公开(公告)号：US07760344B2

公开(公告)日：2010-07-20

申请号：US12036303

申请日：2008-02-25

Applicant: Shigeki Nishina

Inventor： Shigeki Nishina

IPC: G01J11/00

CPC classification number: G01J11/00 ,  G02F1/3536

Abstract: Provided is an optical sampling apparatus that samples light to be measured having a pulse waveform, including a sampling light output section that outputs a first sampling light and a second sampling light, both having pulse waveforms of a spectrum different from that of the light to be measured; a first sampling section that includes a first nonlinear optical medium, which causes a nonlinear optical effect by causing at least a portion of the light to be measured and the first sampling light to pass therethrough and outputs light generated by the nonlinear optical effect, and that outputs at least a portion of the light generated by the nonlinear optical effect as a first output light; and a second sampling section that includes a second nonlinear optical medium, which causes a nonlinear optical effect by causing at least a portion of the first output light and the second sampling light to pass therethrough with a temporal overlap in order to output light generated by the nonlinear optical effect, and that outputs at least a portion of the light generated by the nonlinear optical effect as a second output light.

Abstract translation: 提供一种光采样装置，其对具有脉波波形的被测量光进行采样，该采样光输出部分输出具有不同于光的光谱的脉冲波形的第一采样光和第二采样光 测量; 第一采样部分，其包括第一非线性光学介质，其通过使待测量的光的至少一部分和第一采样光通过并且输出由非线性光学效应产生的光而引起非线性光学效应，并且 将由非线性光学效果产生的光的至少一部分输出为第一输出光; 以及第二采样部分，其包括第二非线性光学介质，其通过使第一输出光和第二采样光的至少一部分通过其中的时间重叠而引起非线性光学效应，以便输出由 非线性光学效应，并且将由非线性光学效应产生的光的至少一部分输出为第二输出光。

公开(公告)号：US20100102203A1

公开(公告)日：2010-04-29

申请号：US12357171

申请日：2009-01-21

Applicant: Christian J. Grund

Inventor： Christian J. Grund

IPC: G06M3/00 ,  G01C3/08 ,  G01J11/00

CPC classification number: G01S17/107 ,  G01S7/4813 ,  G01S7/4816 ,  G01S7/487

Abstract: A pulse data recorder system and method are provided. Upon the arrival or occurrence of an event or signal, the state of a digital switch is set. Upon receiving a pulse from a readout clock, the state of the switch is stored in a buffer memory, and the state of the switch is reset. As the readout clock is run, a time history of the state of the switch is obtained. The pulse data recorder can feature a plurality of unit cells, for use in imaging or other multiple pixel applications.

Abstract translation: 提供脉冲数据记录器系统和方法。 在事件或信号的到达或发生时，设置数字开关的状态。 在从读出时钟接收到脉冲时，开关的状态被存储在缓冲存储器中，并且开关的状态被复位。 当读出时钟运行时，获得开关状态的时间历史。 脉冲数据记录器可以具有多个单位单元，用于成像或其他多个像素应用。

公开(公告)号：US20080029717A1

公开(公告)日：2008-02-07

申请号：US11832707

申请日：2007-08-02

Applicant: Takahiro SHIRAI

Inventor： Takahiro SHIRAI

IPC: G01J3/10 ,  G01J11/00

CPC classification number: H05G2/003 ,  H05G2/005

Abstract: Extreme ultraviolet light source device in which an EUV radiation fuel is introduced into a chamber, and high-voltage pulsed voltage from a high-voltage generator is applied between first and second main discharge electrodes, thereby producing a high-temperature plasma from discharge gas between the main discharge electrodes; EVU radiation with a wavelength of 13.5 nm is emitted. Of the EVU radiation emitted, the EUV radiation on the optical axis of the EUV collector mirror passes through a through-hole in the foil trap and through a through hole in the central support of the collector mirror, is reflected away from the optical axis by a reflector, and enters an EUV monitor. On the basis of EUV intensity signals input to the EUV monitor, a controller adjusts the power supplied from the high-voltage generator so that the EUV intensity is steady.

