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公开(公告)号：US09528942B2
公开(公告)日：2016-12-27
申请号：US14525673
申请日：2014-10-28
Applicant: KLA-Tencor Corporation
Inventor： Richard E. Bills , Neil Judell , Klaus R. Freischlad , James P. McNiven
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
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122.发明申请公开(公告)号：US20160327493A1
公开(公告)日：2016-11-10
申请号：US14982747
申请日：2015-12-29
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Yevgeniy Churin
CPC classification number: G01N21/8806 , G01N21/9501 , G01N2201/0635 , G01N2201/104 , G01N2201/105 , G01N2201/106 , G02B26/101 , G02B27/1086 , G02B27/123 , G02F1/33
Abstract: A system to generate multiple beam lines in an oblique angle multi-beam spot scanning wafer inspection system includes a beam scanning device configured to scan a beam of illumination, an objective lens oriented at an oblique angle relative to the surface of a sample and with an optical axis perpendicular to a first scanning direction on the sample, and one or more optical elements positioned between the objective lens and the beam scanning device. The one or more optical elements split the beam into two or more offset beams such that the two or more offset beams are separated in a least a second direction perpendicular to the first direction. The one or more optical elements further modify the phase characteristics of the two or more offset beams such that the two or more offset beams are simultaneously in focus on the sample during a scan.
Abstract translation: 在斜角多光束点扫描晶片检查系统中产生多个光束线的系统包括：束扫描装置，被配置为扫描照射束;物镜相对于样品的表面以倾斜角度定向;以及 垂直于样品上的第一扫描方向的光轴和位于物镜和束扫描装置之间的一个或多个光学元件。 一个或多个光学元件将光束分成两个或更多个偏移光束，使得两个或更多个偏移光束在垂直于第一方向的至少第二方向上分离。 一个或多个光学元件进一步修改两个或多个偏移光束的相位特性，使得两个或更多个偏移光束在扫描期间同时聚焦在样本上。
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公开(公告)号：US20160299087A1
公开(公告)日：2016-10-13
申请号：US15088620
申请日：2016-04-01
Applicant: MITSUI HIGH-TEC, INC. , TOYOTA JIDOSHA KABUSHIKI KAISHA
Inventor： Tadashi SHIBUTA , Masashi MATSUMOTO , Tatsuhiko MIZUTANI , Yoshitada YAMAGISHI
CPC classification number: G01N21/94 , G01N21/8851 , G01N21/954 , G01N2201/06146 , G01N2201/105
Abstract: There is provided a method for inspecting a laminated iron core structured by laminating a plurality of iron core pieces-having a predetermined shape and including therein a cooling flow path allowing refrigerant to flow therethrough, the refrigerant being supplied and discharged through openings formed at different positions. The method includes arranging a light projecting part and a light receiving part of a photosensor in the openings of the cooling flow path, respectively, and detecting light from the light projecting part by the light receiving part to thereby inspect a penetrating state of the cooling flow path.
Abstract translation: 提供了一种检查层叠铁芯的方法，该层叠铁芯通过层叠多个具有预定形状的铁芯片而形成，其中包括允许制冷剂流过的冷却流路，制冷剂通过形成在不同位置的开口供给和排出 。 该方法包括分别在冷却流路的开口中布置光传感器的光投射部分和光接收部分，并且通过光接收部分检测来自光投射部分的光，从而检查冷却流的穿透状态 路径。
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公开(公告)号：US20160231254A1
公开(公告)日：2016-08-11
申请号：US15023078
申请日：2014-10-09
Applicant: BIZERBA LUCEO
Inventor： Eric PIROT , Laurent ROUBERT , Ahmed RBAA
CPC classification number: G01N21/9054 , G01N21/8851 , G01N21/95 , G01N2021/8887 , G01N2201/105
Abstract: A method of inspecting packaging welds comprises the steps of creating a light beam that produces at least one light transition (t) and acquiring a raw matrix image (B(N)) covering the light transition. For each image (B(N)) obtained, a measurement of the diffusion of the light transition is stored. For each of N successive scanning increments, the raw matrix image (B(N)) is used to create an image line in which each pixel receives as its value the measurement in the raw matrix image (B(N)) of the diffusion of at least the light transition. The at least N image lines are stored in succession to obtain a matrix image and the matrix image is analyzed to determine that the weld along said fraction is in conformity when its transverse width remains, at all points, greater than a given minimum.
