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公开(公告)号：US06114794A
公开(公告)日：2000-09-05
申请号：US232939
申请日：1999-01-19
Applicant: Vijayakumar R. Dhuler , Robert L. Wood , Ramaswamy Mahadevan
Inventor： Vijayakumar R. Dhuler , Robert L. Wood , Ramaswamy Mahadevan
IPC: B81B3/00 , B81C1/00 , F03G7/06 , F15C5/00 , F16K99/00 , G02B6/38 , G02B6/42 , H01H1/00 , H01H9/14 , H01H61/00 , H01H61/02 , H01H65/00 , H01H67/26 , H04Q1/16 , H01L37/00 , H02N10/00
CPC classification number: F16K99/0001 , B81B3/0024 , B81B3/0054 , F03G7/06 , F15C5/00 , F16K99/0011 , F16K99/0044 , H01H1/0036 , H01H61/02 , B81B2201/031 , B81B2201/054 , B81B2203/0109 , B81B2203/051 , F16K2099/0071 , F16K2099/0074 , F16K2099/008 , F16K99/0034 , G02B6/3803 , G02B6/4226 , H01H2001/0042 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , H01H61/00 , H01H67/26 , H01H9/14 , Y10T29/49105
Abstract: A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.
Abstract translation: 提供了一种MEMS致动器，其在消耗合理的功率的同时产生显着的力和位移。 MEMS致动器包括微电子基板，在基板上的间隔开的支撑件和在间隔开的支撑件之间延伸的金属拱形梁。 MEMS致动器还包括用于加热拱形梁以进一步拱起梁的加热器。 为了有效地将热量从加热器传递到金属拱形梁，金属拱形梁从加热器延伸过去并且稍微间隔开。 因此，MEMS致动器有效地将由加热器产生的热量转换成金属拱形梁的机械运动。 还提供了一系列其它MEMS器件，例如继电器，开关阵列和阀，其包括一个或多个MEMS致动器以便利用其有效的操作特性。 此外，还提供了一种制造MEMS致动器的方法。
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公开(公告)号：US20190219193A1
公开(公告)日：2019-07-18
申请号：US15869562
申请日：2018-01-12
Applicant: International Business Machines Corporation
Inventor： Yongchun XIN , Jonathan FRY , Daniel PIPER , Jang SIM
CPC classification number: F16K99/0005 , B01L3/502769 , B01L2200/027 , B81B7/02 , B81B2201/03 , B81B2201/054 , B81C1/00119 , F16K99/0011 , F16K99/0026 , F16K2099/0074
Abstract: A micro electrical mechanical system (MEMS) valve is provided. The MEMS valve includes first and second bodies, a medium and a thermal element. The first body defines a first channel and a second channel intersecting the first channel. The second body defines a third channel and is movable within the first channel between first and second positions. When the second body is at the first positions, the second and third channels align and permit flow through the second and third channels. When the second body is at the second positions, the second and third channels misalign and inhibit flow through the second channel. The medium is charged into the first channel at opposite sides of the second body. The thermal element is proximate to the first channel and is operable to cause the medium to drive movements of the second body to the first or the second positions.
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公开(公告)号：US20180111822A1
公开(公告)日：2018-04-26
申请号：US15573241
申请日：2016-03-31
Applicant: SONY CORPORATION
Inventor： Mitsuo HASHIMOTO
IPC: B81B3/00
CPC classification number: B81B3/0072 , B81B3/0051 , B81B2201/018 , B81B2201/0235 , B81B2201/054 , B81B2203/0118 , B81B2203/0136 , B81B2203/04 , B81B2203/051 , B81B2203/053 , H01H59/00
Abstract: To provide a contact point structure of an electronic device capable of maintaining stable impact resistance. There is provided a contact point structure including: a base portion that is a semiconductor substrate; a movable contact point portion that is supported by the base portion and is a part of a movable member capable of being driven in a predetermined direction; and a fixed contact point portion that faces the movable contact point portion. The fixed contact point portion includes a fixed portion that is supported by the base portion and an extending member that extends from the fixed portion and is capable of being displaced relative to the fixed portion.
