Method and apparatus for reducing particulate generation caused by door
or cover flexing on high vacuum equipment

    公开(公告)号:US5263518A

    公开(公告)日:1993-11-23

    申请号:US806826

    申请日:1991-12-06

    Applicant: Peter Ebbing

    Inventor: Peter Ebbing

    CPC classification number: B01J3/002 B01J3/03

    Abstract: An inner lid is attached to a vacuum chamber, covering an inner region of the vacuum chamber. An outer lid, also attached to the vacuum chamber, covers the inner lid, leaving a region between the inner lid and the outer lid. A gas conduit allows gas to flow between the inner region of the vacuum chamber and the region between the inner lid and the outer lid. A filter is placed in or immediately outside the gas conduit to prevent particles from entering the inner region of the vacuum chamber from the region between the inner lid and the outer lid. Since the pressure is the same on the top and bottom of the inner lid, the inner lid does not flex and thus does not rub against the vacuum chamber when the vacuum chamber is pumped down or vented up.

    Fine pressure control system for high pressure gas
    162.
    发明授权
    Fine pressure control system for high pressure gas 失效
    高压气体精密压力控制系统

    公开(公告)号:US5257640A

    公开(公告)日:1993-11-02

    申请号:US780707

    申请日:1991-10-18

    Abstract: A system for precisely controlling gas under high pressure produces an initial gas pressure in a pressure chamber while applying a predetermined amount of power to a heating element located in the pressure chamber and then applies a computed change of power to produce an average gas temperature increase or decrease in the pressure chamber and thereby rapidly produce an increase or decrease in gas pressure with resolution limited by the resolution of measurement of gas pressure in the pressure chamber and the application of the computed change of power. The described invention is particularly advantageous at gas pressure above roughly 1000 pounds per square inch.

    Vacuum process apparatus
    163.
    发明授权
    Vacuum process apparatus 失效
    真空过程装置

    公开(公告)号:US5245736A

    公开(公告)日:1993-09-21

    申请号:US888111

    申请日:1992-05-26

    Inventor: Roman Schertler

    Abstract: The invention proceeds from a vacuum process apparatus for an article which is processed or treated, resp. at two stations, whereby each station has a charging and/or removing opening for the article. A transporting device is supported for rotation and includes a supporting portion which is successively moved onto the openings of the stations. The process plant is designed in such a manner that the surface normals determined by the surfaces of the openings and the space axis defined by the axis of rotation of the transport device do not run parallel and rather enclose together an angle of 90.degree. or 45.degree.. By such an arrangement it is possible to design extremely compact vacuum vapor deposition apparatuses having a plurality of individual stations, whereby additionally short transporting distances are obtainable and the volumes to be conditioned can be minimized.

    Abstract translation: 本发明从用于处理或处理的制品的真空处理装置进行, 在两个车站,每个车站具有用于物品的充电和/或移除开口。 传送装置被支撑为旋转,并且包括连续地移动到站的开口上的支撑部分。 工艺设备的设计使得由开口表面和由运输装置的旋转轴线限定的空间轴确定的表面法线不平行行进并且以90度或45度的角度包围在一起 。 通过这样的布置,可以设计具有多个单独的站的非常紧凑的真空气相沉积设备,由此可以获得更短的输送距离,并且可以将待调节的体积最小化。

    Apparatus and method for delivering supercritical fluid
    164.
    发明授权
    Apparatus and method for delivering supercritical fluid 失效
    装置和方法提供超临界流体

    公开(公告)号:US5237824A

    公开(公告)日:1993-08-24

    申请号:US613784

    申请日:1990-10-12

    Abstract: A method and apparatus for delivering supercritical fluids uses one or two high pressure vessels. Each vessel is cooled below the critical temperature of the fluid while the vessel is being filled. The inlet is then closed and the vessel is heated to attain a predetermined pressure. The outlet of the vessel is then opened and supercritical fluid flows from the vessel for use in various processes such as extraction or chromatography. As the fluid flows from the high pressure vessel, the pressure is controlled by adjusting the temperature of the high pressure vessel. Usually, the temperature of the vessel will be increased as the supercritical fluid exits from the vessel. When two high pressure vessels are used, the vessels can be refilled on an alternating basis so that a continuous supply of supercritical fluid can be made available as long as it is required. The high pressure vessels can be two pieces of stainless steel tubing. The system is essentially maintenance free as there are virtually no moving parts. With previous delivery systems for high pressure fluids, high pressure pumps are used. These pumps are relatively expensive and can be subject to problems such as noise and leakage.