Abstract translation: 将EUV放射线燃料引入室内的极紫外光源装置和来自高压发生器的高压脉冲电压施加在第一和第二主放电电极之间，从而从放电气体产生高温等离子体 主放电电极; 发出波长13.5nm的EVU辐射。 在发射的EVU辐射中，EUV收集镜的光轴上的EUV辐射通过箔捕获器中的通孔并且通过集光镜的中心支撑件中的通孔被从光轴反射离开光轴 反射器，并进入EUV监视器。 根据输入到EUV监视器的EUV强度信号，控制器调节从高压发生器提供的电源，使得EUV强度稳定。

公开(公告)号：US06960771B1

公开(公告)日：2005-11-01

申请号：US10381368

申请日：2000-09-25

Applicant: Motohiro Suyama ,  Yoshihiko Kawai ,  Tetsuya Morita ,  Koichiro Oba

Inventor： Motohiro Suyama ,  Yoshihiko Kawai ,  Tetsuya Morita ,  Koichiro Oba

IPC: G01N21/64 ,  G01J1/18 ,  G01J1/42 ,  G01J11/00 ,  G01N1/02 ,  G01N15/06 ,  G01N15/14 ,  G01T1/17 ,  G01T1/204 ,  G01T1/208 ,  H01J40/02 ,  H01J43/12 ,  H01J43/30 ,  H01L27/144 ,  H01L31/10 ,  H01L31/101 ,  H01L31/107 ,  G01T1/42

CPC classification number: G01J1/18 ,  G01J1/42 ,  G01T1/17 ,  H01L27/144 ,  H01L31/101 ,  H01L31/107

Abstract: A liquid scintillation counter 10 serving as an optical measurement apparatus includes: an HPD 24, a charge amplifier 26, a voltage amplifier 28, a comparator 30, a counter 32, a multi-channel analyzer 34, a display 38, and the like. The HPD 24 has a photocathode 24a and an APD 24b for outputting a signal that corresponds to the number of incident photons. The comparator 30 outputs a logic pulse signal, serving as a comparison result signal, only when the signal outputted from the HPD 24 and amplified by the charge amplifier 26 and voltage amplifier 28 is larger than a prescribed threshold value. This threshold value is set larger than an output signal that is outputted when a single photoelectron is emitted from the photocathode 24a and smaller than another output signal that is outputted when two or more photoelectrons are emitted.

Abstract translation: 用作光学测量装置的液体闪烁计数器10包括：HPD 24，电荷放大器26，电压放大器28，比较器30，计数器32，多通道分析器34，显示器38等。 HPD24具有用于输出与入射光子数相对应的信号的光电阴极24a和APD24b。 只有当从HPD24输出并由电荷放大器26和电压放大器28放大的信号大于规定的阈值时，比较器30输出用作比较结果信号的逻辑脉冲信号。 该阈值被设定为大于当从光电阴极24a发射单个光电子时输出的输出信号小于在发出两个或更多个光电子时输出的另一个输出信号的输出信号。

公开(公告)号：US20050179905A1

公开(公告)日：2005-08-18

申请号：US10926351

申请日：2004-08-26

Applicant: Hideyuki Ohtake ,  Koichiro Tanaka ,  Masaya Nagai ,  Junpei Yamashita ,  Kumiko Yamashita

Inventor： Hideyuki Ohtake ,  Koichiro Tanaka ,  Masaya Nagai ,  Junpei Yamashita ,  Kumiko Yamashita

IPC: G01J3/28 ,  G01J3/12 ,  G01J3/433 ,  G01J11/00 ,  G01N21/35 ,  G01N21/3586 ,  G01B9/02

CPC classification number: G01J3/12 ,  G01J3/4338 ,  G01J11/00 ,  G01N21/3581 ,  G01N21/3586

Abstract: A multi-channeled measuring method for measuring a spectrum of a terahertz pulse includes the steps of a terahertz pulse generating step for generating a terahertz pulse by using an ultrashort pulsed pumping light, a white light generating step for generating a white light pulse by using an ultrashort pulsed probe light, a stretching step for stretching and chirping the white light pulse generated at the white light pulse generating step, an electro-optic modulating step for modulating the chirped white light pulse stretched and chirped at the stretching step in such a manner that the terahertz pulse and the chirped white light pulse irradiate into an electro-optic crystal synchronously, so that the chirped white light pulse is modulated by an electric field signal induced at the electro-optic crystal irradiated by the terahertz pulse, a multi-channeled spectral detecting step for detecting a spectrum of chirped white light pulse modulated at the electro-optic modulating step by a multi-channeled detector, an electric field signal analyzing step for analyzing an electric field of the terahertz pulse irradiated to the electro-optic crystal from the spectrum of the chirped white light pulse detected by the multi-channeled spectrum detecting step, and a Fourier transforming step for transforming the electric field signal analyzed by the electric field signal analyzing step into a frequency spectrum of the terahertz pulse.

