Method for producing microcomponents
    151.
    发明授权
    Method for producing microcomponents 失效
    生产微量元件的方法

    公开(公告)号:US06736983B1

    公开(公告)日:2004-05-18

    申请号:US09979318

    申请日:2002-02-04

    Abstract: Micro-components having at least one individual layer are produced according to the method, which have functional layers 3 on the walls of inner structures, for example of flow channels. The micro-components are intended to be suitable for a large number of different applications in chemical reaction technology, for heat exchanging, for mixing substances or for evaporating liquids. In particular, the micro-components are intended to have no problems in respect of leaks in the flow channels. The method has the following method steps: A. producing the at least one individual layer by: a. producing a first metal layer or a metal foil 1; b. forming the inner structures in and/or on the first metal layer or metal foil 1 by suitable etching methods and/or metal deposition methods; and c. forming the functional layers 3 solely on the walls of the inner structures and thereafter B. stacking up and joining the one individual layer to a segment terminating the inner structures, or a plurality of individual layers to one another and to the terminating segment.

    Abstract translation: 根据该方法制备具有至少一个单独层的微组件,该方法在内部结构的壁上(例如流动通道)上具有功能层3。 微型组件旨在适用于化学反应技术中的大量不同应用,用于热交换,混合物质或蒸发液体。 特别地,微组件意在在流动通道中泄漏方面没有问题。 该方法具有以下方法步骤:A.通过以下方式产生至少一个单独的层:a。 制造第一金属层或金属箔1; b。 通过合适的蚀刻方法和/或金属沉积方法在第一金属层或金属箔1上形成内部结构和/或形成内部结构; 和c。 仅在内部结构的壁上形成功能层3,之后B.将一个单独层叠合并连接到终止内部结构的区段,或者将多个单独的层彼此堆叠并连接到终止区段。

    Process for forming metal micro-patterns on plastic substrate
    152.
    发明申请
    Process for forming metal micro-patterns on plastic substrate 失效
    在塑料基板上形成金属微图案的工艺

    公开(公告)号:US20030024632A1

    公开(公告)日:2003-02-06

    申请号:US10211122

    申请日:2002-08-02

    Abstract: A process, which comprises forming a metal micro-pattern on the surface of an inorganic substrate, surface-treating the surface of the metal micro-pattern and the surface of the plastic substrate to make it chemically reactive, and bringing the metal micro-pattern into contact with the surface of the plastic substrate to transfer the metal micro-pattern from the surface of the inorganic substrate to the surface of the plastic substrate, can be easily and simply carried out using conventional equipments to produce one or more metal pattern fixed on a plastic material.

    Abstract translation: 一种方法,其包括在无机基材的表面上形成金属微图案,对金属微图案的表面和塑料基材的表面进行表面处理,使其具有化学反应性,并使金属微图案 与塑料基板的表面接触以将金属微图案从无机基板的表面转移到塑料基板的表面,可以使用常规设备容易且简单地进行以产生固定在一个或多个金属图案上的一个或多个金属图案 一种塑料材料。

    Suspended moving channels and channel actuators for microfluidic applications and method for making
    155.
    发明授权
    Suspended moving channels and channel actuators for microfluidic applications and method for making 失效
    用于微流控应用的悬挂移动通道和通道执行器和制造方法

    公开(公告)号:US06180536B2

    公开(公告)日:2001-01-30

    申请号:US09090840

    申请日:1998-06-04

    CPC classification number: B81C1/00587 B81B2201/051 Y10S366/03

    Abstract: A microfabrication process for making enclosed, subsurface microfluidic tunnels, cavities, channels, and the like within suspended beams includes etching a single crystal silicon wafer to produce trenches defining a beam. The trench walls are oxidized, and the interior of the beam is etched through a channel via on the top of the beam to form a hollow beam with oxide sidewalls. The beam is released, and the via is then sealed to form an enclosed released channel beam,

    Abstract translation: 用于在悬挂梁内制造封闭的,地下微流体通道,空腔,通道等的微加工方法包括蚀刻单晶硅晶片以产生限定光束的沟槽。 沟槽壁被氧化,并且梁的内部通过在梁的顶部上的通道蚀刻而形成具有氧化物侧壁的中空梁。 将光束释放,然后将通孔密封以形成封闭释放的通道光束,

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