Abstract translation: 检查包装焊缝的方法包括产生产生至少一个光过渡（t）并获取覆盖光转变的原始矩阵图像（B（N））的光束的步骤。 对于获得的每个图像（B（N）），存储光跃迁的扩散的测量。 对于N个连续的扫描增量中的每一个，原始矩阵图像（B（N））用于创建图像行，其中每个像素接收原始矩阵图像（B（N））中的扩散的测量值作为其值， 至少光转变。 连续存储至少N个图像行以获得矩阵图像，并且分析矩阵图像以确定当其横向宽度保持时，所有分数处的焊缝在所有点处均大于给定最小值。
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公开(公告)号：US20160202192A1
公开(公告)日：2016-07-14
申请号：US14901030
申请日：2013-06-30
Applicant: SUMCO CORPORATION
Inventor： Toshiaki SUDO , Tadahiro SATO , Ken KITAHARA , Masami OHARA
IPC: G01N21/95 , G01N21/65 , G01N21/3563
CPC classification number: H01J37/32935 , C30B15/00 , C30B15/10 , C30B15/14 , C30B29/06 , C30B35/002 , G01N21/3563 , G01N21/65 , G01N21/68 , G01N21/95 , G01N2021/8477 , G01N2201/105 , G01N2201/12
Abstract: An inspection method of vitreous silica crucibles includes: a measurement step of measuring an infrared absorption spectrum or a Raman shift of a measurement point on an inner surface of the vitreous silica crucible; a determining step of predicting whether or not a surface-defect region occurs at the measurement point based on an obtained spectrum to determine a quality of the vitreous silica crucible.
Abstract translation: 玻璃状石英坩埚的检查方法包括：测量石英坩埚内表面上的测量点的红外吸收光谱或拉曼偏移的测量步骤; 基于获得的光谱来预测在测量点是否发生表面缺陷区域以确定玻璃石英坩埚的质量的确定步骤。
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Patent Agency Ranking
公开(公告)号：US09341564B2
公开(公告)日：2016-05-17
申请号：US13123518
申请日：2009-10-09
Applicant: Fraser McNeil-Watson
Inventor： Fraser McNeil-Watson
IPC: G01N27/453 , G01N21/25 , B01L3/00 , G01N21/51 , G01N27/447 , G01N21/03 , G01N15/14 , G01N21/47
CPC classification number: G01N21/253 , B01L3/5025 , B01L2300/0829 , B01L2400/0421 , G01N21/03 , G01N21/51 , G01N27/44721 , G01N2015/1493 , G01N2021/0346 , G01N2021/4707 , G01N2021/513 , G01N2201/103 , G01N2201/105
Abstract: A high-throughput optical suspension characterization instrument is disclosed, which can include hydraulically separate and at least partially transparent sample containers. A selection mechanism is operative to selectively direct light from a light source (12) through different ones of the sample containers along an optical axis, and an off-axis scattering detector (38,24) is responsive to scattered light from the light source after it has interacted with a sample. Phase analysis light scattering is used to determine the electrophoretic mobility and zeta potential of samples. A second instrument is disclosed, wherein all sample containers are illuminated simultaneously. Transmitted light is collected by a camera. The electrophoretic mobility and hydrodynamic size of the samples may be determined.