Abstract translation: 用于测量太赫兹脉冲的频谱的多通道测量方法包括用于通过使用超短脉冲泵浦光产生太赫兹脉冲的太赫兹脉冲产生步骤的步骤，用于通过使用超短脉冲泵浦光产生白光脉冲的白光产生步骤 超短脉冲探测光，用于拉伸和啁啾在白光脉冲产生步骤产生的白光脉冲的拉伸步骤;电光调制步骤，用于调制在拉伸步骤中拉伸和啁啾的啁啾的白光脉冲， 太赫脉冲和啁啾的白光脉冲同步地照射到电光晶体中，使得啁啾的白光脉冲被在由太赫兹脉冲照射的电光晶体处感应的电场信号调制，多通道光谱 检测步骤，用于检测在电光调制步骤调制的啁啾白光脉冲的频谱 i通道检测器，用于从由多通道频谱检测步骤检测的啁啾的白光脉冲的频谱分析照射到电光晶体的太赫兹脉冲的电场的电场信号分析步骤，以及傅立叶变换 用于将由电场信号分析步骤分析的电场信号变换为太赫兹脉冲的频谱的步骤。

公开(公告)号：US06909508B2

公开(公告)日：2005-06-21

申请号：US10393850

申请日：2003-03-21

Applicant: Norihide Yamada

Inventor： Norihide Yamada

IPC: G01J9/00 ,  G01J11/00 ,  H04B10/07 ,  H04B10/516 ,  H04B10/61 ,  G01B9/02 ,  H04B10/06

CPC classification number: H04B10/07 ,  G01J9/00 ,  G01J11/00

Abstract: Apparatus and methods of measuring optical waveforms are described. In one aspect, an optical waveform measurement apparatus includes a light wave source, a mixer, a down converter, and a controller. The light wave source is operable to provide an adjustable frequency light wave with a frequency that is adjustable over a target frequency range. The mixer is operable to mix a target modulated optical signal with the adjustable frequency light wave to obtain a mixed signal. The frequency down converter is operable to down convert the mixed signal to obtain a down-converted signal. The controller is operable to extract from the down-converted signal amplitude and phase information relating to the target modulated optical signal and to cause the light wave source to incrementally adjust the frequency of the adjustable frequency light wave over the target frequency range.

Abstract translation: 描述了测量光学波形的装置和方法。 一方面，光波形测量装置包括光波源，混频器，下变频器和控制器。 光波源可操作以提供可在目标频率范围内调节的频率的可调频光波。 混合器可操作以将目标调制光信号与可调频光波混合以获得混合信号。 降频转换器可操作以将混合信号下变频以获得下变频信号。 控制器可操作地从降频转换信号中提取与目标调制光信号相关的振幅和相位信息，并使光波源逐渐调节在目标频率范围上的可调频光波的频率。

公开(公告)号：US06856927B2

公开(公告)日：2005-02-15

申请号：US10338355

申请日：2003-01-08

Applicant: Christophe Jean Dorrer ,  Inuk Kang

Inventor： Christophe Jean Dorrer ,  Inuk Kang

IPC: G01J11/00 ,  G06F19/00

CPC classification number: G01J11/00

Abstract: A method and apparatus for the characterization of optical pulses and modulators includes modulating, using a modulator, a train of optical pulses, measuring a spectrum of the modulated train of optical pulses, recording the measured spectrum as an entry in a spectrogram at a position in the spectrogram corresponding to a relative delay between the modulation and the train of optical pulses, incrementing the relative delay, and repeating the above steps until the accumulated relative delay is equal to the period of the spectrogram. The train of optical pulses and the modulator are then characterized using the measured spectra recorded in the spectrogram.

Abstract translation: 用于表征光脉冲和调制器的方法和装置包括使用调制器调制一系列光脉冲，测量光脉冲的调制序列的频谱，将测量的光谱记录在光谱图中的位置处的条目 该光谱图对应于调制和光脉冲列之间的相对延迟，增加相对延迟，并重复上述步骤，直到累积的相对延迟等于光谱图的周期。 然后使用光谱图中记录的测量光谱来表征光脉冲和调制器。

公开(公告)号：US06856393B2

公开(公告)日：2005-02-15

申请号：US10378591

申请日：2003-03-03

Applicant: Aydogan Ozcan ,  Michel J.F. Digonnet ,  Gordon S. Kino

Inventor： Aydogan Ozcan ,  Michel J.F. Digonnet ,  Gordon S. Kino

IPC: G01J11/00 ,  G01N21/63 ,  G01N21/59

CPC classification number: G01N21/21 ,  G01J11/00 ,  G01N21/4788 ,  G01N21/636 ,  G01N2021/4723 ,  G01N2021/4735

