公开(公告)号：US07007471B2

公开(公告)日：2006-03-07

申请号：US10885280

申请日：2004-07-06

Applicant: Michael J. Sinclair

Inventor： Michael J. Sinclair

IPC: F01B29/10

CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B3/0037 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/051 ,  F02G1/04

Abstract: A unilateral in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating shuttle positioned movably parallel to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between the floating shuttle and the respective first and second anchors. The first and second anchors and the first and second sets of thermal half-beams are positioned along one side of the floating shuttle. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate. A floating cold beam connected between the shuttle and the substrate constrains and amplifies the motion of the shuttle in a predefined direction.

Abstract translation: 例如，在半导体材料的平面基板上形成单边平面内的热扣梁微电机械致动器。 致动器包括固定到基板的第一和第二锚固件以及平行于基板可移动地定位的浮动梭。 对称的第一和第二组细长的热半束固定在浮动梭和相应的第一和第二锚固件之间。 第一和第二锚定装置以及第一和第二组热半束装置沿浮动梭的一侧定位。 半波束由诸如多晶硅的半导体材料形成。 电流源通过锚定器引导电流通过热半束，以赋予热半光束的热膨胀，并因此使浮动中心光束与基底平行的线性运动。 连接在梭子和基底之间的浮动冷束限制并放大梭子在预定方向上的运动。

公开(公告)号：US07002730B2

公开(公告)日：2006-02-21

申请号：US10473532

申请日：2002-04-18

Applicant: Tohru Ishizuya ,  Keiichi Akagawa

Inventor： Tohru Ishizuya ,  Keiichi Akagawa

IPC: G02B26/08 ,  G02F1/29

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/032 ,  B81B2201/045 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/058

Abstract: The mirror device has a mirror 2, and a supporting mechanism which elastically supports the mirror 2 on a substrate 1 in a state in which the mirror floats from the substrate 1, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting parts 3A, 3B and 3C that mechanically connect the substrate 1 and mirror 2. Each of the supporting parts 3A, 3B and 3C has one or more plate spring parts 5 that are constructed from a thin film consisting of one or more layers. One end portion of each plate spring part 5 is connected to the substrate 1 via a leg part 9 which has a rising part that rises from the substrate 1. The other end portion of the plate spring part 5 is mechanically connected to the mirror 2 via a connecting part which has a rising part that rises from this other end portion. The mirror 2 is supported on the substrate 1 only via the plate spring part 5 of the respective 3A, 3B and 3C. As a result, compactness and mass production characteristics can be greatly improved while maintaining superior optical characteristics.

Abstract translation: 镜装置具有反射镜2和支撑机构，其以反射镜从基板1浮起的状态将基板1上的反射镜2弹性支撑，使得反射镜能够在任意方向上倾斜。 支撑机构具有机械地连接基板1和反射镜2的三个支撑部分3A，3B和3C。 每个支撑部分3A，3B和3C具有一个或多个由一层或多层构成的薄膜构成的板簧部分5。 每个板簧部分5的一个端部经由腿部9连接到基板1，腿部9具有从基板1上升的上升部分。 板簧部5的另一端部经由具有从该另一端部上升的上升部的连接部与镜2机械连接。 反射镜2仅通过相应的3A，3B和3C的板簧部分5支撑在基板1上。因此，可以在保持优异的光学特性的同时，大大提高紧凑性和批量生产特性。

公开(公告)号：US20060006484A1

公开(公告)日：2006-01-12

申请号：US10915220

申请日：2004-08-10

Applicant: Dilan Seneviratne ,  Gregory Nielson ,  George Barbastathis ,  Harry Tuller

Inventor： Dilan Seneviratne ,  Gregory Nielson ,  George Barbastathis ,  Harry Tuller

IPC: H01L29/84

CPC classification number: B81B3/0016 ,  B81B3/0024 ,  B81B2201/032 ,  G11C23/00

Abstract: A MEMS device includes a first material structure. A second material structure includes TiN. The second material structure is moveable relative to the first material structure.

