H3/0073 H03H9/1057 Y10S977/721

    Abstract: A resonator with a microeletromechanical system structure has a transistor with a gate electrode, a capacitor with an upper and lower electrode, a substrate, a first and second structure of the microelectromechanical system structure, a first silicon layer of the first structure and the upper electrode formed above the substrate, a second silicon layer of the second structure and the gate electrode unit formed above the substrate, and an insulating film formed above the capacitor and the transistor, the insulating film having an opening for placement of the second structure.

    Abstract translation: 具有微机电系统结构的谐振器具有具有栅电极的晶体管,具有上电极和下电极的电容器,基板,微机电系统结构的第一和第二结构,第一结构的第一硅层和上电极 形成在基板上方,第二结构的第二硅层和形成在基板上的栅电极单元,以及形成在电容器和晶体管上方的绝缘膜,绝缘膜具有用于放置第二结构的开口。

    MEMS resonator and manufacturing method of the same
    123.
    发明授权
    MEMS resonator and manufacturing method of the same 有权
    MEMS谐振器及其制造方法相同

    公开(公告)号:US07892875B2

    公开(公告)日:2011-02-22

    申请号:US12684336

    申请日:2010-01-08

    CPC classification number: H03H3/0073 H03H9/1057 Y10S977/721

    Abstract: A method is for manufacturing a microelectromechanical system resonator having a semiconductor device and a microelectromechanical system structure unit formed on a substrate. The method includes: forming a lower electrode of an oxide-nitride-oxide capacitor unit included in the semiconductor device using a first silicon layer; forming, using a second silicon layer, a substructure of the microelectromechanical system structure unit and an upper electrode of the oxide-nitride-oxide capacitor unit included in the semiconductor device; and forming, using a third silicon layer, a superstructure of the microelectromechanical system structure unit and a gate electrode of a complementary metal oxide semiconductor circuit unit included in the semiconductor device.

    Abstract translation: 一种用于制造具有形成在基板上的半导体器件和微机电系统结构单元的微机电系统谐振器的方法。 该方法包括:使用第一硅层形成包括在半导体器件中的氧化物 - 氮化物 - 氧化物电容器单元的下电极; 使用第二硅层形成微机电系统结构单元的子结构和包括在半导体器件中的氧化物 - 氮化物 - 氧化物电容器单元的上电极; 以及使用第三硅层形成所述微机电系统结构单元的上部结构和包括在所述半导体器件中的互补金属氧化物半导体电路单元的栅电极。

    OSCILLATOR
    124.
    发明申请
    OSCILLATOR 有权
    振荡器

    公开(公告)号:US20100244967A1

    公开(公告)日:2010-09-30

    申请号:US12723776

    申请日:2010-03-15

    Applicant: Toru WATANABE

    Inventor: Toru WATANABE

    CPC classification number: H03L5/00 H03B5/364

    Abstract: An oscillator includes: a vibrator having a first electrode and a second electrode disposed with a gap with the first electrode; a reference voltage supply circuit adapted to supply a reference voltage; and a voltage adjustment circuit having a step-up circuit operating in response to input of clock pulses and adapted to convert the reference voltage into a voltage of a predetermined level and to output the voltage of the predetermined level, wherein the vibrator is configured so as to apply the voltage of the predetermined level, which is output from the voltage adjustment circuit, between the first electrode and the second electrode, and the clock pulses to be input into the step-up circuit are obtained using the vibrator as a source.