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公开(公告)号：US20170001195A1
公开(公告)日：2017-01-05
申请号：US15173262
申请日：2016-06-03
Applicant: California Institute of Technology
Inventor： Marc Alexander Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus Enzelberger , Mark L. Adams , Carl L. Hansen
CPC classification number: B05D3/04 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00621 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/06 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B65B31/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6832 , C12Q1/6874 , C30B29/54 , F04B43/043 , F15C1/06 , F15C3/00 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0094 , Y10T137/0324 , Y10T137/0379 , Y10T137/0424 , Y10T137/206 , Y10T137/2082 , Y10T137/2164 , Y10T137/2169 , Y10T137/2174 , Y10T137/2202 , Y10T137/2224 , Y10T137/3084 , Y10T137/7837 , Y10T137/86027 , Y10T156/10 , Y10T428/24479 , Y10T428/24612 , C12Q2535/125
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
Abstract translation: 一种制造弹性体结构的方法，包括：在第一微加工模具的顶部上形成第一弹性体层，所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层，所述第二微加工模具具有第二凸起突起，所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上，使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上，使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。
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公开(公告)号：US09162226B2
公开(公告)日：2015-10-20
申请号：US13470126
申请日：2012-05-11
Applicant: Gregory A. Cooksey , Francisco Javier Atencia-Fernandez
Inventor： Gregory A. Cooksey , Francisco Javier Atencia-Fernandez
CPC classification number: B01L3/502738 , B01L3/502707 , B01L3/5055 , B01L2300/0816 , B01L2300/0887 , B29C65/4815 , B29C65/4825 , B29C65/483 , B29C65/4855 , B29C65/5021 , B29C65/5057 , B29C66/4322 , B29C66/4326 , B29C66/71 , B29L2031/756 , B81B2201/054 , B81C1/00119 , Y10T137/85938 , Y10T156/1049 , B29K2083/00
Abstract: A method and system for a folding microfluidic device comprises creating at least one folding line in a material, forming a plurality of layers of a microfluidic device in said material, and folding the material at the fold lines to create a self-aligned multilayered microfluidic device. The material can comprise a carrier material with an adhesive layer on the top and bottom surfaces.
Abstract translation: 用于折叠微流体装置的方法和系统包括在材料中形成至少一个折叠线，在所述材料中形成多个微流体装置层，并在折叠线处折叠材料以产生自对准的多层微流体装置 。 该材料可以包括在顶表面和底表面上具有粘合剂层的载体材料。
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Patent Agency Ranking
公开(公告)号：US09015945B2
公开(公告)日：2015-04-28
申请号：US13123050
申请日：2009-10-07
Applicant: Kristian Raaby Poulsen , Peter Andreas Rasmussen
Inventor： Kristian Raaby Poulsen , Peter Andreas Rasmussen
CPC classification number: F16K99/0001 , B01L2400/0633 , B81B2201/054 , B81C1/00119 , F16K99/0021 , Y10T29/494
Abstract: A method of forming a flow restriction in a fluid communication system is disclosed. The method comprises the steps of providing a flow restricting section having a cross sectional area and a length, measuring the flow resistivity of the flow restricting section, and modifying the cross sectional area and/or the length of the flow restricting section until a desired flow resistivity of the flow restricting section is obtained. The method provides the possibility of forming a flow restriction in an easy and cost effective manner, and to subsequently adjust the flow resistivity of the flow restriction, thereby obtaining an accurate flow resistivity.
Abstract translation: 公开了一种在流体通信系统中形成流量限制的方法。 该方法包括以下步骤：提供具有横截面面积和长度的流量限制部分，测量流动限制部分的流动阻力，以及修改流动限制部分的横截面面积和/或长度，直到所需流动 获得流量限制部分的电阻率。 该方法提供了以容易且成本有效的方式形成流动限制的可能性，并且随后调节流动限制的流动阻力，从而获得精确的流动阻力。
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公开(公告)号：US20140246618A1
公开(公告)日：2014-09-04
申请号：US14274698
申请日：2014-05-10
Applicant: RHEONIX, INC.
Inventor： Peng Zhou , Lincoln C. Young
IPC: F16K7/12
CPC classification number: F16K7/12 , B01F5/0683 , B01F5/0688 , B01F11/0071 , B01F13/0059 , B01F2215/0034 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2200/12 , B01L2300/0816 , B01L2300/0861 , B01L2300/0867 , B01L2300/0887 , B01L2400/0481 , B01L2400/0487 , B01L2400/06 , B01L2400/0638 , B01L2400/0655 , B01L2400/084 , B29C65/4895 , B29C66/004 , B29C66/54 , B29C66/5412 , B29C66/71 , B29K2025/00 , B29K2025/04 , B29K2033/08 , B29K2069/00 , B29K2101/12 , B29L2031/7496 , B29L2031/7506 , B29L2031/756 , B81B3/0021 , B81B2201/036 , B81B2201/054 , B81B2203/0127 , B81C1/00103 , B81C1/00158 , F04B43/028 , F04B43/043 , F04B43/06 , F15C1/08 , F16K99/0001 , F16K99/0015 , F16K99/0021 , F16K99/0034 , F16K99/0055 , F16K99/0057 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0094 , Y10T29/49405 , Y10T137/212 , Y10T137/2202 , Y10T137/2218 , Y10T137/8593 , Y10T137/85978 , Y10T156/1002 , Y10T156/1043 , B29K2033/12 , B29K2025/06
Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.
