公开(公告)号：US20020105647A1

公开(公告)日：2002-08-08

申请号：US09779761

申请日：2001-02-08

Inventor： Lanhua Wei

IPC: G01J004/00

CPC classification number: G01J4/00

Abstract: An ellipsometer capable of generating a small beam spot is disclosed. The ellipsometer includes a light source for generating a narrow bandwidth probe beam. An analyzer is provided for determining the change in polarization state of the probe beam after interaction with the sample. A lens is provided having a numerical aperture and focal length sufficient to focus the beam to a diameter of less than 20 microns on the sample surface. The lens is formed from a graded index glass wherein the index of refraction varies along its optical axis. The lens is held in a relatively stress free mount to reduce stress birefringence created in the lens due to changes in ambient temperature. The ellipsometer is capable of measuring features on semiconductors having a dimensions as small as 50null50 microns.

Abstract translation: 公开了能够产生小束斑的椭圆计。 椭偏仪包括用于产生窄带探测光束的光源。 提供了一种分析器，用于确定与样品相互作用后探针光束的偏振状态的变化。 提供具有足够数值孔径和焦距以将光束聚焦到样品表面上小于20微米直径的透镜。 透镜由渐变折射率玻璃形成，其中折射率沿其光轴变化。 透镜保持在相对无应力的安装位置，以减少由于环境温度的变化而在镜头中产生的应力双折射。 椭偏仪能够测量尺寸小至50x50微米的半导体特性。

公开(公告)号：US20020093655A1

公开(公告)日：2002-07-18

申请号：US10100824

申请日：2002-03-18

Applicant: The Regents of the University of California

Inventor： Matthew J. Everett ,  Billy W. Colston JR. ,  Ujwal S. Sathyam ,  Luiz B. Da Silva ,  Daniel Fried

IPC: G01J004/00

CPC classification number: A61B5/0088 ,  A61B5/0066 ,  A61B5/0073 ,  G01B9/02091 ,  G01B2290/70 ,  G01N21/4795

Abstract: A polarization sensitive optical imaging system is used to detect changes in polarization in dental tissues to aid the diagnosis of dental disease such as caries. The degree of depolarization is measured by illuminating the dental tissue with polarized light and measuring the polarization state of the backscattered light. The polarization state of this reflected light is analyzed using optical polarimetric imaging techniques. A hand-held fiber optic dental probe is used in vivo to direct the incident beam to the dental tissue and collect the reflected light. To provide depth-resolved characterization of the dental tissue, the polarization diagnostics may be incorporated into optical coherence domain reflectometry and optical coherence tomography (OCDR/OCT) systems, which enables identification of subsurface depolarization sites associated with demineralization of enamel or bone.

Abstract translation: 偏振敏感光学成像系统用于检测牙组织中极化的变化，以帮助牙科疾病如龋齿的诊断。 通过用偏振光照射牙组织并测量背向散射光的偏振状态来测量去极化度。 使用光学偏振成像技术分析该反射光的偏振状态。 体内使用手持光纤牙科探针将入射光束引导到牙齿组织并收集反射光。 为了提供牙科组织的深度分辨表征，偏振诊断可以被并入到光学相干畴反射测量和光学相干断层扫描（OCDR / OCT）系统中，其能够识别与釉质或骨的脱矿质相关的地下去极化位点。

公开(公告)号：US20020057433A1

公开(公告)日：2002-05-16

申请号：US09956388

申请日：2001-09-19

Inventor： M. Pinar Menguc ,  Sivakumar Manickavasagam

IPC: G01J004/00

CPC classification number: G01N21/47 ,  G01N15/0211 ,  G01N21/21

Abstract: A non-intrusive method of characterizing particles through inverse analysis of experimental data based on measurements using elliptically polarized radiation is provided. A database of theoretical absorption and scattering data sets for particles is compiled. Optimum settings for an experimental test to gather an experimental absorption and scattering data set are determined and the experimental test is conducted. The experimental absorption and scattering data set is then compared to the theoretical absorption and scattering data sets of the database of theoretical absorption and scattering data sets in order to determine an absorption and scattering data set which differs the least from the experimental absorption and scattering data set in order to characterize the particles.

Abstract translation: 提供了一种基于使用椭圆偏振辐射测量的实验数据的反分析来表征粒子的非侵入性方法。 编制了一个理论吸收和散射数据集的数据库。 确定用于采集实验吸收和散射数据集的实验测试的最佳设置，并进行实验测试。 然后将实验吸收和散射数据集与理论吸收和散射数据集的数据库的理论吸收和散射数据集进行比较，以确定与实验吸收和散射数据集最不同的吸收和散射数据集 以表征颗粒。

公开(公告)号：US20020044282A1

公开(公告)日：2002-04-18

申请号：US09782098

申请日：2001-02-13

Applicant: Lucent Technologies Inc.

Inventor： Lothar B. Moeller ,  Paul Stephen Westbrook

IPC: G01J004/00

CPC classification number: H04B10/2569 ,  G01J3/447 ,  G01J4/04

Abstract: A method and apparatus for polarization measurements. A polarization state of an optical signal can be determined using a polarization analyzer comprising a polarization controller, a polarizer, a wavelength dispersive element and a photo-detector. The method and apparatus can be applied to polarization and polarization mode dispersion measurements in wavelength division multiplexed communication systems.