    Abstract translation: 振荡器包括:振子,具有第一电极和与第一电极间隔设置的第二电极; 参考电压供应电路,其适于提供参考电压; 以及电压调节电路,其具有响应于时钟脉冲的输入而工作的升压电路,并且适于将参考电压转换成预定电平的电压并输出预定电平的电压,其中所述振动器被配置为 将从电压调节电路输出的预定电平的电压施加在第一电极和第二电极之间,并且使用振动器作为源获得要输入到升压电路的时钟脉冲。

    Electronic device and method for manufacturing thereof
    125.
    发明授权
    Electronic device and method for manufacturing thereof 有权
    电子装置及其制造方法

    公开(公告)号:US07709912B2

    公开(公告)日:2010-05-04

    申请号:US11875383

    申请日:2007-10-19

    Abstract: An electronic device, including a substrate, a functional structure constituting a functional element formed on the substrate, and a cover structure forming a cavity portion in which the functional structure is disposed, is disclosed. In the electronic device, the cover structure includes a laminated structure of an interlayer insulating film and a wiring layer, the laminated structure being formed on the substrate in such a way that it surrounds the cavity portion, and the cover structure has an upside cover portion covering the cavity portion from above, the upside cover portion being formed with part of the wiring layer that is disposed above the functional structure.

    Abstract translation: 公开了一种电子设备,包括基板,构成在基板上形成的功能元件的功能结构,以及形成其中设置有功能结构的空腔部分的盖结构。 在电子设备中,盖结构包括层间绝缘膜和布线层的叠层结构,层叠结构以包围空腔部分的方式形成在基板上,并且盖结构具有上侧盖部分 从上方覆盖空腔部分,上侧盖部分形成有设置在功能结构上方的布线层的一部分。

    Head suspension assembly and storage device
    126.
    发明授权
    Head suspension assembly and storage device 失效
    头悬挂装配和存放装置

    公开(公告)号:US07688551B2

    公开(公告)日:2010-03-30

    申请号:US11605703

    申请日:2006-11-29

    CPC classification number: G11B5/4826 G11B5/4833

    Abstract: A hinge plate is bonded to a base plate and a load beam in a head suspension assembly. The load beam includes a wide section and a narrow section extending forward from the front end of the wide section. The head suspension assembly allows the load beam to have a narrower width based on the narrow section. The load beam is thus allowed to enjoy a reduced weight. The mass is reduced at a position distanced from the centerline of the load beam. This results in a reduction in the inertial force around the centerline in the load beam. The inventors have demonstrated that the resonance frequency of the first torsion mode is allowed to fall in a higher frequency range. The resonance of the head suspension assembly can be reduced.

    Abstract translation: 铰链板结合到头板悬挂组件中的基板和负载梁。 负载梁包括宽的部分和从宽部分的前端向前延伸的窄部分。 头悬挂组件允许负载梁基于窄部分具有较窄的宽度。 因此允许负载梁享受减轻的重量。 在远离负载梁的中心线的位置处,质量减小。 这导致负载梁中心线周围的惯性力减小。 发明人已经证明,允许第一扭转模式的共振频率落在更高的频率范围内。 可以减小头悬挂组件的共振。

    HEAD SLIDER AND METHOD OF MANUFACTURING HEAD SUSPENSION ASSEMBLY
    128.
    发明申请
    HEAD SLIDER AND METHOD OF MANUFACTURING HEAD SUSPENSION ASSEMBLY 审中-公开
    头滑块及制造头枕悬挂组件的方法

    公开(公告)号:US20090195931A1

    公开(公告)日:2009-08-06

    申请号:US12331969

    申请日:2008-12-10

    CPC classification number: G11B5/102 G11B5/4826 G11B5/6052

    Abstract: A method of manufacturing a head suspension assembly for mounting a head slider on a suspension includes an irradiating light step, acquiring position information step and head slider mounting step. The irradiating light step is the step of irradiating light on a protective film and a marker at an incidence angle θ. The acquiring position information step is the step of acquiring position information of the marker by measuring reflected light from the protective film and that of the marker. The head slider mounting step is the step of mounting the head slider at a predetermined position of the suspension by using the difference of the intensity of reflected light from the protective film and that of the marker.