Abstract translation: 塑料微流体结构具有基本上刚性的膜片，其在松弛状态之间起作用，其中隔膜抵靠衬底的表面，以及致动状态，其中隔膜移动离开衬底。 从以下描述可以看出，用这种隔膜形成的微流体结构提供易于制造和坚固的系统，以及易于制造的部件，例如阀和泵。
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公开(公告)号：US08104497B2
公开(公告)日：2012-01-31
申请号：US11685654
申请日：2007-03-13
Applicant: Marc Unger , Hou-Pu Chou , Todd Thorsen , Axel Scherer , Stephen Quake , Markus Enzelberger , Mark Adams , Carl Hansen
Inventor： Marc Unger , Hou-Pu Chou , Todd Thorsen , Axel Scherer , Stephen Quake , Markus Enzelberger , Mark Adams , Carl Hansen
IPC: B08B3/04
CPC classification number: B05D3/04 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00621 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/06 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B65B31/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6832 , C12Q1/6874 , C30B29/54 , F04B43/043 , F15C1/06 , F15C3/00 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0094 , Y10T137/0324 , Y10T137/0379 , Y10T137/0424 , Y10T137/206 , Y10T137/2082 , Y10T137/2164 , Y10T137/2169 , Y10T137/2174 , Y10T137/2202 , Y10T137/2224 , Y10T137/3084 , Y10T137/7837 , Y10T137/86027 , Y10T156/10 , Y10T428/24479 , Y10T428/24612 , C12Q2535/125
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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129.发明申请Microfluidic System for Purposes of Analysis and Diagnosis and Corresponding Method for Producing a Microfluidic System 有权用于分析和诊断用的微流体系统以及用于产生微流体系统的相应方法公开(公告)号：US20110229375A1
公开(公告)日：2011-09-22
申请号：US13050762
申请日：2011-03-17
Applicant: Ricardo Ehrenpfordt , Mathias Bruendel , Frieder Haag , Jochen Rupp , Ulrike Scholz
Inventor： Ricardo Ehrenpfordt , Mathias Bruendel , Frieder Haag , Jochen Rupp , Ulrike Scholz
CPC classification number: B01L3/5027 , B01J2219/00783 , B01L3/502707 , B01L2200/027 , B01L2300/0663 , B01L2300/0874 , B01L2300/0887 , B01L2300/16 , B81B7/007 , B81B2201/036 , B81B2201/054 , B81B2207/098 , B81C2203/0154 , H01L23/473 , H01L2224/32145 , H01L2224/48091 , H01L2224/48137 , H01L2224/73265 , H01L2224/83191 , Y10T156/10 , H01L2924/00014
Abstract: A microfluidic system for purposes of analysis and diagnosis is made up of layers arranged substantially one above the other. The microfluidic system includes at least a first and a second conducting-through layer, which respectively comprise at least one channel for a fluid to be conducted through in the respective conducting-through layer. The microfluidic system further includes at least one chip layer, which comprises at least one active, micromechanical element, the active, micromechanical element being in operative connection with at least one of the channels, and the chip layer being arranged between the first and the second conducting-through layer, and the channels being fluidically connected to one another. A corresponding production method is disclosed in addition to the microfluid system.
Abstract translation: 用于分析和诊断的微流体系统由基本上彼此排列的层组成。 微流体系统至少包括第一和第二导电层，其分别包括至少一个通道，用于在相应导电层中导通的流体。 微流体系统还包括至少一个芯片层，其包括至少一个有源微机械元件，所述有源微机械元件与至少一个通道操作连接，并且所述芯片层布置在第一和第二 导通层，并且通道彼此流体连接。 除了微流体系统之外，还公开了相应的制造方法。
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公开(公告)号：US07832429B2
公开(公告)日：2010-11-16
申请号：US11242694
申请日：2005-10-03
Applicant: Lincoln Young , Peng Zhou
Inventor： Lincoln Young , Peng Zhou
IPC: F15C3/00
CPC classification number: F16K7/12 , B01F5/0683 , B01F5/0688 , B01F11/0071 , B01F13/0059 , B01F2215/0034 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2200/12 , B01L2300/0816 , B01L2300/0861 , B01L2300/0867 , B01L2300/0887 , B01L2400/0481 , B01L2400/0487 , B01L2400/06 , B01L2400/0638 , B01L2400/0655 , B01L2400/084 , B29C65/4895 , B29C66/004 , B29C66/54 , B29C66/5412 , B29C66/71 , B29K2025/00 , B29K2025/04 , B29K2033/08 , B29K2069/00 , B29K2101/12 , B29L2031/7496 , B29L2031/7506 , B29L2031/756 , B81B3/0021 , B81B2201/036 , B81B2201/054 , B81B2203/0127 , B81C1/00103 , B81C1/00158 , F04B43/028 , F04B43/043 , F04B43/06 , F15C1/08 , F16K99/0001 , F16K99/0015 , F16K99/0021 , F16K99/0034 , F16K99/0055 , F16K99/0057 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0094 , Y10T29/49405 , Y10T137/212 , Y10T137/2202 , Y10T137/2218 , Y10T137/8593 , Y10T137/85978 , Y10T156/1002 , Y10T156/1043 , B29K2033/12 , B29K2025/06
Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.
Abstract translation: 塑料微流体结构具有基本上刚性的膜片，其在松弛状态之间起作用，其中隔膜抵靠衬底的表面，以及致动状态，其中隔膜移动离开衬底。 从以下描述可以看出，用这种隔膜形成的微流体结构提供易于制造和坚固的系统，以及易于制造的部件，例如阀和泵。
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