Method for fabricating a hollow micro-needle array
    161.
    发明申请
    Method for fabricating a hollow micro-needle array 审中-公开
    中空微针阵列的制造方法

    公开(公告)号:US20050011858A1

    公开(公告)日:2005-01-20

    申请号:US10622892

    申请日:2003-07-16

    Abstract: A method for fabricating a hollow micro-needle array by first providing a silicon substrate; depositing a protective layer on the silicon substrate; defining a plurality of regions for wet etching; wet etching the silicon substrate forming a plurality of recesses that have inclined sidewalls; and continuing processing by electroplating, imaging/developing or micro-machining the plurality of recesses forming a hollow micro-needle array.

    Abstract translation: 一种通过首先提供硅衬底制造中空微针阵列的方法; 在硅衬底上沉积保护层; 限定用于湿蚀刻的多个区域; 湿式蚀刻硅衬底,形成具有倾斜侧壁的多个凹部; 以及通过电镀,成像/显影或微加工形成中空微针阵列的多个凹槽来进行连续加工。

    Microneedle array module and method of fabricating the same
    162.
    发明申请
    Microneedle array module and method of fabricating the same 有权
    微针阵列模块及其制造方法

    公开(公告)号:US20040243063A1

    公开(公告)日:2004-12-02

    申请号:US10885402

    申请日:2004-07-06

    Abstract: A microneedle array module is disclosed comprising a multiplicity of microneedles affixed to and protruding outwardly from a front surface of a substrate to form the array, each microneedle of the array having a hollow section which extends through its center to an opening in the tip thereof. A method of fabricating the microneedle array module is also disclosed comprising the steps of: providing etch resistant mask layers to one and another opposite surfaces of a substrate to predetermined thicknesses; patterning the etch resistant mask layer of the one surface for outer dimensions of the microneedles of the array; patterning the etch resistant mask layer of the other surface for inner dimensions of the microneedles of the array; etching unmasked portions of the substrate from one and the other surfaces to first and second predetermined depths, respectively; and removing the mask layers from the one and the other surfaces. One embodiment of the method includes the steps of: providing an etch resistant mask layer to the other surface of the substrate to a predetermined thickness; patterning the etch resistant mask layer of the other surface to define a reservoir region in the substrate; and etching away the unmasked reservoir region of the substrate to form a reservoir well in the other surface of the substrate. A layer of material may be provided to the other surface to enclose the reservoir well and a passageway is provided through the layer to the well region.

    Abstract translation: 公开了一种微针阵列模块,其包括固定到衬底的前表面并从衬底的前表面向外突出的多个微针以形成阵列,阵列的每个微针具有中空部分,该中空部分通过其中心延伸到其尖端中的开口。 还公开了一种制造微针阵列模块的方法,包括以下步骤:将衬底的一个和另一个相对表面的抗蚀刻掩模层提供到预定厚度; 图案化该阵列的微针的外部尺寸的一个表面的耐蚀刻掩模层; 为阵列的微针的内部尺寸构图另一表面的耐蚀刻掩模层; 将衬底的未掩模部分从一个和另一个表面蚀刻到第一和第二预定深度; 以及从一个和另一个表面去除掩模层。 该方法的一个实施例包括以下步骤:向衬底的另一表面提供预定厚度的耐蚀刻掩模层; 图案化另一表面的耐蚀刻掩模层以限定衬底中的储存器区域; 并蚀刻掉衬底的未掩模的储存区域,以在衬底的另一表面中形成储存器孔。 可以将一层材料提供到另一表面以封闭储存器井,并且通过该层将通道提供到井区。

    Intracutaneous edged microneedle apparatus
    163.
    发明授权
    Intracutaneous edged microneedle apparatus 有权
    经皮边缘微针装置

    公开(公告)号:US06652478B1

    公开(公告)日:2003-11-25

    申请号:US09580780

    申请日:2000-05-26

    Abstract: A hollow microneedle with a substantially sharp edge is provided that includes at least one longitudinal blade at the top surface or tip of the microneedle to aid in penetration of the stratum corneum of skin. In a preferred embodiment, there are two such longitudinal blades that are constructed on opposite surfaces at approximately a 180° angle along the cylindrical side wall of the microneedle. Each edged blade has a cross-section that, when viewed from above the microneedle top, has an isosceles triangle profile. The blade's edge can run the entire length of the microneedle from its very top surface to its bottom surface where it is mounted onto the substrate, or the edge can be discontinued partway down the length of the microneedle. A star-shaped solid microneedle also is provided having at least one blade with a relatively sharp edge to assist in penetrating the stratum corneum of skin. In a preferred embodiment, a three pointed star-shape is used, in which each blade has an isosceles triangular cross-section when viewed from the top of the microneedle. The base of each of the isosceles triangles meets at a center of the microneedle to form the star-shaped structure. At least one hole through the substrate is located near the side surfaces of the pairs of blades of the solid microneedle.

