PIEZOELECTRIC ACTUATOR AND PIEZOELECTRIC ACTUATING PLATE THEREOF

    公开(公告)号:US20180331276A1

    公开(公告)日:2018-11-15

    申请号:US15973976

    申请日:2018-05-08

    CPC classification number: H01L41/098 F15B5/006 H01L41/053 H01L41/332

    Abstract: A piezoelectric actuator for a miniature fluid transportation device is provided and includes a piezoelectric actuating plate and a piezoelectric element. The piezoelectric actuating plate includes a suspension plate, an outer frame, and brackets. The suspension plate has a first thickness. The outer frame is arranged around the suspension plate and has a third thickness. Each of the brackets is connected between the suspension plate and the outer frame and has a fourth thickness. The third thickness is larger than the first thickness, and the first thickness is larger than the fourth thickness. The suspension plate, the outer frame and the brackets are constructed to form different stepped structures to minimize the thickness of the brackets, enhance the elasticity of the brackets. Thus, displacement of the suspension plate in the vertical direction is enhanced and the transportation efficiency of the miniature fluid transportation device is intensified.

    FLUID TRANSPORTATION DEVICE
    163.
    发明申请

    公开(公告)号:US20180209411A1

    公开(公告)日:2018-07-26

    申请号:US15875469

    申请日:2018-01-19

    Abstract: A fluid transportation device for transportation fluid comprises a valve main body, a valve chamber base, a valve membrane, an actuator and a cover body, and locked and positioned by several locking elements, the electrically conductive locking elements are correspondingly penetrated through the penetration holes of the valve main body, the valve chamber base and the vibration plate of the valve membrane to lock with the corresponding screw holes, and a plurality of thread grooves respectively disposed on the vibration plate, the valve main body and the valve chamber base are corresponding to two thread grooves of the cover body, and an electrode lead of the piezoelectric element is embedded into the two thread grooves of the cover body and embedded into the thread grooves of the vibration plate, valve main body and the valve chamber base, so that the fluid transportation device is assembled.

    FLUID CONTROL DEVICE
    166.
    发明申请

    公开(公告)号:US20180066642A1

    公开(公告)日:2018-03-08

    申请号:US15640727

    申请日:2017-07-03

    Abstract: A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a first surface of the vibration plate. The piezoelectric element is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. A bulge is formed on a second surface of the vibration plate. The deformable substrate includes a flexible plate and a communication plate, which are stacked on each other. Consequently, a synchronously-deformed structure is defined by the flexible plate and the communication plate collaboratively, and there is a specified depth maintained between the flexible plate and the bulge of the vibration plate. The flexible plate includes a movable part corresponding to the bulge of the vibration plate.

    MANUFACTURING METHOD OF FLUID CONTROL DEVICE
    167.
    发明申请

    公开(公告)号:US20180065368A1

    公开(公告)日:2018-03-08

    申请号:US15641022

    申请日:2017-07-03

    Inventor: Yung-Lung Han

    Abstract: A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The deformable substrate includes a flexible plate and a communication plate. A bulge is formed on the vibration plate. The flexible plate includes a movable part. Next, the flexible plate and the communication plate are stacked and coupled, and a preformed synchronous deformation process is implemented by applying at least one external force to outer portion of the deformable substrate to form a preformed synchronously-deformed structure. Then, the housing, the piezoelectric actuator and the deformable substrate are sequentially stacked and coupled. The preformed synchronously-deformed structure is aligned with the bulge of the vibration plate. Consequently, a specified depth is defined between the movable part of the flexible plate and the bulge of the vibration plate.

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