Abstract translation: MEMS器件包括第一材料结构。 第二种材料结构包括TiN。 第二材料结构可相对于第一材料结构移动。

公开(公告)号：US06895645B2

公开(公告)日：2005-05-24

申请号：US10375975

申请日：2003-02-25

Applicant: Baomin Xu ,  William S. Wong

Inventor： Baomin Xu ,  William S. Wong

IPC: H01L41/09 ,  H01L41/24 ,  H02N2/04 ,  H04R17/00 ,  H01L41/04

CPC classification number: B81B3/0024 ,  B81B2201/032 ,  H01L41/094 ,  H01L41/22 ,  H01L41/313 ,  H01L41/314 ,  H01L41/337 ,  Y10T29/42 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49147 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A bimorph structure is produced by depositing a first material on a first surface of a first substrate to form a first element structure. A second material is deposited onto a surface of a second substrate to form a second element structure. Electrodes are deposited on a surface of each of the first element structure and the second element structure. The first element structure is bonded to a first transfer substrate, and the second element structure is bonded to a second transfer substrate. The first substrate is removed from the first element structure, and the second substrate is removed from the second element structure. Second side electrodes are deposited on a second surface of each of the first element structures and the second element structure. The first element structure and the second element structure are directly bonded to each other. One of the first transfer substrate and the second transfer substrate is then removed, and the surface of the element structure from which one of the transfer substrates has been removed is bonded to a final target substrate. Thereafter, the other transfer substrate is removed, and electrical connections are made.

Abstract translation: 通过在第一基板的第一表面上沉积第一材料以形成第一元件结构来生产双压电晶片结构。 将第二材料沉积到第二基板的表面上以形成第二元件结构。 电极沉积在第一元件结构和第二元件结构中的每一个的表面上。 第一元件结构被结合到第一转移衬底，并且第二元件结构被结合到第二转移衬底。 从第一元件结构去除第一衬底，并且从第二元件结构去除第二衬底。 第二侧电极沉积在每个第一元件结构和第二元件结构的第二表面上。 第一元件结构和第二元件结构彼此直接结合。 然后去除第一转印衬底和第二转印衬底之一，并且去除了一个转印衬底的元件结构的表面被结合到最终靶衬底。 此后，移除另一转印基板，并进行电连接。

公开(公告)号：US20040251781A1

公开(公告)日：2004-12-16

申请号：US10814619

申请日：2004-03-31

Applicant: STMicroelectronics S.A.

Inventor： Guillaume Bouche ,  Pascal Ancey ,  Gregory Caruyer

IPC: H01L041/04

CPC classification number: B81B3/0078 ,  B81B2201/0271 ,  B81B2201/032 ,  B81B2203/0109 ,  H01G5/16 ,  H03H9/172 ,  H03H2009/02181

Abstract: A device comprising a resonator formed of a piezoelectric layer sandwiched between two metal electrodes, the resonator being laid on a suspended beam, the device comprising means for deforming said beam by the difference in thermal expansion coefficients.

Abstract translation: 一种包括由夹在两个金属电极之间的压电层形成的谐振器的装置，所述谐振器被放置在悬挂梁上，所述装置包括用于使所述光束变形所述热膨胀系数的差异的装置。

公开(公告)号：US06828887B2

公开(公告)日：2004-12-07

申请号：US10063762

申请日：2002-05-10

Applicant: Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

Inventor： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC: H01H5122

CPC classification number: G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

Abstract: A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

Abstract translation: 基于双稳态微机电系统（MEMS）的系统包括具有第一稳定状态的微加工梁，其中梁基本上无应力且具有特定的非线性形状和第二稳定状态。 弯曲形状可以包括简单曲线或复合曲线。 在实施例中，梁的边界条件是固定的边界条件，轴承边界条件，弹簧边界条件或其组合。 系统还可以包括致动器，其被布置成在第一和第二稳定状态之间移动梁，以及根据梁在第一和第二稳定状态之间的移动而在第一位置和第二位置之间移动的可动元件。 致动器可以包括热致动器，静电致动器，压电致动器和磁致动器中的一个。 致动器还可以包括热冲击致动器或拉链静电致动器。

公开(公告)号：US06804959B2

公开(公告)日：2004-10-19

申请号：US10036810

申请日：2001-12-31

Applicant: Michael J. Sinclair

Inventor： Michael J. Sinclair

IPC: F01B2910

CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B3/0037 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/051 ,  F02G1/04

Abstract: A unilateral in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating shuttle positioned movable parallel to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between the floating shuttle and the respective first and second anchors. The first and second anchors and the first and second sets of thermal half-beams are positioned along one side of the floating shuttle. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate. A floating cold beam connected between the shuttle and the substrate constrains and amplifies the motion of the shuttle in a predefined direction.