Abstract translation: 公开了一种高通量光学悬浮表征仪器，其可以包括液压分离和至少部分透明的样品容器。 选择机构可操作以沿着光轴选择性地将来自光源（12）的光引导通过不同的样本容器，并且离轴散射检测器（38,24）响应于来自光源的散射光， 它已经与样本进行了互动。 相位分析光散射用于确定样品的电泳迁移率和ζ电位。 公开了第二种仪器，其中所有的样品容器都是同时照射的。 透射光被照相机收集。 可以确定样品的电泳迁移率和流体动力学尺寸。
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公开(公告)号：US09285321B2
公开(公告)日：2016-03-15
申请号：US14438255
申请日：2013-11-06
Applicant: Sharp Kabushiki Kaisha
Inventor： Ryohhei Kawamuki
IPC: G11B7/09 , G01N21/64 , G01N27/447
CPC classification number: G01N21/6486 , G01N21/6454 , G01N21/6456 , G01N27/44721 , G01N27/44778 , G01N2021/6463 , G01N2201/061 , G01N2201/10 , G01N2201/103 , G01N2201/105
Abstract: A fluorescence detection device includes: a light source that emits excitation light in a first direction; a base unit (30) to which the light source is attached; an opening (30a) that is provided on a side in the first direction of the base unit (30) with respect to the light source; a cantilever (31) that is cantilevered to the base unit (30) to extend from an inner edge of the opening (30a) toward a center side of the opening (30a); an optical path conversion unit (20) that is fixed to a free end of the cantilever (31), converts a traveling direction of the excitation light emitted from the light source into a second direction different from the first direction, and irradiates a measurement object with the excitation light turned in the second direction; and a photodetection element that is disposed on a side of the opening (30a) opposite to the measurement object and detects fluorescence passing through the opening (30a) in fluorescence emitted from the measurement object irradiated with the excitation light. Accordingly, a loss in the fluorescence guided to the photodetection element can be reduced, and thus fluorescence detection efficiency can be improved.
Abstract translation: 荧光检测装置包括：在第一方向上发射激发光的光源; 安装光源的基座单元（30）; 相对于所述光源设置在所述基座单元（30）的所述第一方向的一侧的开口（30a） 悬臂（31），其悬臂连接到所述基座单元（30），以从所述开口（30a）的内边缘朝向所述开口（30a）的中心侧延伸; 固定到悬臂（31）的自由端的光路转换单元（20）将从光源发射的激发光的行进方向转换成与第一方向不同的第二方向，并且照射测量对象 激发光在第二个方向转动; 以及光检测元件，其设置在与所述测量对象相对的所述开口（30a）的一侧上，并且检测从所述激发光照射的所述测量对象发出的荧光中穿过所述开口（30a）的荧光。 因此，可以降低引导到光检测元件的荧光的损失，从而可以提高荧光检测效率。
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公开(公告)号：US09239287B2
公开(公告)日：2016-01-19
申请号：US14385033
申请日：2012-04-10
Applicant: Hyang-Sook Chun , Sung-Wook Choi , Hyun-Joo Chang , Na-Ri Lee , Gyeong-Sik Ok
Inventor： Hyang-Sook Chun , Sung-Wook Choi , Hyun-Joo Chang , Na-Ri Lee , Gyeong-Sik Ok
IPC: G01J5/02 , G01N21/3581 , H01Q15/08 , G01N21/88 , G02B3/00
CPC classification number: G01N21/3581 , G01N21/8806 , G01N21/94 , G01N2201/06113 , G01N2201/1045 , G01N2201/105 , G02B3/00 , H01Q15/08
Abstract: An object inspection apparatus includes a terahertz wave supplying unit for generating a terahertz wave and moving a path of the terahertz wave according to time so that the terahertz wave is supplied to an object to be inspected, a focusing lens located between the terahertz wave supplying unit and the object to be inspected to focus the terahertz wave supplied by the terahertz wave supplying unit, a rotating plate having a plate shape and including a plurality of the focusing lenses with different distances from the center thereof, the rotating plate rotating in the circumferential direction so that one of the focusing lenses is located at a path of the terahertz wave according to the path movement of the terahertz wave, and a terahertz wave detecting unit for collecting and detecting a terahertz wave incident to the object to be inspected.