    Abstract translation: 制造用于将悬挂头滑块安装在悬架上的头悬挂组件的方法包括:照射光步骤,获取位置信息步骤和头部滑块安装步骤。 照射光步骤是以入射角θ照射保护膜和标记物的光的步骤。 获取位置信息步骤是通过测量来自保护膜的反射光和标记的反射光来获取标记的位置信息的步骤。 磁头滑块安装步骤是通过使用来自保护膜的反射光的强度与标记的反射光的差异将磁头滑块安装在悬架的预定位置的步骤。

    HEAD SLIDER OF MAGNETIC DISK DEVICE
    129.
    发明申请
    HEAD SLIDER OF MAGNETIC DISK DEVICE 审中-公开
    磁盘设备头滑块

    公开(公告)号:US20090059432A1

    公开(公告)日:2009-03-05

    申请号:US12103940

    申请日:2008-04-16

    CPC classification number: G11B5/6082 G11B5/6064

    Abstract: Lubricant on a rotating recording medium can attach to a slider, particularly on the pad formed in the proximity of the trailing edge. In the slider of this invention, lubricant is not accumulated in the vicinity of the trailing edge and can be drawn to the trailing edge and dispersed constantly. The head slider includes a center pad formed on an air bearing surface in the vicinity of the center of a trailing edge of the slider. A trailing pad is formed so as to bridge a trailing edge of the center pad and the trailing edge of the slider. The trailing pad is formed lower than a highest surface of the center pad and higher than a lowest surface of the slider.

    Abstract translation: 在旋转记录介质上的润滑剂可以附着到滑块,特别是在后缘附近形成的垫上。 在本发明的滑块中,润滑剂不会积聚在后缘附近,并且可以被牵引到后缘并且不断地分散。 磁头滑块包括形成在滑块的后缘中心附近的空气轴承表面上的中心焊盘。 形成后衬垫以便桥接中心衬垫的后缘和滑块的后缘。 尾垫形成为低于中心垫的最高表面并且高于滑块的最低表面。

    SUSPENSION, HEAD GIMBALS ASSEMBLY, METHOD FOR MANUFACTURING HEAD GIMBALS ASSEMBLY, STORAGE APPARATUS, AND APPARATUS FOR MANUFACTURING HEAD GIMBALS ASSEMBLY
    130.
    发明申请
    SUSPENSION, HEAD GIMBALS ASSEMBLY, METHOD FOR MANUFACTURING HEAD GIMBALS ASSEMBLY, STORAGE APPARATUS, AND APPARATUS FOR MANUFACTURING HEAD GIMBALS ASSEMBLY 审中-公开
    悬挂,头盔组件,制造头盔组件的方法,储存装置和制造头盔组件的装置

    公开(公告)号:US20090059431A1

    公开(公告)日:2009-03-05

    申请号:US12038354

    申请日:2008-02-27

    CPC classification number: B23K1/0008 G11B5/4826 Y10T29/49968

    Abstract: This head gimbals assembly has a head slider, a flexure, and a load beam. The head slider has a head element and slider-side connection terminals. The flexure has a free end, a fixed end, a slider mounting portion and suspension-side connection terminals connected to the slider-side connection terminals. The load beam fixes a fixed end of the flexure on the side opposite to a flexure surface on which the head slider is mounted a connecting portion for interconnecting the suspension-side connection terminals and the slider mounting portion has higher resiliency than other portion of the connecting portion. According to a suspension in the present embodiment, a head gimbals assembly can be easily manufactured without wastefully discarding the suspension even when the desired evaluation result is not obtained because of problems in the head characteristics and the floating surface of the head slider.

    Abstract translation: 该头部万向节组件具有头部滑动件,挠曲件和负载梁。 头滑块具有头元件和滑块侧连接端子。 挠曲件具有自由端,固定端,滑块安装部和连接到滑块侧连接端子的悬架侧连接端子。 负载梁将挠性件的固定端固定在安装有磁头滑块的挠曲表面的相对侧上,用于互连悬挂侧连接端子的连接部分和滑块安装部分具有比连接的其它部分更高的弹性 一部分。 根据本实施例的悬架,即使当由于头部滑动头的头部特性和浮动面的问题而不能获得期望的评估结果时,也可以容易地制造头部万向节组件而不浪费地丢弃悬架。

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