Abstract:
An ozone generating apparatus is provided which includes a pair of electrodes for producing a discharge by the application of an ac voltage therebetween, and at least one dielectric provided between the pair of electrodes. A source gas containing oxygen is provided into a discharge space in which the discharge is produced to generate ozone by the action of the discharge. A surface lying between at least one of the pair of electrodes and the discharge space and in contact with the discharge has a surface resistivity of 104 Ω to 1011 Ω. The source gas provided into the discharge space includes ultrapure oxygen having a purity of not less than 99.9%.
Abstract:
To prevent the decrease of ozone concentration in the case that high purity oxygen without adding nitrogen is used as the raw material gas in a discharge type ozonizer.In an ozonizer in which a dielectric 10 is arranged contacting at least one of electrodes 30 to form a discharge gap 20 for the generation of ozone between a pair of electrodes 30, 30, a transition metal bronze containing alkaline metals, alkaline earth metals, or rare earth metals at position A of the transition metal oxide having a crystal structure in which an atom does not exist at position A of the perovskite structure is made to exist on the above-described surface of the dielectric 10.
Abstract:
A starting circuit for an electric discharge lamp providing an electric current to a lamp having a first and a second filament. The circuit measures a lamp current and a filament temperature and then compares these against a reference voltage. When the lamp current is below a set threshold value, a relay contact disposed between the first and second filament is closed to direct the electric current through the first and second filaments to initiate pre-heating of the lamp. Once the filament temperature exceeds a set threshold, the relay contact is opened and the electric current passes through heated gas inside the lamp.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.
Abstract:
An ozone generating system and an ozone generating method producing ozone at a high concentration and operating at high efficiency, in which a raw material gas with no nitrogen added and mainly containing oxygen is used. The amount of generation of NOX by-product is null. A raw material gas not containing nitrogen and mainly containing oxygen is supplied to an ozone generator, an AC voltage is applied to produce discharge light having wavelength of 428 nm to 620 nm, a catalytic material containing a photocatalytic material with a band gap energy of 2.0 eV to 2.9 eV is provided on an electrode or a dielectric in a discharge region, gas pressure is kept at 0.1 MPa to 0.4 MPa, and ozone is generated.
Abstract:
An apparatus performs radical treatment by electric discharge. The radical treatment apparatus includes an electrode unit having a gas flow path that blows gas onto treatment water and an electrode member that generates the electric discharge at a leading edge in order to generate a radical from the gas.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
An ozonizer has a flat plate-shaped low voltage electrode 7, a flat plate-shaped high voltage electrode 3 facing a main surface of the low voltage electrode 7. The ozonizer also has a flat plate-shaped dielectric 5 and a spacer for forming a discharge gap 6 of a thin thickness in a laminating direction provided between the low voltage electrode 7 and the high voltage electrode 3, a high voltage electrode cooling unit 2 for forming a cooling water passage 2c insulated from the high voltage electrode 3 inside the high voltage electrode 3. An alternating voltage is applied between the low voltage electrode 7 and the high voltage electrode 3 and a discharge is produced in the discharge gap 6 injected with oxygen gas to produce ozone gas.
Abstract:
An apparatus for producing ozone from oxygen includes at least one discharge electrode and counterelectrode which are separated by a dielectric of high heat conductivity and tightly bear on the dielectric that is cooled in a direct manner. The discharge electrode, around which oxygen flows, forms a non-closed surface and is in the form of a wire. By applying an electric field, the discharge electrode triggers a discharge in the gas space surrounding the discharge electrode and on the dielectric. The discharge electrode is made of molybdenum, tungsten, niobium or tantalum and is directly exposed to the oxygen flow.