    Abstract translation: PCT No.PCT / CA90 / 00053 Sec。 371 1990年10月12日第 102(e)日期1990年10月12日PCT 1990年2月16日提交PCT公布。 出版物WO90 / 09233 1990年8月23日。用于输送超临界流体的方法和装置使用一个或两个高压容器。 当容器被填充时,将每个容器冷却到流体的临界温度以下。 然后将入口关闭,并且将容器加热以获得预定压力。 然后打开容器的出口,超临界流体从容器流出,用于各种方法如萃取或色谱法。 当流体从高压容器流出时,通过调节高压容器的温度来控制压力。 通常,当超临界流体从容器出来时,容器的温度将增加。 当使用两个高压容器时,可以在交替的基础上重新填充容器,使得只要需要,可连续供应超临界流体。 高压容器可以是两片不锈钢管。 该系统基本上是免维护的,因为实际上没有移动部件。 使用先前的高压流体输送系统,使用高压泵。 这些泵相对昂贵,并且可能会遇到噪音和泄漏等问题。

    Lighting and viewing unit
    165.
    发明授权
    Lighting and viewing unit 失效
    照明和观察单元

    公开(公告)号:US5230556A

    公开(公告)日:1993-07-27

    申请号:US942042

    申请日:1992-09-08

    Abstract: A unit for viewing and supplying light or radiant energy to the interior of a vessel that has a front fused glass window. The light and camera-viewing means see the interior of a vessel through this fused glass window which provides a substantially corrosion-proof seal across the entire distal portion of the unit. The light and camera-viewing means are pointed into the interior of the vessel in substantially the same direction.

    Abstract translation: 用于在具有前玻璃窗的容器的内部观察和供应光或辐射能的单元。 光和照相机观察装置通过该熔融玻璃窗看到容器的内部,其在整个单元的远端部分提供基本上耐腐蚀的密封。 光和照相机观察装置以大致相同的方向指向容器的内部。

    Explosion suppressive foil
    166.
    发明授权
    Explosion suppressive foil 失效
    防爆箔

    公开(公告)号:US5163573A

    公开(公告)日:1992-11-17

    申请号:US700456

    申请日:1991-05-15

    Applicant: Chong K. Kang

    Inventor: Chong K. Kang

    CPC classification number: A62C3/06 B01J3/002 B65D25/385

    Abstract: This invention relates to an explosion suppressive foil inserted within a container charged with inflammable or explosive liquid. This explosion suppressive foil is made of an aluminum alloy foil substrate having a number of slant surfaces having cylindrical walls are arranged side by side so as to be adjoined together thereon, and a circular hole is defined on every annular slant surface.

    Abstract translation: 本发明涉及一种插入容纳有易燃易爆液体的容器内的防爆箔。 该防爆箔由具有多个具有圆筒壁的倾斜面的铝合金箔基板构成,并排配置在一起,在每个环状倾斜面上形成圆孔。

    Rough vacuum pump using bulk getter material
    167.
    发明授权
    Rough vacuum pump using bulk getter material 失效
    粗抽真空泵采用大量吸气材料

    公开(公告)号:US5154582A

    公开(公告)日:1992-10-13

    申请号:US748273

    申请日:1991-08-21

    Inventor: Philip Danielson

    CPC classification number: F04B37/02 B01J3/006 F04B37/04 H01J7/18

    Abstract: A bulk getter-pump, consisting primarily of large beds of heated getter-material for use in pumping down a vacuum chamber to a rough vacuum. The pump is designed for applications now are served by turbo, cryo, diffusion, and ion pumps. The pump consists of a meshed cage filled with bulk getter-material pellets, which cage is housed in a housing coupled to a conduit of a vacuum chamber, so that the bulk getter-material is exposed to the interior of the vacuum chamber. In use, a roughing pump is first used to bring the chamber down to a pressure of about 2 torr, and then the bulk getter-pump of the invention is operatively coupled to the chamber for sorbing gases, in order to reach a desired vacuum.