    Abstract translation: 提供具有基本锋利边缘的中空微针,其包括在微针的顶表面或尖端处的至少一个纵向刀片,以有助于皮肤角质层的穿透。 在优选实施例中,存在两个这样的纵向叶片,其沿着微针的圆柱形侧壁以大约180°的角度在相对的表面上构造。 每个边缘叶片具有横截面,当从上面观察微针顶部时,其具有等腰三角形轮廓。 刀片的边缘可以将微针的整个长度从其最上表面延伸到其底部表面,在其底部安装到基底上,或者边缘可以在微针的长度上中断。 还提供了星形固体微针,其具有至少一个具有相对锋利边缘的刀片,以有助于穿透皮肤角质层。 在优选实施例中,使用三角星形,其中当从微针的顶部观察时,每个叶片具有等腰三角形横截面。 每个等腰三角形的基部在微针的中心相交,形成星形结构。 穿过基底的至少一个孔位于固体微针的成对叶片的侧表面附近。

    Methods of fabricating microneedle arrays using sacrificial molds, and microneedle arrays fabricated thereby
    164.
    发明申请
    Methods of fabricating microneedle arrays using sacrificial molds, and microneedle arrays fabricated thereby 有权
    使用牺牲模具制造微针阵列的方法和由此制造的微针阵列

    公开(公告)号:US20030111759A1

    公开(公告)日:2003-06-19

    申请号:US10304277

    申请日:2002-11-26

    Abstract: Microneedle arrays are fabricated by providing a sacrificial mold including a substrate and an array of posts, preferably solid posts, projecting therefrom. A first material is coated on the sacrificial mold including on the substrate and on the array of posts. The sacrificial mold is removed to provide an array of hollow tubes projecting from a base. The inner and outer surfaces of the array of hollow tubes are coated with a second material to create the array of microneedles projecting from the base. The sacrificial mold may be fabricated by fabricating a master mold, including an array of channels that extend into the master mold from a face thereof. A third material is molded into the channels and on the face of the master mold, to create the sacrificial mold. The sacrificial mold then is separated from the master mold. Alternatively, wire bonding may be used to wire bond an array of wires to a substrate to create the sacrificial mold. The first material preferably is coated on the sacrificial mold by plating. Prior to plating, a plating base preferably is formed on the sacrificial mold including on the substrate and on the array of posts. The inner and outer surfaces of the array of hollow tubes preferably are coated with the second material by overplating the second material on the inner and outer surfaces of the array of hollow tubes.

    Abstract translation: 微针阵列通过提供包括基底和从其突出的柱的阵列(优选固体柱)的牺牲模具来制造。 第一材料涂覆在牺牲模具上,包括在基板上和柱阵列上。 去除牺牲模具以提供从基部突出的中空管阵列。 中空管阵列的内表面和外表面涂覆有第二材料以产生从基底突出的微针阵列。 牺牲模具可以通过制造主模具来制造,该模具包括从其表面延伸到主模具中的通道阵列。 将第三种材料模制到通道中并在母模的表面上,以形成牺牲模具。 然后将牺牲模具与主模具分离。 或者,引线接合可用于将线阵列引线接合到基底以产生牺牲模。 第一种材料优选通过电镀涂覆在牺牲模具上。 在电镀之前,优选在包括在基板和柱阵列上的牺牲模具上形成镀覆基底。 优选地,中空管阵列的内表面和外表面通过在中空管阵列的内表面和外表面上的第二材料的超镀层来涂覆第二材料。

    Method for fabricating arrays of micro-needles
    165.
    发明授权
    Method for fabricating arrays of micro-needles 失效
    微针阵列的制造方法

    公开(公告)号:US06551849B1

    公开(公告)日:2003-04-22

    申请号:US09705460

    申请日:2000-11-02

    Abstract: An array of micro-needles is created by forming an array pattern on the upper surface of a silicon wafer and etching through openings in the pattern to define micro-needle sized cavities having a desired depth. The mold thus formed may be filled with electrically conductive material, after which a desired fraction of the silicon wafer bulk is removed from the bottom-up by etching, to expose an array of projecting micro-needles. The mold may instead be filled with a flexible material to form a substrate useful in gene cell probing. An array of hollow micro-needles may be formed by coating the lower wafer surface with SiN, and etching through pattern openings in the upper surface down to the SiN layer, and then conformally coating the upper surface with thermal silicon dioxide. The SiN layer is then stripped away and a desired fraction of the bulk of the wafer removed from the bottom-up to expose an array of projecting hollow micro-needles.