Abstract translation: 例如，在半导体材料的平面基板上形成单边平面内的热扣梁微电机械致动器。 致动器包括固定到基板上的第一和第二锚定件以及平行于基板移动的浮动梭。 对称的第一和第二组细长的热半束固定在浮动梭和相应的第一和第二锚固件之间。 第一和第二锚定装置以及第一和第二组热半束装置沿浮动梭的一侧定位。 半波束由诸如多晶硅的半导体材料形成。 电流源通过锚定器引导电流通过热半束，以赋予热半光束的热膨胀，并因此使浮动中心光束与基底平行的线性运动。 连接在梭子和基底之间的浮动冷束限制并放大梭子在预定方向上的运动。

公开(公告)号：US06803755B2

公开(公告)日：2004-10-12

申请号：US10001412

申请日：2001-10-25

Applicant: Patrick C. Herbert ,  Jeffrey R. Annis ,  Jun J. Yao ,  Winfred L. Morris ,  Henric Larsson ,  Richard D. Harris ,  Robert J. Kretschmann

Inventor： Patrick C. Herbert ,  Jeffrey R. Annis ,  Jun J. Yao ,  Winfred L. Morris ,  Henric Larsson ,  Richard D. Harris ,  Robert J. Kretschmann

IPC: G01R3302

CPC classification number: H03H9/462 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/051

Abstract: In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.

Abstract translation: 在使用由横臂支撑的光束的MEMS装置中，通过制造工艺引起的横向臂的电位弯曲，来自电阻损耗的温度或局部自加热由横向臂的柔性端接来适应。 或者，该弯曲被控制以便在光束运动的感测中提供对光束的选择偏置或机械优点。

公开(公告)号：US06718764B1

公开(公告)日：2004-04-13

申请号：US10184492

申请日：2002-06-28

Applicant: Niladri Sarkar ,  Aaron Geisberger

Inventor： Niladri Sarkar ,  Aaron Geisberger

IPC: F01B2910

CPC classification number: G02B6/4226 ,  B81B3/0024 ,  B81B2201/032

Abstract: A system and method of adjusting the power off positioning of a microactuator is disclosed. The microactuator has a first power off position and comprises a bimorph component. The bimorph comprises at least two materials, wherein the materials have different thermal expansion characteristics. When heated, the bimorph component of the microactuator bends due to asymmetric thermal expansion of the materials. If one of said materials is forced beyond a yield point, then when cooled, the actuator assumes a second power off position. The microactuator maintains the second power off position due to stress in the bimorph, which is induced by forcing the material beyond its yield point.

Abstract translation: 公开了一种微调制动器的停电定位调节系统和方法。 微致动器具有第一断电位置并且包括双压电晶片部件。 双压电晶片包括至少两种材料，其中材料具有不同的热膨胀特性。 当加热时，微致动器的双压电晶片由于材料的不对称热膨胀而弯曲。 如果所述材料之一被强制超过屈服点，则当冷却时，致动器采取第二次断电位置。 微致动器由于双压电晶片中的应力而保持第二断电位置，这是通过迫使材料超出其屈服点而引起的。

公开(公告)号：US20030184189A1

公开(公告)日：2003-10-02

申请号：US10112369

申请日：2002-03-29

Inventor： Michael J. Sinclair

IPC: H02N001/00

CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

Abstract translation: 静电双压电晶片致动器包括悬臂式柔性双压电晶臂，其在一端固定并绝缘到平面衬底。 在静电激活状态下，双压电晶片臂通常平行于平面衬底。 在松弛状态下，双压电晶片臂中的残余应力使其自由端从平面基板向外延伸。 致动器包括固定到基板并与基板绝缘并位于双压电晶片臂下方并与之对准的基板电极。 施加在双压电晶片臂和衬底电极之间的电势差使得双压电晶片臂和衬底电极之间的静电吸引力激活致动器。 作为可以使用这种致动器的示例性应用，描述了一种微电子机械光学显示系统。