Abstract translation: 一种用于偏振测量的方法和装置。 可以使用包括偏振控制器，偏振器，波长色散元件和光检测器的偏振分析器来确定光信号的偏振状态。 该方法和装置可应用于波分复用通信系统中的偏振和偏振模色散测量。

公开(公告)号：US20020039184A1

公开(公告)日：2002-04-04

申请号：US09969939

申请日：2001-10-02

Inventor： John V. Sandusky

IPC: G01J004/00

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01N21/47 ,  G01N2021/214

Abstract: Devices and methods for differential numerical aperture analysis of samples, utilizing angle-of-incidence measurements resulting from variable illumination or observation numerical apertures, or both. Metrology applications are provided, and more particularly including scatterometer, ellipsometer and similar analysis methods, including bi-directional reflectance or transmission distribution function measurement. The provided devices and methods enable analysis of critical dimensions of samples utilizing a minimum of moving parts, with the range of striking or scattering angles varied by means of a variable numerical aperture or apertures.

Abstract translation: 使用样品的微分数值孔径分析的装置和方法，利用由可变照明或观察数值孔径引起的入射角度测量，或两者。 提供了测量应用，更具体地包括散射仪，椭偏仪和类似的分析方法，包括双向反射或传输分布函数测量。 所提供的装置和方法能够利用最小的运动部件分析样品的临界尺寸，其中冲击或散射角的范围通过可变的数值孔径或孔径而变化。

公开(公告)号：US20020024669A1

公开(公告)日：2002-02-28

申请号：US09893709

申请日：2001-06-29

Inventor： Lambert Danner ,  Joachim Wienecke

IPC: G01J004/00

CPC classification number: G01N21/211

Abstract: The invention concerns a spectral ellipsometer having a refractive illuminating optical system (3) that is equipped with a small illuminating aperture and is designed for a wide wavelength region. By color correction of the illuminating optical system (3), a very small measurement spot (6) is generated on a specimen surface (4).

Abstract translation: 本发明涉及一种具有折射照明光学系统（3）的光谱椭偏仪，该折射照明光学系统（3）配备有小的照明孔径并被设计用于宽波长区域。 通过照明光学系统（3）的颜色校正，在样本表面（4）上产生非常小的测量点（6）。

公开(公告)号：US20020024667A1

公开(公告)日：2002-02-28

申请号：US09940524

申请日：2001-08-29

Applicant: NEC CORPORATION

Inventor： Ichiro Hirosawa

IPC: G01J004/00

CPC classification number: G01C23/00

Abstract: By setting the linearly polarized light with normal incidence on the liquid crystal sample 3 and rotating the liquid crystal sample 3 on a rotation stage 7 within plane, the dependencies of the amplitude ratio as well as the optical retardation of the transmitted light on the azimuth of the liquid crystal sample, with respect to the polarization direction of the incident light, are measured. From these measured results, a liquid crystal pretilt angle is determined.

公开(公告)号：US20020024005A1

公开(公告)日：2002-02-28

申请号：US09893636

申请日：2001-06-29

Inventor： Chidane Ouchi

IPC: G01J004/00

CPC classification number: G03F7/706 ,  G01B9/02057 ,  G01B9/02065 ,  G01J9/02

Abstract: Disclosed is a Fizeau interference system for causing interference between reflection lights from a reflection surface and a semi-transmission surface, respectively, disposed along one and the same optical axis. The interference system includes a light source, an optical path difference applying optical system for dividing light from the light source into two lights and for re-combining them, and an interference optical system for causing reflection of the two lights passed through the optical path difference applying optical system, at corresponding one of the reflection surface and the semi-transmission surface, and to cause interference of them, wherein a difference nullF in optical path length of the light reflected by the reflection surface and with respect to the light reflected by the semi-transmission surface satisfies a relation nullnullDnullnullFnull

Abstract translation: 公开了一种Fizeau干涉系统，用于分别沿着同一个光轴设置来自反射面和半透射面的反射光之间的干涉。 干涉系统包括光源，用于将来自光源的光分为两个光并用于重新组合的光路差分施加光学系统，以及用于引起穿过光程差的两个光的反射的干涉光学系统 在反射面和半透射面的对应的一个上施加光学系统，并引起它们的干涉，其中由反射面反射的光和相对于由反射面反射的光的光路长度的差DELTAF 半透射面满足关系| DELTAD-DELTAF |

公开(公告)号：US20020012121A1

公开(公告)日：2002-01-31

申请号：US09955055

申请日：2001-09-19

Applicant: NEC CORPORATION

Inventor： Ichiro Hirosawa

IPC: G01J004/00

CPC classification number: G01C23/00

Abstract: By setting the linearly polarized light with normal incidence on the liquid crystal sample 3 and rotating the liquid crystal sample 3 on a rotation stage 7 within plane, the dependencies of the amplitude ratio as well as the optical retardation of the transmitted light on the azimuth of the liquid crystal sample, with respect to the polarization direction of the incident light, are measured. From these measured results, a liquid crystal pretilt angle is determined.

Abstract translation: 通过将液晶样品3上的正常入射的线偏振光设定在平面内的旋转台7上旋转液晶样品3，透射光的振幅比以及光学延迟对方位角的依赖性 测量相对于入射光的偏振方向的液晶样品。 从这些测量结果，确定液晶预倾角。

公开(公告)号：US20010033377A1

公开(公告)日：2001-10-25

申请号：US09840483

申请日：2001-04-23

Inventor： James D. Welch ,  Blaine D. Johs ,  Martin M. Liphardt ,  Ping He

IPC: G01J004/00

CPC classification number: G02B27/0927 ,  G01J3/10 ,  G01N21/21 ,  G01N21/211 ,  G02B27/09 ,  G02B27/0961 ,  G02B27/0966 ,  G02B27/0983

Abstract: Disclosed are systems for, and methods of controlling radial energy density profiles in, and/or cross-section dimensioning of electromagnetic beams in polarimeters, ellipsometers, reflectometers and spectrophotometers.

Abstract translation: 公开了用于控制偏振计，椭偏仪，反射计和分光光度计中电磁束的径向能量密度分布和/或横截面尺寸的系统和方法。