    Abstract translation: 通过在硅晶片的上表面上形成阵列图案并通过图案中的开口蚀刻以限定具有期望深度的微针尺寸的空腔来产生微针阵列。 如此形成的模具可以用导电材料填充,然后通过蚀刻从底部向上去除硅晶片块的所需部分,以暴露突出的微针阵列。 模具可以替代地填充柔性材料以形成用于基因细胞探测的底物。 可以通过用SiN涂覆下晶片表面并且通过在上表面中的图案开口蚀刻到SiN层,然后用热二氧化硅共形地涂覆上表面来形成中空微针阵列。 然后剥离SiN层,并且从底部向上移除晶片本体的所需部分以暴露突出的中空微针阵列。

    Microneedle devices and production thereof
    167.
    发明申请
    Microneedle devices and production thereof 有权
    微针装置及其制造

    公开(公告)号:US20020082543A1

    公开(公告)日:2002-06-27

    申请号:US10023259

    申请日:2001-12-14

    Abstract: Microneedle devices and methods of manufacture are provided for transport of molecules or energy across or into biological barriers, such as skin. The device can comprise one or more microneedles formed of a first material and a second material, wherein the second material is dispersed throughout the first material or forms a portion of the microneedle. The first material preferably is a polymer. The second material can be pore forming agents, structural components, biosensor, or molecules for release, such as drug. The device also can comprise a substrate and a plurality of microneedles extending from the substrate, wherein the microneedles have a beveled or tapered tip portion, a longitudinally extending exterior channel, or both. Methods of making these devices include providing a mold having a plurality of microdepressions which define the surface of a microneedle; filling the microdepressions with a first molding material; and molding the material, thereby forming microneedles.

    Abstract translation: 提供微针装置和制造方法用于将分子或能量跨越或进入生物屏障例如皮肤。 该装置可以包括由第一材料和第二材料形成的一个或多个微针,其中第二材料分散在整个第一材料中或形成微针的一部分。 第一种材料优选是聚合物。 第二种材料可以是成孔剂,结构组分,生物传感器或用于释放的分子,例如药物。 该装置还可以包括基板和从基板延伸的多个微针,其中微针具有斜切或锥形尖端部分,纵向延伸的外部通道或两者。 制造这些装置的方法包括提供具有限定微针表面的多个微挤压的模具; 用第一成型材料填充微压缩物; 并模制材料,从而形成微针。

    Microneedle devices and methods of manufacture and use thereof
    168.
    发明授权
    Microneedle devices and methods of manufacture and use thereof 有权
    微针装置及其制造和使用方法

    公开(公告)号:US06334856B1

    公开(公告)日:2002-01-01

    申请号:US09316229

    申请日:1999-05-21

    Abstract: Microneedle devices are provided for transport of therapeutic and biological molecules across tissue barriers and for use as microflameholders. In a preferred embodiment for transport across tissue, the microneedles are formed of a biodegradable polymer. Methods of making these devices, which can include hollow and/or porous microneedles, are also provided. A preferred method for making a microneedle includes forming a micromold having sidewalls which define the outer surface of the microneedle, electroplating the sidewalls to form the hollow microneedle, and then removing the micromold from the microneedle. In a preferred method of use, the microneedle device is used to deliver fluid material into or across a biological barrier from one or more chambers in fluid connection with at least one of the microneedles. The device preferably further includes a means for controlling the flow of material through the microneedles. Representative examples of these means include the use of permeable membranes, fracturable impermeable membranes, valves, and pumps.

    Abstract translation: 提供微针装置用于将组织屏障上的治疗和生物分子转运并用作微火焰保持器。 在用于跨组织输送的优选实施方案中,微针由可生物降解的聚合物形成。 还提供制造这些装置的方法,其可以包括中空和/或多孔微针。 用于制造微针的优选方法包括形成具有限定微针的外表面的侧壁的显微镜,电镀侧壁以形成中空微针,然后从微针中去除微镜。 在优选的使用方法中,微针装置用于将流体材料输送到生物屏障中,或者与一个或多个腔室中的至少一个微针流体连接。 该装置优选地还包括用于控制通过微针的材料流动的装置。 这些方法的代表性实例包括使用可渗透膜,可破裂的不渗透膜,阀和泵。

    Process of making a molded device
    169.
    发明授权
    Process of making a molded device 有权
    制造模制装置的工艺

    公开(公告)号:US06331266B1

    公开(公告)日:2001-12-18

    申请号:US09408450

    申请日:1999-09-29

    Abstract: A device, preferably a micro-device, is molded from a plastic material by injection molding, compression molding or embossing. A microabrader can be molded having microneedles for abrading the stratum corneum of the skin to form an abraded site in the tissue for enhancing drug delivery. The micro-device is molded using a mold assembly having a silicon molding surface. The silicon molding surface can include a recess corresponding to the desired shape and length of the microneedles. The silicon molding surface enables micron and submicron size features to be molded from polymeric materials without the polymeric material adhering to the mold surface. Micro-devices having molded features having micron and submicron dimensions can be rapidly produced without the use of a release agent.

    Abstract translation: 一种装置,优选一种微型装置,通过注塑,压塑或压花由塑料材料模制。 微型造型机可以模制成具有用于研磨皮肤角质层的微针,以在组织中形成用于增强药物递送的磨损部位。 使用具有硅模制表面的模具组件来模制微型装置。 硅成型表面可以包括对应于所需形状和长度的微针的凹部。 硅成型表面使得微米和亚微米尺寸的特征能够由聚合物材料模制而不会使聚合材料粘附到模具表面。 具有微米和亚微米尺寸的模制特征的微型装置可以在不使用脱模剂的情况下快速生产。

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