Abstract translation: 物体检查装置包括：太赫兹波提供单元，用于产生太赫兹波，并根据时间移动太赫兹波的路径，使得太赫兹波被提供给被检测物体;聚焦透镜，位于太赫波提供单元 以及要被检查的物体聚焦太赫兹波供给单元提供的太赫兹波，具有板形的旋转板，并且包括多个离其中心距离不同的聚焦透镜，旋转板沿圆周方向旋转 使得一个聚焦透镜根据太赫兹波的路径移动位于太赫兹波的路径，以及用于收集和检测入射到待检查对象的太赫兹波的太赫兹波检测单元。
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公开(公告)号：US20150198539A1
公开(公告)日：2015-07-16
申请号：US14596650
申请日：2015-01-14
Applicant: Corning Precision Materials Co., Ltd.
Inventor： Siho Seong
IPC: G01N21/88 , H04N5/238 , H04N5/225 , H01L21/67 , G01N21/958
CPC classification number: H04N5/2256 , G01N21/896 , G01N21/9503 , G01N21/958 , G01N2201/062 , G01N2201/105 , H01L21/67288
Abstract: An apparatus for inspecting an edge portion of a substrate can inspect a defect or a chamfered width on an edge portion of a substrate. First and second right-angled prisms are disposed above and below the edge portion such that inclined surfaces thereof are directed toward the upper surface and lower surface of the edge portion. A lighting part irradiates the edge portion of the substrate with light. A photographing part is disposed adjacent to the edge portion. The photographing part takes an image of the upper surface of the edge portion from light that has passed through the first right-angled prism, an image of the lower surface of the edge portion from light that has passed through the second right-angled prism, and an image of an end surface of the edge portion.
Abstract translation: 用于检查基板的边缘部分的装置可以检测基板的边缘部分上的缺陷或倒角宽度。 第一和第二直角棱镜设置在边缘部分的上方和下方，使得其倾斜表面指向边缘部分的上表面和下表面。 照明部件用光照射基板的边缘部分。 拍摄部件邻近边缘部分设置。 拍摄部分从已经穿过第一直角棱镜的光中获取边缘部分的上表面的图像，从穿过第二直角棱镜的光中获取边缘部分的下表面的图像， 以及边缘部分的端面的图像。
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公开(公告)号：US09080971B2
公开(公告)日：2015-07-14
申请号：US14516540
申请日：2014-10-16
Applicant: KLA-Tencor Corporation
Inventor： Daniel Kandel , Vladimir Levinski , Alexander Svizher , Joel Seligson , Andrew Hill , Ohad Bachar , Amnon Manassen , Yung-Ho Alex Chuang , Ilan Sela , Moshe Markowitz , Daria Negri , Efraim Rotem
CPC classification number: G01N21/47 , G01B11/02 , G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/9501 , G01N21/956 , G01N2021/4792 , G01N2201/06113 , G01N2201/105 , G03F7/70625 , G03F7/70633
Abstract: Various metrology systems and methods are provided. One metrology system includes a light source configured to produce a diffraction-limited light beam, an apodizer configured to shape the light beam in the entrance pupil of illumination optics, and optical elements configured to direct the diffraction-limited light beam from the apodizer to an illumination spot on a grating target on a wafer and to collect scattered light from the grating target. The metrology system further includes a field stop and a detector configured to detect the scattered light that passes through the field stop. In addition, the metrology system includes a computer system configured to determine a characteristic of the grating target using output of the detector.
Abstract translation: 提供了各种计量系统和方法。 一个计量系统包括被配置为产生衍射受限光束的光源，被配置为使照明光学器件的入射光瞳中的光束成形的变迹器，以及被配置为将来自变迹器的衍射受限光束引导到 在晶片上的光栅目标上的照明点并且收集来自光栅目标的散射光。 测量系统还包括场停止器和检测器，其被配置为检测通过场停止器的散射光。 此外，计量系统包括被配置为使用检测器的输出来确定光栅目标的特性的计算机系统。
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