Abstract: A method measures a nolinearity profile of a sample with at least one sample surface and having a sample nonlinearity profile along a sample line through a predetermined point on the sample surface. The sample line is oriented perpendicularly to the sample surface. The method includes measuring a Fourier transform of the sample nonlinearity profile and obtaining a reference nonlinearity profile from a reference material. The method includes forming a first composite sample having a first composite nonlinearity profile and forming a second composite sample having a second composite nonlinearity profile inequivalent to the first composite nonlinearity profile. The method further includes measuring a Fourier transform of the first composite nonlinearity profile and measuring a Fourier transform of the second composite nonlinearity profile. The method further includes calculating the sample nonlinearity profile using the Fourier transforms of the sample nonlinearity profile, the reference nonlinearity profile, the first composite nonlinearity profile, and the second composite nonlinearity profile.

Abstract translation: 一种方法测量具有至少一个样品表面并具有沿样品线的样品非线性轮廓通过样品表面上的预定点的样品的非线性分布。 样品线垂直于样品表面取向。 该方法包括测量样本非线性分布的傅立叶变换并从参考材料获得参考非线性分布。 该方法包括形成具有第一复合非线性轮廓的第一复合样品，并形成具有不等于第一复合非线性轮廓的第二复合非线性轮廓的第二复合样品。 该方法还包括测量第一复合非线性分布的傅立叶变换并测量第二复合非线性分布的傅里叶变换。 该方法还包括使用样本非线性分布，参考非线性分布，第一复合非线性分布和第二复合非线性分布的傅里叶变换来计算样本非线性分布。

公开(公告)号：US6108085A

公开(公告)日：2000-08-22

申请号：US752068

申请日：1996-11-19

Applicant: Mansoor Sheik-Bahae

Inventor： Mansoor Sheik-Bahae

IPC: G01J11/00 ,  G01B9/02

CPC classification number: G01J11/00

Abstract: Interferometric auto-correlation is obtained using third-order (.chi..sup.(3)) nonlinearities. The nonlinear signal is separated from the linear interferometric response in order to extract information about the amplitude and the chirp of the ultrashort pulses. In one technique, cross-polarized beams are provided to eliminate the linear response. In another technique, electronic filtering is used. Electronic filtering provides substantial reduction of cost, size and complexity over conventional second harmonic generator crystals.

Abstract translation: 使用三阶（chi（3））非线性获得干涉自相关。 将非线性信号与线性干涉响应分离，以提取关于超短脉冲的幅度和啁啾的信息。 在一种技术中，提供了交叉偏振光束以消除线性响应。 在另一种技术中，使用电子滤波。 与传统的二次谐波发生器晶体相比，电子滤波大大降低了成本，尺寸和复杂性。

公开(公告)号：US5812690A

公开(公告)日：1998-09-22

申请号：US104057

申请日：1993-10-01

Applicant: John Lawrence Fordham

Inventor： John Lawrence Fordham

IPC: G01J1/44 ,  G01J1/42 ,  G01J11/00 ,  G06T7/60

CPC classification number: G01J1/42 ,  G01J2001/442 ,  G01J2001/448

Abstract: A method is provided for setting up a photon counting detector, to enable it to carry out a centroiding procedure in which a photon event occurring in a given range is allocated to one of a plurality of channels into which the range is divided. The method comprises the steps of: a) sub-dividing the range into a plurality of channels of preferably equal width and loading the channel boundaries into a look-table; b) performing an integration on a flat field and allocating photon events to the channels defined in step a); c) counting the number of events allocated to each channel; d) altering the channel boundaries in directions tending to equalize the number of events allocated to each; and, optionally, e) repeating steps b), c) and d) until the variation between the number of events held by the channels is at an acceptable level.

Abstract translation: PCT No.PCT / GB92 / 00224 Sec。 371日期：1993年10月1日 102（e）日期1993年10月1日PCT提交1992年2月6日PCT公布。 公开号WO92 / 14127 日期1992年8月20日提供了一种用于设置光子计数检测器的方法，以使其能够执行质心过程，其中在给定范围内发生的光子事件被分配给多个通道中的一个，其中范围是 分为。 该方法包括以下步骤：a）将该范围细分成多个优选相等宽度的信道，并将信道边界加载到查表中; b）在平坦场上执行积分并将光子事件分配给步骤a）中定义的通道; c）计算分配给每个频道的事件数; d）改变趋向于均衡分配给每个事件的事件数的方向的通道边界; 并且可选地，e）重复步骤b），c）和d），直到由信道保持的事件数量之间的变化处于可接受的水平。