    Abstract translation: 大量的吸气泵,主要由大量加热的吸气剂床组成,用于将真空室抽真空至真空。 该泵设计用于现在由涡轮,低温,扩散和离子泵供应的应用。 泵由一个填充有大量吸气材料颗粒的网状笼组成,其中笼子被容纳在耦合到真空室的管道的壳体中,使得本体吸气材料暴露于真空室的内部。 在使用中,首先使用粗抽泵将室降低至约2托的压力,然后本发明的本体吸气泵可操作地联接到室以吸附气体,以便达到所需的真空度。

    Modular processing system
    168.
    发明授权
    Modular processing system 失效
    模块化处理系统

    公开(公告)号:US5085410A

    公开(公告)日:1992-02-04

    申请号:US450816

    申请日:1989-12-14

    Inventor: Lester M. Ficnh

    CPC classification number: B01D59/34 H01J37/18

    Abstract: A vaporizer and extractor apparatus for a laser isotope separation process is arranged as an assemblage of modular components in which equipment subject to maintenance is replaceable via vacuum casks while the apparatus is operational or briefly shut down without loss of vacuum. A vacuum transfer cask is provided for modular extractor substrate assemblies. The substrate assemblies are nestable and are mounted on extensible probes which permit them to be nested in the vacuum transfer cask for transport. During use the substrates extend from the cask, through a vacuum lock and are placed side by side in the vacuum chamber. A vacuum transfer cask is also provided for the vaporizer assembly which is mounted on an extensible arm which in turn positions the assembly in the chamber or retraces the vaporizer assembly from the chamber into the transfer cask, rotating it during the process in order to permit it to fit into the cask. The complete vaporizer unit consisting of a crucible, two electron beam guns, a combination thermal/vapor shield and an electrical ground plate along with the associated cooling and electrical services is suspended from the extensible arm out of the vacuum transfer cask.

    Abstract translation: 用于激光同位素分离过程的蒸发器和提取器装置被布置为模块化组件的组合,其中待维护的设备可通过真空桶进行替换,同时设备可操作或短暂关闭而不损失真空。 为模块化提取器基板组件提供真空转移桶。 衬底组件是可嵌套的并且安装在可扩展的探针上,允许它们嵌套在真空转移桶中用于运输。 在使用过程中,基材从桶中延伸通过真空锁定并且并排设置在真空室中。 还提供了用于蒸发器组件的真空转移桶,该蒸发器组件安装在可伸展臂上,该可伸缩臂又将组件定位在室中,或者将蒸发器组件从室转回到转移桶中,以在该过程中使其旋转以允许 装入酒桶。 由坩埚,两个电子束枪,热/蒸气屏蔽和电接地板以及相关的冷却和电力服务组成的完整蒸发器单元从可伸缩臂悬挂出真空转移桶。

    Transfer device
    169.
    发明授权
    Transfer device 失效
    传输设备

    公开(公告)号:US5043148A

    公开(公告)日:1991-08-27

    申请号:US230411

    申请日:1988-08-10

    Applicant: Takao Yasue

    Inventor: Takao Yasue

    CPC classification number: B01J3/006 Y10T436/25

    Abstract: A transfer vessel for transporting a specimen between two vacuum apparatuses while maintaining the specimen under a high vacuum. The device has a hermetic container for accommodating a specimen removed from a vacuum apparatus and for supporting the specimen. A pressure reducing device reduces the pressure in the hermetic container by adsorbing a gaseous matter contained therein.

    Abstract translation: 用于在两个真空装置之间运送试样同时在高真空下保持试样的转移容器。 该装置具有用于容纳从真空装置中取出并用于支撑试样的试样的密封容器。 减压装置通过吸附其中所含的气态物质来降低密封容器中的压力。

    Reactor vessel
    170.
    发明授权
    Reactor vessel 失效
    反应釜

    公开(公告)号:US5027971A

    公开(公告)日:1991-07-02

    申请号:US594493

    申请日:1990-10-04

    Abstract: A pressure proof reactor vessel and the method of making such vessel wherein the vessel has a cylindrical one-piece outer shell and a cylindrical one-piece cylindrical inner shell, which inner shell has a smooth continuous interior surface spaced radially inwardly from the outer wall and concentric thereto. The outer cylindrical shell is formed from a one-piece material with its radial thickness being substantially greater than the radial thickness of the inner cylindrical shell. Support means in the form of a spiral or vertically disposed is positioned in the space between the cylindrical outer surface wall of the inner shell and the cylindrical outer shell defining a pathway for the flow of coolant between the outer wall and the inner wall. The support means is secured to the inner surface of the one-piece cylindrical outer shell while the inner shell is plug welded to the support means.

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